20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?

W2M/4M

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

Siiiil"Tivrc

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.

Series CM2X-Z 10- ø20, ø25, ø32, ø40 Low Speed Cylinder 11- Double Acting, Single Rod

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 X L 40 150 Z M9BW Low speed cylinder Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Auto switch Nil Without auto switch For applicable

ACG

(The SI unit type is provided for use in Japan.) (1) (3) (2) (1) (2) Note 1) Wall mount is not available for size 20 regulator with downward facing handle in B combination. Contact SMC when wall mount is needed. Note 2) The number inside ( ) indicates the combination order counted from the inlet side.

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?

C)2.5 (at 20 C)?

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 902.0 (at 20C)2.3 (at 20C)?

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?

C)2.5 (at 20 C)?

C)2.5 (at 20 C)?

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

C)1.25 (at 20 C)?

C)1.25 (at 20 C)?

C)2.5 (at 20 C)?

C)2.5 (at 20 C)?

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?

20 to 40C: FluorinertTM20 to 90C: FluorinertTMFC-3283/GALDEN?HT135FC-40/GALDEN? HT200?20 to 908.0 (at 20C)3.3 (at 20C)?