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6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Terminal block number 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2mm.

General diagnostics 2 . 5-3 General diagnostics 2 Bit 0 Module 1 error 0Module 1 1Module 1 1 Module 2 error 0Module 2 1Module 2 2 Module 3 error 0Module 3 1Module 3 3 Module 4 error 0Module 4 1Module 4 4 Module 5 error 0Module 5 1Module 5 5 Module 6 error 0Module 6 1Module 6 6 Module 7 error 0Module 7 1Module 7 7 Module 8 error 0Module 8 1Module 8 5.1.1.3.

Note 3) Option "T" is not available for IDU6D, 8D-4 and -6.

i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 6 6-1

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L2 Port Location z x c L1 25 No. 9.5 9.5 1 3 5 ITV00 EXH SUP OUT PWR PWR PWR PWR ITV009 ERR ERR ERR ERR ATM VAC Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

6 o !7 !7 @7 !2 w @5 q y !3 @3 r t @5 e !1 @1 @1 @6 @6 @4 !4 !4 u @8 !5 @0 !9 !8 i Component Parts Component Parts Description Material Note No. Description Material Note No.

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

6 5.5 6.5 25 H Data 9.8 4-M4 x 0.7 A Section AA M 10 Operating port 2-M5 x 0.8 (Table length) 0.3 17 N 2 ( 1): The number of pitches 18.5 5.5 J I Z 3 ZZ Max. 10.5 H 25 3H9 depth 3 +0.025 0 23 4 3H9 depth 3 +0.025 0 (mm) Z M J I H N ZZ Model MXF12-20 65 65 36 11 22 4 76 MXF12-30 75 75 45 12 30 4 86 MXF12-50 111 111 80 13 65 6 122 8-6-11 12 Series MXF Dimensions: MXF16 Stroke adjuster at

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

(A contact) 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire 0.5 0.5 0.5 0.5 3 3 0.5 3 3 3 None Yes (cable length 0.3m) Nil S N.O. (A contact) Number of auto/ proximity switches N.C. (B contact) N.C. (B contact) Auto/Proximity switch type 1 2 1 pc. 2 pcs. N.C. (B contact) None Nil N.C.

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4

Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counterclockwise 3 3 A port A port CRB2 A port 3 22.5 3 22.5 CRBU2 84 e 96 ng CRB1 e 3 ra ng on ra ti B port MSU n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m 3 w 6 m CRJ k n C c l o ni a Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

27 37 5 44 MXPJ65 35 53 42 47 10 59 MXPJ6-10 7 Precision Air Slide Table Series MXP Dimensions MXP6 Piping port 2-M3 x 0.5 (Plug: M-3P) AA 42 7 4 H 2.3 11.2 3 1 1 0.05 D B 9.5 3.5 14 18 20 13 6 5 5 8 F 5 6 Width across flats 2 Width across flats 6 13.5 6 2-M4 x 0.7 Prepared hole dia. 3.3 4-M3 x 0.5 depth 3 17 0.05 Mounting reference planes B D Stroke: S M 2 M4 x 0.7 J 3 Z Max. 9.5 (rubber

4 2 0 0 2 4 6 8 10 12 14 30 25 20 15 10 5 0 0 2 4 6 8 10 12 14 6 5 150 kPa 350 kPa 150 kPa 150 kPa Flow [L/min] Flow [L/min] Flow [L/min] 4 3 350 kPa 350 kPa 2 750 kPa 750 kPa 750 kPa 1 0 0 2 4 6 8 10 12 14 Number of needle rotations Number of needle rotations Number of needle rotations PF2M711(-L) PF2M721(-L) 100 L/min 200 L/min PF2M750(-L) 50 L/min 120 100 80 60 40 20 0 0 2 4 6 8 10 12

(Value in the initial state) Base mounted Body ported With Bracket Air operated valve type SYJA3 2-M3-F 1 2 JIS Symbol SYJA312 4 SYJA322 4 Pilot Pressure Range Caution (A) 2 (A) 2 For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

Thread type Nil F N T Rc G NPT NPTF Rated voltage DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size 01 C6 C8 N7 N9 1/8 One-touch fitting for 6 One-touch fitting for 8 Note) Do not remove the factory installed bracket from models with the bracket option.