Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

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P/N 3/8 B5 x 2 3/8 B5 x 3 3/8 B5 x 4 3/8 B3 x 2 #2 1/2 Barb P/N 3/8 B2 1/2 x 2 3/8 B2 1/2 x 3 3/8 B2 1/2 x 4 3/8 B2 1/2 x 5 3/8 B2 1/2 x 6 3/8 B2 1/2 x 7 #3 Barb P/N 3/8 B3 x 2 3/8 B3 x 3 3/8 B3 x 4 3/8 B3 x 5 3/8 B3 x 6 #4 Barb P/N 3/8 B4 x 2 3/8 B4 x 3 3/8 B4 x 4 3/8 B4 x 5 Thread Size 1 Barb # (Size) Quantity of Barbs Part Numbering Example 52 Available with #1, #2, #2

Clamp Cylinder Series CK1

Option Nil B D L K Note 2) None Limit switch mounting base Dog fitting Note 1) 2) Built-in standard (strong) magnet type without auto switch, with switch mounting rod Symbol for the auto switch type is "P" as shown below.

IDX-OM-O004C

12.R 12.5 IDF15E1-10-R IDF15E1-20-R N L N L GFCI GFCI PE TB ILS ILS OLR PTC OLR PTC CM CM C02 C01 C11 C11 FM FM PRS PRS P P CM PTC PTC C01 FM PRS C02 OLR PC C11 ILS TB GFCI 12 3 13.S S 13 13.1 13.2 IDF15E1-20 L N PE M3 6.5mm 1.25mm 2 13 1 13.S 13.3 IDF15E-10-S PE N L TB CM ILS FM PTC OLR OLR ILS PTC PTC CM PRS C01 C02 TB C01 C02 C11 FM C11 PRS P 13 2 14.T

Clean Room Rodless Cylinder Series CYP ø15, ø32

adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

+ B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder

4-channel Flow Monitor ( compatible)

L/pulse L/min, gal/min Unit L/min, cfm L/min, gal/min (According to the range (According to the range setting) (According to the range setting) setting) Power supply voltage Used as switch output device 12 to 24 VDC10%, and ripple (p-p) 10% at max.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

less No Z80 IC circuit P P Y59A Y69A P p P 3 wire (NPN) IC circuit 5V 12V Y7P Y7PV P p P 3 wire (PNP) IC circuit Y59B 12V Y69B P p P 2 wire Y7NW Y7NWV P p P 3 wire (NPN) 5V 12V Diagnostic indication (2 color indicator) IC circuit Y7PW Y7PWV P p P 3 wire (PNP) Relay, PLC Grommet Solid state switch Yes 24V Y7BW Y7BWV P p P Water resistant (2 color indicator) Y7BA p P 2 wire 12V P5DW Magnetic

Manifold Specifications

Porting specifications 4(A), 2(B) port Port size Applicable valve model Base model Wiring 1(P), 5(R1) 3 (R2) 4(A) 2(B) Stations Plug-in type VV5ZS2-51F VV5ZS2-51G 2 to 16 stations With D-sub connector With attachment plug lead wire Rc VZS250-FZ 1 8 Rc 1 8 Side Grommet L plug connector M plug connector K plug connector C4 VZS250G L M KZ Non plug-in type VV5ZS2-51 2 to 24 stations C6

ZSM1-115/121

Hysteresis mode P. 879 P. 877 I U Input impedance Insulation resistance Internal voltage drop Unit conversion URJ P. 877 P. 879 V K Vacuum breaking pressure Vibration resistance Voltage resistance Key lock mode P. 877 P. 879 L W Leakage current LED level meter Liquid contact part Load Load current Load impedance Load lock chamber Load voltage Window comparator mode P. 879 Z P. 877 Zero out

15

Workpiece fixed/Plate tapped type Model Screw size Max. tightening torque [Nm] Max. screw-in depth [mm] LEYG25M L M6 x 1.0 5.2 11 LEYG32M L M6 x 1.0 5.2 12 Tap (4 locations) Body fixed/Top mounting Model Screw size Max. tightening torque [Nm] Length: L [mm] LEYG25M L M5 x 0.8 3.0 40.5 LEYG32M L M5 x 0.8 3.0 50.5 2.

3-Position Rotary Table

P+0.1 0.1 QCR = V x x 10 3 (1) P 0.1 (2) QCP = a x L x x 10 6 Formula QCR = Amount of air consumption of rotary table [L(ANR)] Qc2 = Qc x n x No. of actuators x Margin rate QCP = Amount of air consumption of tube or piping [L(ANR)] V = Inner volume of the rotary table [cm 3] Qc2 = Amount of exhaust air from a compressor [L/min (ANR)] n = Actuator oscillations per minute P = Operating pressure

l

Load voltage Lead wire (m)* Auto switch model Indicator Applicable load Electrical entry Wiring (output) Style Special function 0.5 ( ) 3 (L) 5 (Z) None Tie rod Band DC AC 3 wire (Epuiv. to NPN) P P P P P P P P P P A56 IC 5V Yes No Yes Yes A53 A54 A67 A64 12V PLC Grommet 100V, 200V Relay, PLC 12V Reed switch Solid state switch P P IC 5V, 12V PLC 200V 12V Relay, PLC 2 wire 24V P P P A33 A34

CL

l Applicable bore size (mm) Part no.

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Booklet, X Options: Wetted Parts: Stainless Steel 316L

Rated Pressure Range: -0.1 to 1 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -0.1 to 2 MPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: 1 to -101 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Boklet, X Options: Wetted Parts: Stainless Steel 316L

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Boklet, X Options: Wetted Parts: Stainless Steel 316L

Rated Pressure Range: -100 to 100 kPa, Piping: NPT1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 1 Output, Option 1: Initial Value PSI, Option 2: None, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m