Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Compact

Without brake 5.8 t-_1 r l o l : r = tl-Model D F J K L N L X S H _ B _ 5 0 4 6 270 1 7 7 177 6 52 55 L X S H _ B _ . 7 5 4 6 295 202 202 6 47 65 LXSH B -1OO 8 320 227 227 6 47 75 LXSH B -125 4 8 70 345 252 252 6 4 7 85 T-slot A dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake electrical

SMC Pneumatic Clean Series

type 10 C D J 2 W L 16 60 H7B 21 C D J 2 W L 16 60 H7B Number of auto switches 2 pcs. 1 pc. n pcs.

XMC/XYC Series

XMC Exterior dimensions C D L1 L2 Fn Fc C (Fc) (KF Flange) (CF Flange) J H B A G A Unit:mm Model A B C D Fn Fc G H J P.C.D L1 L2 XMC-16 40 110 38 1 30 34 17 40 26 P.C.D 27 6x4.4 XMC-25 50 120 48 1 40 26 39 28 XMC-40 65 171 66 2 55 70 41 63 36 P.C.D. 58.7 6x6.6 C D L1 L2 Fn Fd Fc C (Fc) (KF Flange) (K Flange) (CF Flange) H J K B A G A Unit:mm Model A B C D Fn Fc Fd G H J K P.C.D L1 L2 XMC-

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

ball Snap ring B Housing Piston rod A Piston rod B Rod cover Head cover Plate Piston A Piston B Bumper A Magnet Bumper bolt Hexagon nut Bumper B Hexagon socket head cap screw Hexagon socket head set screw Snap ring Bumper holder (2) Nickel plated (1) Hard anodized Chromated Chromated Nickel plated Hard chrome plated Nickel plated Nickel plated Nickel plated Note 2) Aluminum alloy for CXSL6

LEF-OM006xx

40 50 60 70 80 90 100 [mm] [mm] c 180[mm] 290[mm] AREAON 100[mm]-0.5[mm] = 99.5[mm] INPON 2[mm] j 1[mm] j 100 b 0 [mm/s] AREA ON OFF ON [mm] k INP INP OFF 100.5 99.5 0 10 20 30 40 50 60 70 80 90 100 [mm] -23- (2 INC a b c d e f g h i j k ABS()/ / INC()// )30[mm] No.0 No.0INC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT (mm) A One-touch fitting d Part No.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH L-PIPING ADAPTERIS10L-20-D to IS10L-60-D 30 IS10 D Description Symbol Body size 20 30 40 50 60 Nil Rc Pipe thread type NPT G + 01 1/8 02 1/4 03 3/8 1/2 Port size 04 06 3/4 10 1 + Nil 0.1 to 0.4MPa a Set pressure range 6Note2) 0.1 to 0.6MPa + Nil 0.5 3 Semi-standard b Lead wire length Z 5 + Nil MPa c Pressure unit of the scale plate P MPa/psi dual scale Nil Right

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Electric Actuator / Low profile slider type

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In posn[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -23- Example of step data input (2) < Positioning operation Relative > a b c d e f g h i j k No.

CEx-OMG0106

Static Load B W3max=60Nm (Checked from graph with Va) W3 15 Load Rate a1= = =0.25 W3max 60 B M2max=2Nm (Checked from graph with Va) M2=Wx L1=15x0.05=0.75Nm M 2 0.75 Load Rate a2= = =0.375 M 2max 2 3.

Sine Rodless Cylinder Series REBR Direct Mount Type

Note 2) 15 has internal magnets in the body. 65 Series REBR Dimensions/15, 25, 32 Operating direction Operating direction B Operating direction A A K W HB HB HC X Piping port P (plug) Operating direction A Piping port P (plug) Operating direction B N H HA Y T CB 8-MM thread depth M HT HP 4-counter bore B Counter bore depth C HP L 4-J Effective thread length E TC X F WP WP GW GP QW PW D 4

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Mounting manifold to DIN rail: 1) Catch the hook of the DIN rail bracket on the "B" side on the DIN rail. 2) Push side "A" onto the DIN rail and tighten the clamp screw.

Electric Actuator / Guide rod Slider

The INPoutput signal is turned on from 100[mm] 1[mm]=99 [mm] Area 2[mm] j Area 1[mm] j 100 b Speed[mm/s] 0 ON AREA Output signal OFF (INPOutput condition) INP Output signal ON In pos[mm] k OFF 101 99 0 10 20 30 40 50 60 70 80 90 100 Stroke [mm] -19- Example of step data input (2) < Positioning operation Ralative > a b c d e f g h i j k No.

CEx-OMP0016

JIS B 9960-1: Safety of machinery Electrical equipment of machines Part 1: General requirements JIS B 8433-1:2007: Robots for industrial environments Safety requirements Part 1: Robot 2) Labor Safety and Sanitation Law etc.

17

x P 2 x P (Plug) PB T-slot GA JC PA + Stroke JB JA J K G FA A + Stroke B + Stroke FB C + Stroke E The use of a slot (width X6, length 7, depth 5) allows for a relaxed pin pitch tolerance, with the pin hole (6H7, depth 10) as the reference, without affecting mounting accuracy.

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.