Digital Flow Switch (Manifold type)

Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Stroke 17 6 Note 1) Standard strokes available in 5 mm increments.

SI unit for CC-Link

(The terminal screw is an M3 cross head screw.) (1) Be sure to connect each signal line to its dedicated terminal. (Refer to Fig. 1) The applicable size of the cross head screwdriver is No.2 (6 mm or less). Tighten the screws securely with a torque of 0.5 to 0.6 Nm. Fig. 1 (2) Be sure to connect a terminating resistor between DA and DB at both ends of the CC-Link system.

EX600-SMJ_eng

Red LERR LED is flashing 1 3 4 1 2 Content Err (Default setting) 5 2.5 Mbps 625 kbps Content 5 Mbps CC-Link version Node number 2.00 2.00 2.00 2.00 1.10 1.10 1.10 1.10 64 1 : 8 7 9 6 Number of occupied nodes x10 x1 0 5 4 4 Pin number 1 Address 2 3 5 3 1 4 2 3 2 1 1 4 3 2 1 (2) (3) Content 8 7 9 6 6 Number of occupied nodes SI unit output data size 4 byte (Default setting) 0 5 4 1 2 3 Signal

Large Flow Air Filter AF800/900 Series

Description Material u i w Bronze Stainless steel 1 1 Standard -7 11352-5B 11352-5S y 2 Element u Standard -2 -6 -8 -9 C4SF C4SF-2 C4SF-6 C4LF-8 C4SF-X401 o Note) 3 Bowl assembly 1 t !

Hygienic Design Cylinder/ISO Standard Type Series HYC

6, !7, !8, @1. HYCB32-PS HYCB40-PS HYCB50-PS HYCB63-PS 32 40 50 63 !5 !6 !7 !8 19 @1 Cushion seal Rod seal Resin NBR (FKM can be selected.) 1 HYCB50H-PS Set of left nos. !5, !6, !7, !8, @1. Rod seal Piston seal NBR (FKM can be selected.) 1 NBR 1 HYCB63H-PS Piston seal Cylinder tube gasket NBR 1 NBR 2 (FKM can be selected.) Place the seal material symbol in .

05-hyc-e

6, !7, !8, @1. HYCB32-PS HYCB40-PS HYCB50-PS HYCB63-PS 32 40 50 63 !5 !6 !7 !8 19 @1 Cushion seal Rod seal Resin NBR (FKM can be selected.) 1 HYCB50H-PS Set of left nos. !5, !6, !7, !8, @1. Rod seal Piston seal NBR (FKM can be selected.) 1 NBR 1 HYCB63H-PS Piston seal Cylinder tube gasket NBR 1 NBR 2 (FKM can be selected.) Place the seal material symbol in .

4/5 Port Air Operated Valve SYJA3000 Series

: SYJA5240-01 2 x 4.3 (For mounting) 44 2 x M5 x 0.8 (Pilot port) VGA 37.5 4 1 2 x M5 x 0.8 (Pilot port) 11 B A 5 VPA 1 A B 1 10 M5 x 0.8 (A, B port) 2 x 2.6 (For manifold mounting) 24 A B VPA3 19 1 P R Manual override 54 2 42 47 54 Manual override 23 20 15 3 11 2 x 2.6 (For mounting) 11.5 45 2 x 1.3 (Breathing port) 33.5 M5 x 0.8 (P , R1, R2 port) 21.5 6 6 P R1 17 17 15 8.5 R2 45.5 1/8 (

High Vacuum L Type Valve

Disassembly Procedure Step 1 Removal of bonnet assembly Step 2 Removal of valve seal 1 Valve Bolt 3 Valve seal 1 1 2 Bonnet assembly 4 Port 1(P) Bolt size, Tool Valve Bolt size Hex Bottom surface of the groove to discharge gas. size wrench XLFV-16 M4 3 -25 M5 4 -40 M6 5 -50 M8 6 -63 M10 8 -80 Body Bonnet assembly Remove the valve seal 1 from the seal mounting groove.

EX250-SPR_eng

(Allowable SW power supply range: 19.2 V to 28.8 V) Fig. a Fig. b Summary of Product elements Double Single Double Double Double Single Double Double No. 0 2 4 6 Side A No. 5 Side A 0 2 3 5 Station Station 1 2 3 4 1 2 3 4 6 No. 1 3 5 7 Side B No. 1 4 6 Side B R O I PROCESS FIELD BUS F R P Voltage drop of max.1 V B U S PWR(V) RUN DIA BF H L H L ADDRESS + EX250 Free EX250 DIA BF PWR(V) RUN

PSxx-OMU0005CN

-15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-

3

The accuracy can vary by approximately 2% F.S. when such tubing is not used. 6 5 Accuracy [% F.S.] 4 3 Straight piping length 2 1 10 9 8 7 6 5 4 3 2 1 0 0 OUT IN Straight piping length [cm] 6 Series PFMC Internal Circuits and Wiring Examples NPN (2 outputs) type PFMC7--APNP (2 outputs) type PFMC7--BBrown DC (+) Brown DC (+) Load U U Black OUT1 Black OUT1 Main circuit Main circuit 12 to 24

CYP

F 12.5 25 G 6.5 8.5 H 45 75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI 23 39 HL 38.6 64.9 HP 44 73.5 HS 27 49.5 HT 19.5 39 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 Model +0.030 0 +0.030 0 CYP15 CYP32 LD 5.6 8.6 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 P M5 x 0.8 Rc 1/8 N 4.5 7.5 PA 25 50 PB 60 100 Q 105 138 QW 48 87 R 45 79.5 T 23 29 TA 13 17 TB 18 22 W 69 115 WA 32 46 WB 17 27 Y 2.5 3.5 Z 118 155 L 67 90 Model

CYPSeries

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Note Item Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

CYPSeries

n = 1 + 2 + 3 1 Load factor n 1 = m/mmax Note Item Review m mmax is the maximum load mass 1. Max. load mass 2 = M/Mmax Review M1, M2, M3 Mmax is the allowable moment 2. Static moment 3 = Me/Memax Review Me1, Me3 Memax is the allowable moment 3.

,,: ,.

7 t16-20 718 1.54 . 1 8 9 5/16 1t8 1/2-20 1/2 . 1 4 .220 5/r 6 'l 14 1t2-20 9/16 1.32 .220 5/16 318 'lt2-20 1 1 / 1 6t.!

2-Layer Soft Fluoropolymer Tubing

Compared with SMC Fluoropolymer Tubing/TL (6 x 4) Wearing Reduced to 1/30 Reduced to 1/30 of outer layer TQ: 1 mg 2 TL: 30 mg 2 tube (Fluoropolymer Tubing) 2.

Series KC Self-seal Fittings

Component module KBC1 KBC2 KBC3 KBC4 KBP1 KBP2 KBP3 KBP4 KBV2-06 2 KBE2-06 2 KBN2 1 KBN2 KBV1-06 KBE2-06 KBV2-06 5 Bracket: KBX(Page 87) Component module KB X 6 KBV2-06 1 KBV1-06 1 KBR2-1 1 KBH2-R2S 1 KBP1 1 KBP1 KBR2-1 Applicable thread size KBH2-R2R KBV2-06 KBP1 Type Bracket: KBX KBV1-06 Part No.

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

Multistage Ejector (N)ZL Series

Output specifications 25 (L) 26 (L) 67 (L) 26 (L) 27 (L) 67 (L) 1 output NPN open collector 30V, 80mA or less ZSE4 ZSE4B Analog output (1 to 5V) 1 output PNP open collector 80mA or less Analog output (1 to 5V) ZSE4E 2 outputs NPN open collector 30V, 80mA or less 2 outputs PNP open collector 80mA or less Refer to CAT.E824-A "Pressure Switch" for details on switches. 6 Multistage Ejector