New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542 Compact and light The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.
The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.
x 0.8 (Breathing port) 5 x , 14 38 (Piping port) 1769 Series VFA5000 Dimensions: Base Mounted 2 position single: VFA514402 03 04 2 x 5.3 (6.5) M5 x 0.8 (Pilot port) (Mounting hole) (Breathing port) Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 2 position double: VFA524402 03 04 2 x 5.3 (6.5) 2 x M5 x 0.8 (Mounting hole) (Breathing port) 2 x 18 (Pilot port) Max. 2 Max. 2 5 x
Remove these screws Remove these screws Fig. 3-2 Foot mounting screws 2) Then tighten M5 screws (bolts) or equivalent into 4 holes sized to 7mm on the parts marked with arrow for mounting.
NVFR4100 NVFB4200 NVFR4300. 4400. 4500 o Gasket NBR vF4000-20 vF4000-20 vF4000-20 Valve mounting bolt Steel MT335-1-1 1 {M4X40) AXT335-1-11 (M4X40) MT335-1-11 {M4X40) Pilot Ass'y SF4KFx-70 (E Series NVFR40O0:Base Mounted Tlpe 2 position single:NvFF4100-OF 3 PositionlDimensians PIug-in 2 Position 2 position double:l{VFR4200-oF 3 posilion closed center:NVFRrBoo-OF 3 position exhaust center
Function Explanation 1 NC 2 NC 3 Auto switch (For holding workpiece) 4 Auto switch (For releasing workpiece) 5 +24V Power supply for 24 VDC 6 Valve ON/OFF (For holding workpiece) 7 Valve ON/OFF (For releasing workpiece) 8 GND Power supply for 0 VDC M8 8 Pin connector (Socket) M8 8 Pin connector (Socket) 11 - 3-6.
Connector and pin layout . 11 3-6. Center of gravity .12 4.Product Specifications .13 4-1. Magnet gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3.TMComponent .20 5-4. Air supply .24 5-5. Piping .24 5-6. Operating environment .25 5-7. Lubrication .25 6.
NVFR4100 NVFB4200 NVFR4300. 4400. 4500 o Gasket NBR vF4000-20 vF4000-20 vF4000-20 Valve mounting bolt Steel MT335-1-1 1 {M4X40) AXT335-1-11 (M4X40) MT335-1-11 {M4X40) Pilot Ass'y SF4KFx-70 (E Series NVFR40O0:Base Mounted Tlpe 2 position single:NvFF4100-OF 3 PositionlDimensians PIug-in 2 Position 2 position double:l{VFR4200-oF 3 posilion closed center:NVFRrBoo-OF 3 position exhaust center:
, 21-/22-: Lithium soap based grease 10-/21-: Class 4, 11-/22-: Class 3 685
Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.
With lock mechanism at opening/closing position Note 5) Cylinder volume (L) 0.12 0.2 Non-cassette type 8 14 Cassette type: Standard 12 20 Weight (kg) Cassette type: Half MESK 12 20 Cassette type: Full MESK 11 Note 1) Absolute pressure Note 2) Value at normal temperature: Not including gas permeation.
Lights up during remote operation. 11 Changing pressure unit Pressure unit can be changed. MPa PSI HECR t [RUN] lamp Lights up when the product is started, and goes off when it is stopped.
(In locations where strong electric fields, strong magnetic fields and surge voltage occur.) 11. In locations where static electricity occurs, or conditions which make the product discharge static electricity. 12. In locations where high frequency occurs. 13. In locations where damage is likely to occur due to lightning. 14.
) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) ripple -8No.PS-OMG0005CN-E 20 mm A PSE56 PSE56-28 1 (DC+) (LINE(+)) 2 3 (DC-) 4 (IN15 V) (LINE(-)
3 P R V 1-1 IDF100150F 1 1 IDX-OM-U021 1 1-2 1-2-1 (C) 1-2-2 G 1-2-3 K 1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5
B V IDFA100F V IDFA125F V IDFA150F B IDFA100F150F 1 4 1.3 IDX-OM-U022 1. 3.7 5.2 (IDFA100F, 125F) R OFF 5.2 L1 L2 L3 1,2 3,4 5,6 M5 9.5mm 3.5mm 2 1 3 2 4 5 6 M3 6.5mm 1.25mm 2 L1,L2,L3 PE: L2 L3 PE L1 M4 9.5mm 5.5mm 2 IDFA100F150F 1 5 1.3 IDX-OM-U022 1. 5.2 3.7 5.2 (IDFA150F) R OFF L1 L2 L3 M5 9.5mm 3.5mm 2 L1,L2,L3 PE: L2 L3 PE L1 1,2 3,4 5,6 1 3 2 4 5 6
No. 1 1 1 1 1 M3 M3 M3 M3 1/4 0.4~0.5Nm 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1~1.5Nm 1) 1) 1) 1) ISO VG32 (MSDS) 6 No.VP300-OMP0001 VP Series VP Series VP Series VP Series 3 3 3 3 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 30 () 1 ()ISO VG32 2 ()ISO VG32 IP65 (IEC60529) IP65 7 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / L L L L /M /M /M /M 3.2~3.7mm () (+-) () (1mm
M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.
5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3
. -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001 3 VEX1 3 Series 0 ON-OFF (AF ) (AMAFM ) (P.2.3) [1 P][1P] PE ( ( ( ( ) ) ) ) IR2000 VEX 33 ITV VY 11 (0.5MPa ) (0.1MPa ), 2 Nm 1/6 MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa -6VEX-OMO0001 3 VEX1 3 Series 0 +0.1MPa 2 PE(ASN2-M5) 0.1MPa P1 O M5 P1 O VEX1-A30-3 O P1 P1 P1