Test data available upon request. 40-140'F (5 -60"C) Non relieving type (Standard), 'Relieving type (NSR1101, NSR1, NSR3101, NSR3111, NSR4101, NSR4111) only applicabl icr N2 gas or air HolIY TO ORDER F luid / Diaphrag m M aterinl a I allvt size M5-10-32Nom(t!
Nickel plated Clear anodized 1 Carbon steel Body Aluminum alloy Hexagon socket head cap screw B 13 Nickel plated Hard anodized 2 Tube Hexagon socket head cap screw C Carbon steel Aluminum alloy 14 Clear anodized 3 Rod cover Magnet Magnet Aluminum alloy 15 Chromated 4 Piston Plug Carbon steel Aluminum alloy 16 Electroless nickel plated 5 Piston rod Element Resin Carbon steel 17 Anodized 6
pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07 1 H K 5 T14 C
This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD
x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69
Note Outlet pressure (MPa) 136413 ARM2500 ARM3000 Hexagon socket head cap screw (M5 x 70) 4 With flat washer 136313 IRV Hexagon socket head cap screw (M6 x 85) 4 With flat washer VEX SRH Option/Bracket Assembly SRP Individual IN type can be used as a single unit regulator.
Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.
Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16
Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36
0 @2 O-ring C Bumper Urethane NBR !1 @3 Nickel plated Electroless nickel plated Reinforcement ring Hexagon socket head cap screw A Carbon steel Carbon steel !2 @4 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 40 MGF40-PS Items !
Body Size: 20, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 1/4, Option: C + G, Attachment: Standard, Semi-Standard 1: 3 + C, Semi-Standard 2: Standard
Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 5, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.07~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Female Thread, Auto Switches
Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.07~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Female Thread, Auto Switches
Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.07~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Female Thread, Auto Switches
Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.07~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Female Thread, Auto Switches
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.07~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Female Thread, Auto Switches
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.07~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Female Thread, Auto Switches
Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.07~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Female Thread, Auto Switches
Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.05~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Male Thread, Auto Switches:
Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Operating Temperature(°C): -10~60, Operating Pressure(MPa): 0.05~1.0, Support bracket: Threaded, Port thread type: M5, Body Options: Rod End Male Thread, Auto Switches: