MRQ

x 0.8 (The port is plugged for delivery.)

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

x 0.8 Rc 1/8 Piping port size Rc 1/8 Lock port CNS Spring locking (Exhaust locking) Pneumatic locking (Pressure locking) Spring and pneumatic lock Lock operation CLS Constraints associated with the allowable kinetic energy are imposed on the speeds at which the piston can be locked.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

Individual -X 221

MY1B

X416 Holder mounting bracket X417 Holder mounting bracket D-X Individual -X Technical data 957

RLQ

-X Minimum auto switch mounting stroke Proper auto switch mounting position (detection at stroke end) and mounting height Operating range Switch mounting bracket: Part no. Individual -X 845

New Style T type spacer , Facilitates the redirection of air flow , Easy maintenance , Port size: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, T-TYPE SPACER, AIRLINE EQUIPMENT, AC MASS PRO, 22, AC MASS PRO NO SIZE RATING, .13200 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56

New Style T type spacer , Facilitates the redirection of air flow , Easy maintenance , Port size: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, T-TYPE SPACER, AIRLINE EQUIPMENT, AC MASS PRO, 22, AC MASS PRO NO SIZE RATING, .13200 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56

New Style T type spacer , Facilitates the redirection of air flow , Easy maintenance , Port size: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, T-TYPE SPACER, AIRLINE EQUIPMENT, AC MASS PRO, 22, AC MASS PRO NO SIZE RATING, .16940 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56

IDX-OM-W031

Front L N PE Customer Connection Side Terminal Connecting Screw: M3 Applicable electrical wire: 1.25mm2 or more (Width 6.5mm and below) Panel Lock (x 2) Another one is on opposite side. IDFA Series 1-1 Parts Name and Functions 1 1 IDX-OM-W031 Air Dryer 1 Name and Functions Parts Panel Lock (x 2) (Only for IDFA75E) Another one is on opposite side.

ZISE20A.eng

Self tapping screws: Nominal size 3 x 8L Self tapping screws: Nominal size 3 x 8L Default setting The default setting is as follows. If no problem is caused by this setting, keep these settings.

ZISE20.eng

Bracket A (Part No.: ZS-46-A1) Bracket B (Part No.: ZS-46-A2) F0 Function setting F1 Function setting F99 Function setting Self tapping screws: Nominal size 3 x 8L Self tapping screws: Nominal size 3 x 8L : Some products do not have all the functions. If no function is available or selected due to configuration of other functions, [-] is displayed on the sub display (right).

MXQ

Standard Stroke Model Standard stroke (mm) MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 D10, 20, 30, 40, 50, 75, 100, 125, 150 -X Individual -X 93

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Piston area (cm2) x 100 Operating direction R: Rod end (Clamp) H: Head end (Unclamp) Weight/Through-hole Mounting Option/Arm Bore size (mm) Unit: g Clamp stroke (mm) 10 20 50 Accessories Part no.

High Vacuum L Type Valve

1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

With Factory Installed

~ ( 0 '" co; Port size 1/8' 1/4 Gauge '" U'" ~N Drain 45 40 M5 X O .8 With differential pressure type auto drain Optional Specification yJ Metal bowl 45 IN-OUT reversal mounting (-R) specification 9 Filter I Regulator Series AW it (mm) AW3001 .

(M5 X 0.8), 2 position single solenoid valve, Operating pressure range: 0.15 to 0.7MPa, Response time (ms) (0.5MPa): 15 or less, Low power consumption: 1.8W DC, VALVE SOLENOID BODY PORTE *LQA, VALVE, VZ100 XOL VALVE 3-PORT, AA, VZ100 BODY PT M5), .15400 lb

(mm)Port sizeModelMale connector4M5 x 0.8KJH04-M5

Bracket Kit (Optional) ACDEFGHJKLMNPQRSTWAL30NPT 3/8531623/85357304140236.58532.33544M4 X 0.734.5AF30P-050AS-X480