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Normally Open or Normally Closed Valve A Variety Of Actuator Types Available Robust Design T E C H N I C A L SPECIFICATIONS Fluid Air Operating Pressure 0 ~ 9.9 Bar / 0 ~ 144PSI Ambient and Fluid Temperature 5 ~ 60C / 41 ~ 140F Effective Orifice (Cv Ffactor) 6mm2(0.33) Recommended Lubricant Turbine Oil #1 (ISO VG32) Port Size 18 H O W T O O R D E R (N)VM800 V A LV E APPLICATIONS (N)VM830 01

PSE530/200

Note Panel mount adapter Waterproof seal, screws included ZS-26-B Front protective cover ZS-26-01 Front protective cover + Panel mount adapter Waterproof seal, screws included ZS-26-C ZS-26-D 48 conversion adapter 48 conversion adapter This adapter is used to mount Series PSE200 on the panel fitting of Series PS100. Order panel mount adapter separately.

Pressure Switch/Reed Switch Type

by SMC) M100 V AC/DC specifications 52 52 mm mm 52 mm MSet pressure range Lubricator 0.1 to 0.4 MPa 0.1 0.1 to to 0.4 0.4 Regulator Air filter MService life: 5 million cycles 5 5 23 23 mm mm 23 mm 15 mm 15 5 mm mm RoHS Pressure switch with spacer Pressure switch with piping adapter Set Pressure Range Specifications Electrical Circuit Up to 100 V AC/DC ON pressure OFF pressure Model IS10-01

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

How to Order 10 SY 5 L 5 1 20 01 Clean series Bracket Series Nil: Without bracket F1: With foot bracket A, B port size 3 10-SY3000 5 10-SY5000 Thread piping 2 position single only Coil type Symbol Port size M5 x 0.8 10-SY3000 Applicable series 7 9 10-SY7000 10-SY9000 M5 Standard Nil 1 8 01 10-SY5000 T With power saving circuit (24, 12 VDC only) Actuation type 1 4 10-SY7000 02 02 03 2 position

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

53-SY5000/7000/9000 Body Ported Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Single Unit Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)(Refer to page 40 for details) How to Order SY 53 20 01

AK1000

Single Stage Regulator for General Applications Low to intermediate flow Series AK1000 High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: Stainless steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

Series GS40 Digital Pressure Sensor

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Process Pump (Diaphragm Pump) Body Wetted Parts: Polypropylene/Stainless Steel Built-in Solenoid Valve/Air Operated (External switching type) PB1000A Series

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

Ionizer IZN10 Series

Ionizer IZN10 Series RoHS How to Order 01 P IZN10 06 High frequency AC nozzle type Without maintenance detector X194 Made to Order Nozzle type Type Energy saving static neutralization nozzle Symbol Refer to page 449. 01 High flow rate nozzle 02 Bracket Female threads for piping Note) Rc1/8 11 Without bracket Nil Note) Nozzle shape: When using the female thread for the piping, connect the

Nozzle Type Ionizer IZN10E Series ®

Nozzle Type Ionizer IZN10E Series How to Order Energy saving static neutralization nozzle 01 P IZN10E 06 Z B1 High flow rate nozzle Female threads for piping High frequency AC nozzle type Bracket Nozzle type Symbol Type Part no.

IZSE_X101

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9

ZSE3/ISE3

LCD Readout Digital Pressure Switch Series ZSE3/ISE3 How to Order Piping specifications Operating pressure range Single mounting R 1/8 Note 1) Nil L 01 T1 0 to 0.98 MPa 0 to 98 kPa Single mounting NPTF 1/8 Note 1) Note 1) M5 x 0.8 female threaded.

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD VD W 2 1 1 G 2 01 VXZ For Water, Air, Vacuum VXE Made to Order (Refer to page 244.) Series VXP 1 10 Valve type Option 2 20 VXR

Compact Direct Operated 2 Port Solenoid Valve for Water and Air SeriesVDW10/20/30 VX2 How to Order Valves (Single Unit) VXD For Water, Air, Vacuum VD W 2 1 1 G 2 01 VXZ VXE Made to Order (Refer to page 244.) Series VXP 1 2 3 10 N.C.

VFA1000 / 3000 / 5000 Series 5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 VFA1000 VFA3000 VFA5000 Symbol M5 01 02 03 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only. Not available with the VFA5000. 1498

VR4151/4152

Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 1 8 NPT N01 1 8 G F01 Number of pilot ports Single pilot 2 1 Double pilot Number of ports 5 port 5 Dimensions Side ported Bottom ported Stroke 2 mm Stroke 2 mm Indicator light Indicator light Manual override (Button diameter 3.5) Manual override

Note) CE compliant: Electrical entry is applicable only for the DIN terminal. [Option] 3 Port Solenoid Valve Direct Operated Poppet Type Series VT307 Rubber Seal

How to Order 307 5 F G 1 V T 01 Body type T O Body ported For manifold CE-compliant Valve option Nil Q None CE-compliant Nil E Y V W Standard type Continuous duty type Energy-saving type Vacuum specification type Electrical entry and light/surge voltage suppressor: D/DO/DZ/DOZ only Bracket Nil F None With bracket Energy-saving type, Vacuum specification type Semi-standard Pressure specifications

Series VV100 /D-sub Connector 3 Port Solenoid Valve Plug-in Connector Type Manifold

Series VV100/D-sub Connector Plug-in Connector Type Manifold How to Order Manifold U 1 VV100 10F C6 05 D A 2 D-sub connector type Mounting option Symbol A B Number of poles Symbol Mounting Connector block mounting position: D side 15 26 Manifold direct mounting type Nil Connector entry direction Upward Valve stations A: D-sub connector 15 pins With mounting nut M3 x 0.5 Symbol Stations 01