AMX-OM-Q015E

-5 to 55 -5 to 50 *Note1 Ambient temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Standard Performance 31 62 125 250 360 586 28 56 111 222 329 550 Outlet air atmospheric -20 -15 *Note2 pressure dew point oC Inlet air flow rate L/min(ANR) Standard Performance conditions Outlet air flow rate L/min(ANR) 25 50 100 200 300 500 25 50 100 200 300 500 6 12 25 50 60 86 3 6 11 22 29 50 Purge

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

High Vacuum L Type Valve

T) Grommet (G) Conduit (C) ( G ) ( C ) ( T ) mm Model A B C D E F G J K L M XLS-16-*G 25.5 104 XLS-16-*C 41 113 38 30 35 17 23 40 XLS-16-*D 60 48 96 XLS-16-*T 129 95 62 XLS-25-*G 128.5 28 XLS-25-*C 121.5 43 138.5 48 40 40 26 25.5 50 XLS-25-*D 120.5 63 51 XLS-25-*T 121.5 154.5 97 66 XLS-16-P*G 40 96 113 38 30 35 17 23 87 66.5 XLS-25-P*G 50 121.5 138.5 48 40 40 26 25.5 89.5 69 9 XL*-OMI0013

Series VS

Series VS R8b S RUBBER SEAL/METAL SEAL SERIES VSR8/VSS8 2-position Single solenoid (FG-S) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Metal) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Rubber) (A)(B) 4 2 5 1 3 (EA)(P)(EB) 3-position Closed center (FHG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Exhaust center (FJG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Pressure center (FIG-D) (A)(B) 4 2 5

Digital Pressure Switch

We show the temperature characteristics for 0 to 50[oC] or -5 to 50[oC] based on data at 25[oC]. Ex.)

1

It means that if the tempareture is changed within the range of 0 to 50[C], the error will occur at the max. 3 [kPa].

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

During unclamping (Extension end) L type (Counterclockwise) 63 mm Clamp stroke Symbol 10 20 30 50 Clamp stroke Applicable bore size CKQ CLKQ 10 mm 12 to 63 20 mm CK CLK 30 mm 32 to 63 50 mm During clamping (Retraction end) CKQ Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.

Flow Sensor Series PFMV

), Residual voltage 1 V or less (at load current 80 mA), With short-circuit protection Response time Switch output: 2 ms (10 ms, 50 ms, 0.5 s, 1 s can be selected.)

Fieldbus system PROFINET compatible SI Unit

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ: Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ: Cable with M12 connector

XLA Series

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

IZ-OMK0015

to 2000 50 to 200 60 50 to 2000 50 to 150 (Note) After installation, verify the effects of static neutralization.

Pressure Relief 3 Port Valve With Locking Holes

3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 50 6.5 31 12 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS20 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS30 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS40 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS40-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS50 11 27.5 49.5 90 152.3 71 60 108 70 3.2 4 22 1

IDX-OM-W023

R T 600mm 1 10% () ( 60cm 1 ) 10% 3 IDU Series 5-1 5 1 IDX-OM-W023 5 () 60cm 1 2 INOUT INOUT () IDU Series 5-1 5 2 IDX-OM-W023 6 6-1 IDU8E-10/20 IDU11E-10/20 IDU15E1-10/20 50Hz 1.1 1.5 2.6 3/min (ANR)1 m 60Hz 1.2 1.7 2.8 0.7MPa 55 32 10 580 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 3.4/3.5 5.7/6.0 4.6

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specications (For details, refer to page 491.)

High-precision Digital Pressure Switch

[March 2020] D: Contents revised in several places. [August 2021] E: Contents revised in several places.

VHK

D.

VHK

D.

EX510-GDN1.eng

COM C COM C is receiving data: Lights up COM C is having no data to receive: Goes off COM D COM D is receiving data: Lights up COM D is having no data to receive: Goes off : It is lit when input unit is connected and communicating normally. 19 18 Display/ Switch Setting (continued) Switch setting Make sure that switch setting is performed with power supply turned off.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

Symbol Applicable stations Mounting position U side D side Both sides M Special specifications 2 to 10 stations 2 to 10 stations 2 to 16 stations D U B Indicate special specifications separately on a manifold specification sheet. Note 2) The number of blanking plate assemblies is also included.

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36 D.8 AR4001 1/4 3/8 1/2 70 149.5 37.5 70 38 50 54 54 8.5 10.5 70 2.3 4 ~ Dimensionwameans from port center to eccentric direction of gauge center. Modular Type Filter I Regulator with Built-in Pressure Gaug.