2/3 Port Valve

coil P Brass/BC6, SUS NBR, EPR, FPM Body Seal Coil: Class B, Class H Model Rated voltage P Orifice dia.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 3.2 to 12 1 to 4 M5 to 1/2 1/8" to 1/2" Refer to the Web Catalog for details.

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 28.6 12.3 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 36.1 14.3 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5

7

d e 34 C (U2) (V2) E VX2 VXK 32 T 1.2 7.5 VXD VXD 25 VXZ 5.5 A B G1/2 VXS b a OUT IN VXB 2 x P Port size F 4.5 L K D f J I VXE 4.5 VXP Conduit d e C VXR E U 280 VXH 23 VXF 1.2 7.5 VX3 G1/2 T 5.5 A b a VXA IN OUT B 2 x P Port size f J F I L K D 4.5 4.5 Flat terminal C e d U E 11 1.2 7.5 T 5.5 A b a IN OUT B 2 x P Port size I F J 4.5 L K D 4.5 f (mm) Electrical entry One-touch fitting

Fluoropolymer Piping Equipment

2 3 4 5 6 LQHB Panel mounting nut LQNP TL TIL TLM TILM P.908 Nut insert bush LQ1-U B N TD TID TH TIH P.909 Blanking plug LQ-P P.909 Tubing plug LQ1-CP P.909 Note) Basic size With reducer 869 LQ3 Series LQ3 Series P.912 Port size Tubing O.D.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)

JXCx-OMT0061CN

->/P.32 10.1 ->/P.15 3.4 ->/P.47 11. 5 (CN1: EMG ->/P.12 3. ) SV1.00 INP ON (INP INP OFF PLC ) ->/P.32 10.1 ->/P.12 3. PLC (PLC) 15ms30ms ->/P.55 12.4 91 - () ->/P.47 11. ->/P.12 3. ->/P.19 5. ->/P.32 10.1 ->/P.12 3. PLC 5 (PLC) 15ms30ms ->/P.55 12.4 () () (LED() ->/P.13 3.2 ) ->/P.47 11. ->/P.47 11. ->/P.47 11. ->/P.12 3. (CN1: EMG ->/P.12 3. ) 92 - 22. 10.

NCA1

150 0400 N 0200 R XC10 CA2 Auto switch Stroke B Dual operation Double rod Mounting Bore size CS1 Stroke A C76 Cushion Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM

NCA1

150 0400 N 0200 R XC10 CA2 Auto switch Stroke B Dual operation Double rod Mounting Bore size CS1 Stroke A C76 Cushion Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

NCA1

How To Order NC D A1 B 150 0400 R + 0200 H XC11 Auto Switch Mounting Bore Stroke B-A Stroke B Dual Operation Single Rod Cushions Both Ends N w/o Cushions H Head End R Rod End Dimensions (in) Bore (in) MM KK A AA B BA C D DD E EA EE G J NT TN WF XT Y LF P A PB PC 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 1/4-20 5/8 1 1 15/16 1.71 7.26 2.36 2.40 1.24 200

JXCx-OMU0004

P.65 * ALARM 10 2 e M7 LED f h 3 h 15 7 LED f F g 7 LED f ON(LED a ON 8.1 P.40 10.P.50 25 No.JXC-OMU0004-A (4) 5 AB 2 3 7 LED f (A [1] h ( 3) 7 LED f h h *0F(15) 7 LED f LED a [2]LED a g LED b 7 LED f g 7 LED f g h g g [2]7 LED f C LED b ) g h F15 g 2 (B 26 No.JXC-OMU0004-A [3] i j * i j i j * i j 8.4 P.43 [4] g 1 g [5]7 LED f i 7 LED f j

SFOD-OMT0005CN

(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

Series KV2 Fittings

p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p p p p p

Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

CNA

CLQ Width across flats dimension Bore size (mm) Nut Socket MLGP JIS B 1181 Class 2 M8 x 1.25 40, 50 13 JIS B 4636 + 2 point angle socket 13 RLQ JIS B 1181 Class 2 M10 x 1.25 63 P 0.3 MPa 17 JIS B 4636 + 2 point angle socket 17 MLU Piston rod assembly JIS B 1181 Class 2 M12 x 1.75 New 80, 100 19 JIS B 4636 + 2 point angle socket 19 ML1C D-X Temporary axis 20Data 2) Remove the tie-rods, head

CNA

CLQ Width across flats dimension Bore size (mm) Nut Socket MLGP JIS B 1181 Class 2 M8 x 1.25 40, 50 13 JIS B 4636 + 2 point angle socket 13 RLQ JIS B 1181 Class 2 M10 x 1.25 63 P 0.3 MPa 17 JIS B 4636 + 2 point angle socket 17 MLU Piston rod assembly JIS B 1181 Class 2 M12 x 1.75 New 80, 100 19 JIS B 4636 + 2 point angle socket 19 ML1C D-X Temporary axis 20Data 2) Remove the tie-rods, head

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

PSxx-OMG0005CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4