AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

MR-J3-B LECSS (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 LE-CSS-S MR-J3-B (Note 7) LECSS (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 3 6 3.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

XA Section Y S Q GA 0.5 FA FB C Y EH T X M EA EB B + Stroke A + Stroke Note 1) Range within which the rod can move.

JXCx-OMU0026

cable Orange 9 B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A-3

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

VZ3000

2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79 0.39 0.33 0.36 0.12 0.16 0.21 0.75 0.83 0.91 0.32 0.27 0.36 0.19 0.20 0.24 Body ported For internal pilot Type VV5Z3-20 VZ32 Note) Value at manifold

Digital Flow Switch (Integrated display type) ( compatible)

Maximum 6 106 Maximum Maximum -36No.PF-OMV0006-B [F 1] Setting of OUT1 The output mode of OUT1 can be selected.

Cylinder with Lock

Note 32 Tie-rod Carbon steel 4 Zinc chromated 33 Tie-rod nut Rolled steel 8 Zinc chromated 34 Flat washer Steel 8 80, 100 35 Bumper A Urethane 1 36 Bumper B Urethane 1 37 Wear ring B Resin 1 38 Rod end nut Carbon steel 1 Zinc chromated 39 Magnet (1) 40 Rod seal B NBR 1 41 Piston seal B NBR 1 42 Cushion seal A Urethane 1 43 Cushion seal B Urethane 1 44 Cushion valve seal NBR 2 45 Cylinder

2/3 Port Valve

7 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15(11) 2 9 Others 20(14) 3 Option 25(16) 4 1 1 Valve size 2 to 9 1 4 32(22) 5 1 B 1 4 32F Flange 40A 1 1 2 40(28) 6 1 B 1 2 40F Flange Electrical entry/Indicator light and surge voltage suppressor 2 50A Nil 50(33) 7 50F G Grommet Air operated 2B Flange E GS Grommet with surge voltage suppressor Grommet terminal 2 B 1 2 65F 65(45) 8 Flange Grommet terminal

JIS Standard Hydraulic Cylinder

2 stroke MA A K F GA GB H + Q + l 2 x Rc P R J MM RR TDe9 D E e Width across flats G Air release TT C Air release Air release 10 f l NA T B TX TY0.3 TY0.3 NB SS + Q + l + 1/2 stroke S + Stroke M H ZZ + Stroke ZZ + Q + l + Stroke TZ (mm) With rod boot Stroke range (mm) Bore size (mm) J e RR B C F GA GB M NA NB P R S T SS TD TT TX TY TZ l f Q B-rod C-rod B-rod C-rod 1 32 M10 x 1.25 25 to

JXCx-OMT0001CN

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1

CJ2

B A B A A B B A 1 (0) 1 (7.5) 2 (0.5) 2 (8.5) 6 CJ1 10 16 1.5 2 1.5 2 2.5 3 2.5 3 3 3.5 3 3.5 3.5 4 3.5 4 0.5 1 0.5 1 CJP Figures in parentheses for bore 6 are in the case of double rod type, (Series CJ2W).

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

Modular F.R.L. Unit

E Octagon Port size C T-interface B Center of F.R.L. body D A C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 Caution

JXCx-OMT0002

9 S Standard cable B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

PFxx-OMX0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 -92No.PF-OMX0002-B Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W G 1 N.C. (B contact) 2 pcs.

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv SS5X3-45 SS5X5-45 C6 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type. 1-6-76 Base Mounted Series SX3000/5000

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 8m *1 8 Green 3 COM-A/COM B-3 10m *1 A Blue 4 COM-B/ A-3 Shield 15m *1 B Cable color Terminal no. Vcc B-4 Brown 12 *1) produced upon receipt of order. 20m *1 C GND A-4 Black 13 A B-5 Red 7 A A-5 Black 6 B B-6 Orange 9 Only Robotic type cable can be B A-6 Black 8 3 selected.