PF2D

1 Digital Flow Switch For Deionized Water and Chemicals Series PF2D ZSE ISE PSE Body and sensor Body and sensor New PFA New PFA Z I SE3 PS Tube Tube Super PFA Super PFA Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP Three types of flow range 0.4 to

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

MRHQ

Insert the switch into the switch case, and install switch holder B into the first groove (MRHQ20/25) or the second groove (MRHQ10/16) and secure the switch.

Suction cups with flange

ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J ZP B25 J ZPGB25J-7A-X2 14 15 15 18 ZP2-B25J ZPT3-7A-X2

PSxx-OMS0006CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

ZL3-OM00801

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZL3-OM00801-A /ZL3ZL6 / 1)1 1.5 *3) 2) 3 3)1 1 () 3 - No.ZL3-OM00801-A () -() 4 No.ZL3-OM00801-A 1.

PFA/PFW

a) Use a water hammer relief valve, etc. to slow the valve's closing speed. b) Absorb impact pressure by using an accumulator, or elastic piping material such as rubber hose. c) Make the length of piping as short as possible. 8. Design so that the flow of liquid always fills the detection passage.

Escapements Series MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

PSxx-OMU0005CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8,433: *2) 1. 2. 3. 1. 2. 3. 4

240

LEH Time LEY -X5 A (LEPY10L) B 11LEFS Set value of pushing force [%] Duty ratio [%] Continuous pushing time [minute] 11LEJS Duty ratio = A/B x 100 [%] 70 or less 100 25A80 70 10 100 50 5 50 LEC * [Set value of pushing force] is one of the step data input to the controller. * [Continuous pushing time] is the time that the actuator can continuously

CE

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

CUJ

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.

PSxx-OMM0002CN

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : : : 1. 2. 3. 1. 2. 3. 4.

0.5

Without Flow Rate Adjustment Function Compact fan type Air flow Nil 0.66 m3/min L 0.46 m3/min R IZF10 B With Flow Rate Adjustment Function Compact fan type Bracket Nil None B With bracket With flow rate adjustment function (0.19 to 0.80 m3/min) Power supply cable, AC adapter Nil With power supply cable (3 m) Z With power supply cable (10 m) H*1 e-con connector Q With AC adapter (with AC cord

Ionizer

Power supply 24 VDC B B B Ground with a ground resistance of 100 or less without connecting the DC1 () lead (Blue) of the power supply cable to the power supply 0 V. Red A A +24 V Black Blue Charged object Charged object 0 V Reduced-wiring Fieldbus System F.G. (mm) Ground with a ground resistance of 100 or less. A B When using the autobalance sensor (body-mounting type) 10 20 20 40 3.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

4-channel Flow Monitor ( compatible)

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

Large Bore Compact Cylinder Series CQ2

Z Y69BZ Auto switches marked with a "" symbol are produced upon receipt of order.