VFR5000-OMN0001

VFR5000-OMN0001 VFR5000 Series/ 01F D COM A B 01C COM A B 1)8 2)+COM -COM . 3)D U D 1)8 2)+COM -COM . 3)D U D 11 VFR5000-OMN0001 () X () [3(EB)4(EA) ] () (PE) 12 VFR5000-OMN0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR5000-OMN0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298

10%3020Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)175UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10% Max. supply current 2 A24 VDC +10%/?5% Max. supply current 2 AIP67 (Manifold assembly)?

10% Max. supply current 2 A24 VDC +10%/?5% Max. supply current 2 AIP67 (Manifold assembly)?

10% Max. supply current 2 A24 VDC +10%/?5% Max. supply current 2 AIP67 (Manifold assembly)?

10% Max. supply current 8 A24 VDC +10%/?5% Max. supply current 8 AIP67 (Manifold assembly)?

Applicable manifolds include serial transmission types, D-sub connectors, flat ribbon cable, PC wiring system compatible, flat ribbon cable, terminal block, lead wire, and circular connectors.

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10% Max. supply current 8 A24 VDC +10%/?5% Max. supply current 8 AIP67 (Manifold assembly)?

10% Max. supply current 8 A24 VDC +10%/?5% Max. supply current 8 AIP67 (Manifold assembly)?

Hand Valve Series VH

3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc1/4 VH33l-02 to 03 (Bottom piping) 2 (A) 44 Panel cut dimension 1 (P) 3 (R) 2-A +0.3 0 C +0.5 0 4-Rc 1/4, 3/8 4 (B) B 0.1 Max. panel thickness D (mm) A 3.2 3.2 3.2 Model B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 VH300 VH400 3.6-12 Series VH Panel Mounted/Dimensions VH41l-02 to 04 VH41l-06 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 107.5 19 l102 102 89

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, built-in Silencer), A,B Port Size: N11 (ø3/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 9 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, built-in Silencer), A,B Port Size: N11 (ø3/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 2 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N11 (ø3/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 2 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N11 (ø3/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N11 (ø3/8" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 6 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: S (Internal Pilot, built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)