Adsorption Plate

15 15 25 25 25 Suitable for adsorption and fixing in place of film and soft sheets High processing precision (adsorption surface) Large, evenly distributed adsorption force Parallelism (m, or less) Weight (kg) 30 30 30 40 40 40 Rectangular Square Size Sintered body particle diameter Aperture ratio Material Finishing Material 0.5 1.2 2.1 3.2 5.8 8 0.4 1.0 1.8 2.9 5.3 7.4 mm 50 x 50 100 x

Digital Flow Switch

to 35C) 2% F.S. (15 to 35C) (25C standard) Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

3

(PF2A7H: 0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) Monitor unit 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) 2% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 1% F.S. (Fluid: Dry air) Analog output: 3% F.S. 1% F .S. (PF2A70, PF2A7H) 2% F .S. (PF2A71) 1% F.S. (Fluid: Dry air) Analog output: 5% F.S. Monitor unit 0.1% F.S.

NARM Series

If it does not lock easily, turn the handle slightly clockwise or counterclockwise before pushing it. 1 3 22 15 43.5 72.5 101.5 130.5 159.5 Supply pressure (psig) 4 NARM3000 36.3 Secondary pressure (psig) 30 22 15 43.5 72.5 101.5 130.5 159.5 Supply pressure (psig) 145 Return to Menu NARM Series Specialty Regulators Regulator for Manifold NARM2500, 3000 Construction Main Parts Component Parts

Safety Speed Control Valve (SSC Valve) Series ASS 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-15-1 2 Series ASS System Circuit Prevents accidents caused by sudden cylinder rod extensions If pressure is applied only to one side of the cylinder, the rod could get out of control, leading to

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

76.8 18.8 1/4 17 24.2 53.5 48.5 47.5 42.5 8 15 29.4 38.3 17.9 80.3 20.9 10 18 31.9 41.4 19 93.6 23 8 15 31.1 41.7 21.2 117.0 20.9 3/8 19 26.5 58.7 53.7 52.7 47.7 10 18 33.6 44.2 21.2 124.9 23 12 20.8 35.4 46.3 21.8 137.8 24.8 1/2 24 30 65.9 58.4 54.3 46.8 12 20.8 37.6 50.5 25.8 186.8 24.8 Note) Reference thread dimensions after installation. 4

Speed Controller with One-touch Fitting

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

BP1000

to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) No code P 01 02 10 20 30 Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72 94 112 E 26 42 60 D 67 83 101 B C 36 52 70 A MHL2-10D MHL2-10D1 MHL2-10D2 11221122112296 124 162 38 54 72 MHL2-16D 1122A B C +0.025 3H9 0 depth 3 D 2 x M5 x 0.8 thread depth 7 (Mounting thread) 10 2 x 5.5 through (Hole for

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 15 for changed part. Number corresponds with the parts number on the construction drawing.

1

Note 3) Refer to the catalog, since the dimensions of standard stroke Series CQ2 and CQS are different from that of long stroke type. 6-18-1 2 SMC Actuators: Copper-free Air Cylinders 6, 8, 10, 12, 15, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 Air Cylinders 20-series has been added by design modification. (98.6.1) Series Application Bore size (mm) Standard Copper-free 6 8 12 (10

RLQ

For detailed specifications, refer to page 9-15-1.

10-cy3r-e

Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 63: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding sections GR-S-010 (10 g) for tubing interior Grease pack part no. for 15 to 63: GR-S-010 (10 g) 112

02-cxs-e

CXSM6-PS 6 10 15 20 25 32 CXSM 6-PS CXSM 10 A PS CXSM 15-PS CXSM 20-PS CXSM 25-PS CXSM 32-PS !9 @0 @1 Set of left nos. !9, @0, @1 Piston seal CXSM10A-PS Rod seal NBR CXSM15-PS O-ring CXSM20-PS CXSM25-PS CXSM32-PS Seal kit includes !9, @0 and @1. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number. 0 1 With relief valve None Port size Symbol Flange SSA 15 (1/2B) 20 (3/4B) 25 (1B) 32 (1 1/4B) 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 80 (3B) Threaded Rc 3/8 1/2 3/4 1 1 1/4 1 1/2 03 04 06 08 10 12 16 20 24 Replacement Element Part No.

Quick Exhaust Valve Series AQ

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-12-1 2 Series AQ Construction AQ1500/1510 AQ2000/3000/5000 Component Parts Material/Model No.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. AK ASS ASR ASF 15-9-25

Series CS1 air cylinder is SMCs largest bore cylinder. This series is available in bore sizes up to 12in. and stroke lengths up to 60in.. Additionally, the CS1 can be ordered auto-switch capable. Other options include, large bore sizes up to 12in. *, various mounting configurations, cushion for noise damping.Double acting, single rod, non-lube type, Bore sizes: 125mm to 300mm, Strokes up