Auto Switch Guide

l) Data Switch mounting screw Round head Phillips screw with spring washer M3 x 0.5 x 16 l 1.

High Vacuum L Type Valve

Note) For XLA-16/25, mount the washer in the orientation that the groove of the washer faces to the valve seal 2.

EXxx-OMU0020EN

Valve diagnostics 2 If the maximum number of valves is 16 coils in the EX245-SPN1/SPN2, the diagnostics will be set FFh.

XLG Series

Size 16, 25 and 40 Auto switch (option) Pilot port (Pressurized / Totally closed) Bonnet assembly (maintenance part) Body, external seal and accessories are not included.

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

Copper-free Actuators

20-M(D)BB With end lock 1.7-30 5.5-2 Copper-free Actuators Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Air cylinder Series C(D)A1 Standard 1.9-2 20-CA1nN Double rod 1.9-16 20-CA1WnN SCA1l Non-rotating rod 1.9-22 20-CA1Kn Non-rotating double rod 1.9-28 20-CA1KWn

LX

10 10 10.1 20.1 5.1 1.1 0.1 20.1 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 50 50 2.1 4.1 1.1 0.3 0.1 4.1 2.1 1.1 0.3 0.1 100 100 1.1 2.1 0.6 0.2 0.1 2.1 1.1 0.6 0.2 0.1 For transfer load of 3kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 200 10 10.1 5.1 1.1 0.2 20.1 Speed (mm/s) 50 2.1 1.1 0.3 0.1 4.1 100 1.1 0.6 0.2 0.1 2.1 Refer to page 302 for acceleration time. 223 16

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4

MRHQ

D20Sizes 10 and 16 updated!

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Rotary Table/Rack & Pinion Style Series MSQ

Table inside and outside diameters For alignment of rotation center and work piece High precision type: MSQA H8/h8 Positioning pin hole Hollow axis Accommodates wiring and piping for equipment mounted on the table Positioning pin hole For position of rotation direction Rolling bearing Hollow axis Basic type MSQB Size Hollow axis 1 3.5 2 3.8 3 5 7 6 Size Hollow axis 10 5 20 9 30 9 50 10 70 16

E-P HYREG ® Series VY1 1

Rc 1/16 gauge port 2-4.5 Mounting hole Connection mark All types are the same in terms of connection.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

PSE550/300

Panel mount adapter + Front protective cover Note) These options are unassembled in the factory, but are included with the shipment. 16-3-36 5 Series PSE300 Controller Specifications Conforms to CE marking and UL (CSA) standards.

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.)

SMC Electronic Switch Series Variations

SE1-ll-16, -17 I Z PFor swich type "-16" or "-17", rotating SET1 will adjust ON setting for OUT1 (Black lead wire, Red LED) and SET2 will adjust ON setting for OUT2 (White lead wire, Green LED).

VS7-6

16 13 11 15 16 25 mm2 VQD P A P B A EA B EB VFS Air exhaust side eff area S (P2=0.5MPa) 18 mm2 VS Note 1) Maximum operating pressure of solenoid valve is 0.9 MPa.

Series VS

stations) 1 to 12 stations (16 stations) 24 1 to 12 stations (16 stations) 24 1 to 12 stations (16 stations) 24 1 to 10 stations (16 stations) 20 EX250-SPR1 EX250-SDN1 Note 2) T kit 1 to 12 stations (16 stations) 24 EX250-SDN1-X102 Note 3) 1 to 4 stations (8 stations) 1 to 2 stations (4 stations) 1 to 4 stations (8 stations) 1 to 2 stations (4 stations) 8 4 8 4 EX250-SAS3 EX250-SAS5

PEEK

N.C. 3 2 1 19 2 x 3.5 Mounting hole (16) 11 24.5 21 12 Plug IN port 5 (Lead wire length) 27 LVM10R4 36 300 16 13 UL1007 AWG22 1 2 3 N.C. N.O. (16) (16) 11 OUT port IN port 10 Push type Manual override 73.5 LVM10R6 N.O. N.C. 3 2 1 25.5 (16) N.O.

IO-Link/ELECTRO-PNEUMATIC REGULATOR

16-Bit) and output pressure> Set pressure 0x0 0x0FFF Output pressure 0% 100% Input data shall be entered from Bit 0 to Bit 12 of the 16-Bit process data (2 BYTE). (When F_1=0%F.S. and F_2=100%F.S.) (Ex.) When the output pressure is 100%, the set pressure value is 0x0FFF.