Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

21

Foot 2 CM-L020B CM-L032B CM-L040B 2 foots, 1 mounting nut Flange 1 CM-F020B CM-F032B CM-F040B 1 flange Single clevis 1 CM-C020B CM-C032B CM-C040B 1 single clevis, 3 liners Double clevis (with pin) 1 double clevis, 3 liners, 1 clevis pin, 2 retaining rings 1 trunnion, 1 trunnion nut 1 CM-D020B CM-D032B CM-D040B Caution Trunnion (with nut) CM3-T020B CM3-T032B CM3-T040B 1 1.

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Press the button for between 1 and 3 seconds.

4 Port Solenoid Valve Series VQD1000

3 (R) port 3 1 (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 5.5 12 11.2 3 3(R) 9 2-3.5 mounting hole 10.9 9.1 5.5 33.5 28.5 37 38 1(P) 1(P) 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 634 4 port direct

Air cylinder

No.CM2*-OM0081P-A PRODUCT NAME Air cylinder MODEL / Series / Product Number Contents Safety Instructions P2 1. Specifications P4 1-1. Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Air cushion 2-7. Control of direction 2-8. Auto switches 3. Maintenance P19 3-1.

VFA3000

2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 1 2 3 4 5 1(P) port location Nil 2 position 3 position Thread type (Including pilot port) -X1 Port size (A, B port) Nil Rc G NPT NPTF Note) Indicate suffix symbol -X1 at the end of the part number for 3 position.

A

27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5

Ionizer Gun

Doc. no.IZ*-OMX0012-B PRODUCT NAME Ionizer Gun MODEL / Series / Product Number IZG10 1 Doc. no.IZ*-OMX0012-B Contents Safety Instructions . 3 1. How to Order . 9 1-1. Ionizer . 9 1-2. Accessories . 9 1-3. Repair parts . 10 2. How to Use . 11 2-1. Procedures to operation . 11 3. Wiring . 12 3-1. AC adapter type/ IZG10-01, 02 . 12 3-2. Power supply cable type/ IZG10-03 . 12 4.

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Connector LQ1H P.4 6 1 2 3 Female 4 5 P.5 6 1 2 3 Male 4 5 Elbow LQ1L P.6 6 1 2 3 Female 4 5 P.7 6 1 2 3 Male 4 5 Run tee LQ1R P.8 6 1 2 3 Female 4 5 P.9 6 Note) Basic size With reducer Features 2 Series LQ , LVN, TL/TIL 1 2 Port size Tubing

20

3 3.5 2.5 3 3.5 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 300 mm Note 1) S coupler and fitting are included in the same package.

High Vacuum L Type Valve

Heater specifications Item XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

MTS

0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

R

8 2.44 1 7/8 1.81 9/16 1 0.1 NCRA1BW50-__ 1/2 1.61 3/8-16UNC Depth0.47 0.2 5/8 0.87 0.67 6.42 (7.93) 4.61 5.47 0.70 1/8 2.99 2 3/8 2.24 5/8 1 1/8 0.1 NCRA1BW63-__ 5/8 1.97 1/2-13UNC Depth0.51 0.2 3/4 0.98 0.79 7.32 (9.06) 5.59 6.57 0.83 1/4 3.62 2 7/8 2.76 3/4 1 3/8 0.12 NCRA1BW80-__ 3/4 2.36 1/2-13UNC Depth0.55 0.2 1 1.18 0.98 9.65(12.24) 6.77 7.95 1.11 3/8 4.41 3 3/8 3.35 1 1 5/8 0.16 NCRA1BW100

PSxx-OMU0002CN

MPa [H_2] OUT2 0.050 MPa ZSE20A [P_1] OUT1 -50.5 kPa [P_2] OUT2 -50.5 kPa [H_1] OUT1 5.1 kPa [H_2] OUT2 5.1 kPa ZSE20AF [P_1] OUT1 50.0 kPa [P_2] OUT2 50.0 kPa [H_1] OUT1 5.0 kPa [H_2] OUT2 5.0 kPa 1 -23No.PS-OMU0002CN-D 3 3 3 () <> 3() 3(P_1n_1P_2n_2)(H_1H_2) () 1 () 1 1 1[-](( 61)) -24No.PS-OMU0002CN-D (P1LP1H) 24P1L()P1H()WH1() (n1Ln1H) 33 OUT2 [F 1]OUT1[F 2]OUT2// -25No.PS-OMU0002CN-D

Series LQ3 High Purity Fluororesin Fitting

Combination 1 2 2 3 3 3 4 4 4 5 5 5 6 6 6 Tubing Size (Inch) 1/8 x 0.086 1/4 x 5/32 1/4 x 5/32 3/8 x 1/4 3/8 x 1/4 3/8 x 1/4 1/2 x 3/8 1/2 x 3/8 1/2 x 3/8 3/4 x 5/8 3/4 x 5/8 3/4 x 5/8 1 x 7/8 1 x 7/8 1 x 7/8 Thread Size A A B A B C A B C A B C A B C 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" Tubing Connection E 1A LQ3 Size Combination Class Fitting Style Symbol

MVGQ

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

3 2 1 4 3 2 1 Load Load Load Load Main circuit Main circuit (Gray) CH2_OUT1 (Gray) CH2_OUT1 NC NC 4 3 2 1 4 3 2 1 Sensor Sensor (Red) CH3_OUT1 (Red) CH3_OUT1 NC NC (Green) CH4_OUT1 (Green) CH4_OUT1 4 3 2 1 4 3 2 1 NC NC DC () DC () (Blue) (Blue) 52 Series PF2D Description Remote Type/Display Unit PF2D300, 301 RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously

CJ5-S

40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50

CJ5-S

40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50

Series SY100 3 Port Solenoid Valve Rubber Seal

Air operated style fluid control valve Vacuum valve Vacuum pad 2(A) 1(P) 2(A) 1(P) 2(A) 1(P) 2(A) 3(P) 3(R) 3(R) 3(R) 1(R) Atmospheric air or micro pressure for vacuum release Characteristics values indicated in this catalog are not guaranteed values but typical ones. 2.1-1 Series SY100 Precautions Be sure to read before handling.