Fieldbus system Ethernet POWERLINK compatible SI unit

0..10V (default) , 4: 0..5V, 5: 1..5V, 6: 0..20mA, 7: 4..20mA 01h Channel 0 .. .. .. 300Bh Slot0_AnalogRange 0: -10..+10V, 1: -5..+5V, 2: -20..+20mA, 3: 0..10V (default) , 4: 0..5V, 5: 1..5V, 6: 0..20mA, 7: 4..20mA 04h Channel 3 00h NumberOfEntries 4 01h Channel 0 0: None, 1: 2 value (default) , 2: 4 value, 3: 8 value .. .. .. 300Ch Slot0_AnalogFilter 04h Channel 3 0: None, 1: 2 value (default

CHKD/CHKG

3-wire (PNP) 2-wire 12 V 3-wire (NPN) IC circuit Diagnostic indication (2-color indicator) 5 V, 12 V Relay PLC 24 V 3-wire (PNP) 2-wire Yes Grommet 12 V 3-wire (NPN) IC circuit 5 V,12 V 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 A96V A93V2 A96 A93 A90 Z76 Z73 Z80 3-wire (NPN) IC circuit 5 V Yes Grommet 100 V Relay PLC 2-wire A90V 24 V No 12

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.) Model AS Applicable tubing O.D.

Thermo-chiller

3 !4 !5 !6 No. Description Function 7 Offset function Use this function when there is a temperature offset between the discharge temperature of the thermo-chiller and users equipment.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2.5) 0 -0.1 0 -0.036 7h9 10h9 13h9 17h9 21h9 76 6 (Effective depth 3) 0 -0.1 0 -0.036 106.5 10 (Effective depth 4) 0 -0.1 0 -0.043 134 15 (Effective depth 7) 0 -0.1 0 -0.043 M8 x 1.25 169 17 (Effective depth 8.5) 19.5 0 -0.1 0 -0.052 HA, HB 2H9 2.5H9 4H9 5H9 6H9 HC 2 4 5 5 6 HD HE JA JB 3 3.5 5 7 8 KA 20.3 7.6 14.5 24.5 24.1 KB 1.6 2.2 2.8 3 2.5 LA M2 x 0.4 LB 28.4 37 53 70 81 Model MIW8-

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2.5) 0 -0.1 0 -0.036 7h9 10h9 13h9 17h9 21h9 76 6 (Effective depth 3) 0 -0.1 0 -0.036 106.5 10 (Effective depth 4) 0 -0.1 0 -0.043 134 15 (Effective depth 7) 0 -0.1 0 -0.043 M8 x 1.25 169 17 (Effective depth 8.5) 19.5 0 -0.1 0 -0.052 HA, HB 2H9 2.5H9 4H9 5H9 6H9 HC 2 4 5 5 6 HD HE JA JB 3 3.5 5 7 8 KA 20.3 7.6 14.5 24.5 24.1 KB 1.6 2.2 2.8 3 2.5 LA M2 x 0.4 LB 28.4 37 53 70 81 Model MIW8-

EX600-DX_DY_DM_eng

EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle

IDX-OM-V020

. 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping. 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS ABOUT REINSTALLATION

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

7.4

S07 1 5 5 MO Serial transmission kit SS0755-SA08C4 S0715-5MO S0725-5MO S07A5-5MO 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 3 setsValve part no. (Stations 4 to 6) 2 setsValve part no.

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

E-P HYREG

4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2 2 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY1500/1501 VY1400/1401 VY1300/1301 1 1 1 0.9 0.9 0.9

5 Port Solenoid Valve SY Series

Refer to How to Order Port Block Assembly on page 6. M5 port block assembly Pilot valve assembly A Bracket Assembly No. B Description No. Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

IDX-OM-U010

DISPOSAL . 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS. 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping . 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Aluminum High Vacuum Angle Valve

4 5 6 O-ring Part No.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Reduced maintenance (No need for control or replacement) Positioning repeatability: 0.01 mm*3 *1 Compared with the LEFS *2 Size 40, Mep, Overhang: 300 mm *3 Excludes the lead H Step Motor Controller JXC Series p. 3 Battery-less Absolute Type (Step Motor 24 VDC) MDirect input type MStep data input type LEKFS Series P-E21-6 Electric Actuator High Rigidity and High Precision

MXH Series Compact Slide

MXH10 (10) 20 6 21 17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.