Rated Pressure Range: -0.1 to 1 MPa, Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: B2 [TSJ1/4 (Compression Fitting)], Piping Direction: -, Lead Wire: -, Bracket: -, Operation Manual: -

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 When used as an IO-Link device Brown L+ L+ Main circuit Black C/Q C/Q IO-Link master White Other Blue L L 17 2-Color Display Digital Flow Switch PF2M7(-L) Series Construction: Parts in Contact with Fluid PF2M701/702/705/710/725/750/711(-L) e w w q e r t y u i o r Female thread w PF2M705/710/725/750-C4/C6(-L) PF2M711

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 20 3 25 3 2 1.6 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 35 4 50 4 3 4.5 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2 ZP3P Series How to Order Vertical vacuum inlet

Modular F.R.L. Unit

Metal bowl with level gauge w q With bowl guard e q w Drain guide 1/4 N R q w Non-relieving type Flow direction: Right to left Note 1) The circled numbers indicate the order in which the units are assembled.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

CYV

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,

RB/RBL/RBQ

e r t y u i o !

Rodless Cylinder for Vacuum Series CYV ø15, ø32

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,

AR Series Modular Type Regulator

r q w w Component Parts No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

low particulate generating vacuum grease. p r a Non-contact construction w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tubes exterior surface and the slide tables internal surface. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a w t i o o n L No contact Cleaned, assembled, inspected

RB/RBL/RBQ

e r t y u i o !

MXW

Load factor an Va Item Note CX W Examine W.

CNA

[Load along rod extended direction] [Load along rod retracted direction] W SOL.C SOL.C SOL.B SOL.A SOL.B SOL.A W 3.3-4 Series CNA/Precautions r Be sure to read before handling. Refer to p.0-39 to 0-46 for Safety Instructions and actuator cautions and auto switch precautions.

AC Servo Motor Driver (Pulse input type)

7 800 r/min 5.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

Low Profile 2/3-Port Solenoid Valve

24 VDC/ 4 W 12 VDC/ 4 W 24 VDC/ 4 W 12 VDC/ 6 W 24 VDC/ 6 W Electric specifications 8.4 VDC (Rated 35%)/ 0.8 W Allowable voltage fluctuation*5 10% of rated voltage (0 to +10%) Type of coil insulation Class B 5 VDC (Rated 42%)/ 0.7 W 10 VDC (Rated 42%)/ 0.7 W 5 VDC (Rated 42%)/ 0.7 W 10 VDC (Rated 42%)/ 0.7 W 4.2 VDC (Rated 35%)/ 0.8 W Holding*2 Holding voltage/ Power consumption *1 For use

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3 w @4 @3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !7 !8 !1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

RZQ

MI W S q w B C A CEP1 r e CE1 OUT OUT e r IN IN w q CE2 Change to motion holding circuit ML2B OUT: Meter-out IN: Meter-in To hold the present motion at the time of power failure instead of performing a return to the specified stop point, change both 3 port valves to 5 port double valves and plug A or B port, whichever is open.