SMC Corporation of America
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ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Standard pressure: 100 kPa Standard pressure: 100 kPa Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.4 0.6 Standard pressure Standard pressure 0.5 mm 0.25 mm Detection distance (mm) Detection distance (mm) 0.5 0.3 0.4 0.2 0.3 0.15 mm 0.15 mm 0.2 0.1 0.1 0.03 mm 0.01 mm 0 0 50 0 250 200 150 100 250

D D side Applicable makers Valve stations MB1 For Mitsubishi Electric Corporation TA1 For OMRON Corporation FU1 For Fuji Electric Co., Ltd.

(PFMC7102) [ 100] 100 L/min (PFMC7202) [F 3] [ r ES] Response time [ 1.0] 1 second page 42 [F10] [ SUb] Sub display [ oUt] Set value page 43 [F20] [ inP] External input 3 [REACUM] Accumulated flow external reset page 47 [F22] [ Fr E] Setting of analogue output 4 [ oFF] Variable range OFF page 48 [F30] [SAvE] Accumulated value hold [ oFF] Not held page 49 [ PoS] Orientation [ HoR] Horizontal

Dimensions M5 type 01/N01 type Piping specifications Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 -92No.PS-OMV0006-D Bracket mounting dimensions Bracket A Bracket B -93No.PS-OMV0006-D Mounting dimensions of panel mount adapter Mounting dimension of panel mount adapter + Front protective cover -94No.PS-OMV0006-D Panel cutout dimensions Mount individually More

KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5

(It is recommended to ground with resistance of 100 ohms or less) Accessories Seal cap: 5 pcs.

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

BF SOL RUN Display Description NOTE When connecting manifold valve only without connecting Input unit manifold, LEDs of COM A D do not light. To make them light, connect a terminal plug to the unused connector of SI unit ( "C1" or "0" ). Settings for display Turns on: COM D is receiving data. Turns off: COM D has no received data. Turns on: COM C is receiving data.

Caution on operation Do not D o D o Warning Do not Do not Do not D o Do not Do not D o Warning : Operator error could result in serious injury SMC Corporation This product aims at application for common factory automation equipment. Do not use LZB for machinery and device (1) that directly concern human life or those which malfunction or failure could cause serious damage.

B A D B 2 2 2 2 D B D B A M6 x 0.75 M6 x 0.75 M8 x 0.75 M8 x 0.75 A 3 3 Lateral 3 3 With Adapter: Vacuum Inlet 0.3 0.3 0.8 0.8 Width across flat 5.5 Width across flat 5.5 1.5 2 0.3 0.3 0.8 0.8 2 2.5 1.5 2 2 2.5 Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Dimensions (per stroke) Lateral D D 10 14 B 24 31 B A 7 10 A 8 11 Model Model Model Model ZP3-T015U;J3-B3 ZP3

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4

W 20 HRS Cooling capacity Option 100 10 kW 150 15 kW Cooling method Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

Controller 1 JXC 7 D T LEFS16B-100 Communication protocol Actuator part number Precautions for blank controllers (JXC1-BC) Without cable specifications and actuator options Example: Enter LEFS16B-100 for the LEFS16B100B-S1mm.

Plug: KPP Applicable fitting size d Weight g D Model L A L A 4 0.4 6 32 13.8 KPP-04 D d 6 15.7 0.7 8 35 KPP-06 8 10 39 17.3 1.1 KPP-08 Applicable fitting size d 10 12 19.2 1.7 43 KPP-10 12 2.5 14 45.5 20.7 KPP-12 The plug is commom for series KPQ, KPG and KP. 9

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.