Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

AR425 to 935 Nil A B C D E F G H J K L M N O P Q R ARX AMR ARM ARM With pressure guage With digital pressure switch ARP IR-A Common supply block Common supply block with pressure switch IR L side L side IRV VEX Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.

JSY1000/3000/5000 Series (Non Plug-in)

Leakage voltage Caution Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as 3% or less of the rated voltage. 3.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Precision Regulator

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W : 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

Electro-Pneumatic Proportional Valve Series VEF/VEP

Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform to ISO1179-1. 886

IR10-OM00007

SU P. PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 0050. 2 M Pa M AD E I N J APAN So G No.

Precision Regulator

Year Month T : 2015 o: January U : 2016 P: February V : 2017 Q: March W : 2018 R: April X : 2019 Z: December -7- 5. Precautions for handling Fluid Warning (1) The operating fluids must be compressed air.

Manifold Specifications

r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

VQC4000

SQ VFS VFR Body Light/Surge voltage suppressor 0: Plug-in sub-plate Nil Yes E Without light, with surge voltage suppressor VQ7 Seal 0 Metal seal 1 Rubber seal Coil voltage 5 24 VDC 6 12 VDC Function Nil Note 1) Standard (0.95 W) Y Low wattage type (0.4 W) R Note 2) External pilot Note 1) When the power is energized continuously, refer to Specic Product Precautions 1 on page 642.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Rated voltage Manual override Symbol Nil: Non-locking push type A: Non-locking push type (Manual) E: Push-turn locking type (Manual) DC AC (50/60 Hz) 2(A) 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC] 4 220 VAC [230 VAC] 5 24 VDC 6 12 VDC (P)1 3(R) Electrical entry Light/surge voltage suppressor DC AC Nil Without light/surge voltage suppressor S With surge voltage suppressor *1 DIN terminal

How to Order

port P, E port Pilot valve exhaust is centralized to main valve. + + H: Lead wire length 600 mm D: Push-turn locking slotted type LN: Without lead wire LO: Without connector MO: Without connector W: With connector cable Note 1) + -+ LN, MN type: With 2 sockets.

10-SYJ3000

(Example) 10-SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) CE-compliant CE-compliant 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, only DC voltage is available. Note) CE-compliant: For DC only.

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

The basic parameter is not correct for the following condition: (Assignable value range) (1) Stroke (-) < Stroke (+) (2) W-Area 1 < W-Area2 (If both W-Area1 and W-Area2 is 0, the alarm will not be activated.) (3) Maximum pushing force < Maximum pushing force of The Parameter value is incorrect (01-049) System B RESET the electric actuator parameter input error

Booster Regulator Series VBA1110 to 4200 1

Tank capacity (l) Tc [s] = L W Obtain the tank capacity V. Select tank from table below.

HEC-OM-S008

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.

AP10PA

r e Pressure gauge unit 2) Code Unit psig/bar MPa w q w q w q 1) Refer to gauge guide (P.1058) for gauge specifications.

Compact End Lock Cylinder Series CBQ2

L1 (mm) With rear lock With front lock Bore size (mm) I J K C D E H Standard stroke A B Q A B F Q 32 72.5 65.5 12.5 65 58 7.5 10.5 13 16 45 M8 x 1.25 60 4.5 14 40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76