Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)
Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)
Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: BM (B + M), Semi-Standard: R (Flow Direction: Right to Left)
Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: M (Round Pressure Gauge w/ Color Zone), Semi-Standard: R (Flow Direction: Right to Left)
Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: DM (D + M), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right to Left)
Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: BM (B + M), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right to Left)
Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: BM (B + M), Semi-Standard: R (Flow Direction: Right to Left)
Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: BM (B + M), Semi-Standard: R (Flow Direction: Right to Left)
Body Size: 25, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: BM (B + M), Semi-Standard: 1R (1 + R)
Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)
Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)
Slit Valve 0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 PVQ ARM2000 VY1 VBA VBAT AP100 753
Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.
This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, F/R MAINTENANCE KIT, AIRLINE EQUIPMENT, AW MASS PRO, C1, AW MASS PRO 1/8 PART, .02200 lb