VZ5000

4 1(P), 3/5(R) port 4(A), 2(B) port 1 8 , C6, C8 1 8 Port size Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0

Applicable Auto Switch Model

CDJ2 CDVJ CDLJ2 CDM2, CDBM2, CDVM3, CDVM5, CDLM2 CDG1, MGG CDLG1 RSDG MGC MLGC, RHC, REC 7 8 8 8 10 10 8 9 9 8 10 10 10 10 10 10 11 10 10 8 8 10 10 9 9 Note) Average value at normal temperature including hysteresis.

21

2A 2B 2C 3 4 5 6 7 8 9 10 11 12 13 14 Anodized Anodized Anodized Anodized Chromated Hard chrome plated 1.

HRX-OM-Z002

high pressure switch (When AL65 occurred) . 7-6 7.4 OTHER ERRORS . 7-8 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 QUALITY CONTROL OF CIRCULATING FLUID AND FACILITY WATER . 8-1 8.2 INSPECTION AND CLEANING . 8-2 HRLE Series HRX-OM-Z002 Contents 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 3-month inspections . 8-4 8.2.4 6-month inspections . 8-5 8.2.5 Inspection during

Rotary Actuator/Vane Type

-4 P211070-10 15 P611090-1 P811020-3 P811020-4 P211090-10 20 P611060-1 P611060-8 P811030-3 P811030-4 P211060-10 30 P611080-1 P811040-3 P811040-4 P211080-10 40 P611010-1 P611010-8 P611010-9 P811050-3 P811050-4 P211010-10 *1.

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Port size Symbol 01 02 02 03 03 04 Body class Port size 1/8 1/4 1/4 3/8 3/8 1/2 Pilot port thread type 2 Symbol Nil N Thread type Rc NPT 3 4 Integral fitting type/Variations Model LVH20 LVH30 LVH40 Orifice diameter 4 8 10 Tubing O.D. Metric 3, 4, 6 6, 8, 10 10, 12 Valve type Inch 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

( 5 8 . 6 1 ) 9 4 4 ( 8 6 . 7 1 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2 7 4 ( 8 5 . 8 1 S I 9 T L A ) 4 3 2 ( 1 2 . 9 ) 8 0 1 ( 5 2 . 4 ) 0 3 ( 8 1 . 1 ) 7 ( 8 2 . ) 1 2 1 ( 6 7 . 4 ) 7 3 1 ( 9 3 . 5 ) 8 5 2 ( 6 1 . 0 1 ) 0 4 ( 7 5 . 1 ) 2 2 4 ( 1 6 . 6 1 ) 2

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Valve output 14 RXn.F RYn.F Valve output 15 Unit No.0 Reserve RX(n+1).0 RY(n+1).0 Valve output 16 EX600-SCF1 RX(n+1).1 RY(n+1).1 Valve output 17 RX(n+1).2 RY(n+1).2 Valve output 18 RX(n+1).3 RY(n+1).3 Valve output 19 RX(n+1).4 RY(n+1).4 Valve output 20 RX(n+1).5 RY(n+1).5 Valve output 21 RX(n+1).6 RY(n+1).6 Valve output 22 RX(n+1).7 RY(n+1).7 Valve output 23 RX(n+1).8 RY(n+1).8 Valve output

Shock Absorbers and Rate Controls

. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

VQ5000

41 41 Rc 1/8 PE port Rc 1/8 External pilot port Rc 1/8 PE port Rc 1/8 External pilot port 27.5 27.5 41 41 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 2-6-7 8 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

8 8 SOL.A SOL.A SOL.A 7 7 7 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A SOL.A 1 Triangle mark 1 1 Triangle

Step Motor Driver （ Pulse input type ）

70 70 70 Trigger LV 70 70 70 Pushing speed 20 20 20 Moving force 100 100 100 Area1 0.00 0.00 0.00 Area2 0.00 0.00 0.00 In position 0.50 0.50 0.50 92 - LES Basic parameter default Model LES8 LES16 LES25 Lead[mm] 4 8 5 10 8 16 Controller ID 1 1 1 IO pattern 1 1 1 Acceleration/ Deceleration pattern 1 1 1 S-motion ratio 0 0 0 Storoke(+) Storoke +1 Storoke +1 Storoke +1 Storoke(-) -1.00 -1.00

PA300/500/700

8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 0.12 Series VPA300 2.9/2.9 0.27/0.33 0.29/0.41 0.31/0.30 0.31/0.25 3.3/3.6 4.1/4.1 0.74/0.76 0.79/0.83 0.80/0.86 1.0/1.0 VPA344 (Base mounted) 0.19 3.1/2.9 6.6 9.1 0.35 0.42 2.0 2.4 1.6 2.4 7.4 9.0 0.41 0.43 VPA542 (Body ported) 0.27 Series VPA500 VPA544 (Base mounted) 1.7/1.8 1.8/1.9 1.9/2.1 2.3/2.4 0.36/0.34 0.29/0.30 0.36/0.41 0.41/0.42 7.5

Process Pump

Class Symbol PAF341S 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 PAF541S PAF341S PAF541S tubing size (mm) tubing size (inch ) SMC SMC SMC 4 4 5 5 6 6 1 2 1 2 1 2 4 4 5 5 6 6 A B A B A B 1/2" x 3/8" 3/8" x 1/4" Panel mount union U P 3/4" x 5/8" Union 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC Note) Select the fitting after confirming the IN / OUT side fitting size and fitting type.

Title not found

Connector C Actuator side (Terminal no.) 1 2 5 6 (14) (18) 8 A1 B1 (13.5) (17.7) (17.7) Cable length (L) 1 3 5 8 A B C 1 2 A6 B6 1.5 m 3 m 5 m 8 m (30.7) Connector A 5 6 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 m (14.2) Connector C (Terminal no.) 1 2 5 6 15 m 5.5 6.3 Actuator side (14) (18) (Terminal

S Couplers

4") 8 (1/4") 9 (3/8") 12 (1/2") Applicable hose I.D.

CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !