Total cooling capacity: 9.5kW (air)/11.0kW (water) (CH1 oscillator, CH2 optical system combined); Power supply "20": 200VAC/50 Hz or 200-230VAC/60 Hz, 3-phase; Power supply "40"; 380-415VAC (50/60 Hz) or 460-480VAC (60 Hz), 3-phase; Temperature set range: CH1 = 15 to 25°C, CH2 = 0 to 15°C; Temperature stability: CH1 = ±0.1°C, CH2 = ±0.5°C; Refrigerant: R410A; Communication: contact/analog

: CE, C-MET-US/UL, RoHS

Cooling capacity: CH1= 9, 19 or 26kW (oscillator); CH2= 1kW (optical system); Power Supply "20": 200VAC/50 Hz or 200-230VAC/60 Hz, 3-phase; Power Supply "40": 380-415VAC (50/60 Hz) or 460-480VAC (60 Hz), 3-phase; Temperature set range: CH1 = 15 to 25°C, CH2 = 20 to 40°C; Temperature stability: CH1 = ±0.1°C, CH2 = ±0.5°C; Refrigerant: R410A; Communication: contact/analog I/O; Serial RS-232C

Total cooling capacity: 9.5kW (air)/11.0kW (water) (CH1 oscillator, CH2 optical system combined); Power supply "20": 200VAC/50 Hz or 200-230VAC/60 Hz, 3-phase; Power supply "40"; 380-415VAC (50/60 Hz) or 460-480VAC (60 Hz), 3-phase; Temperature set range: CH1 = 15 to 25°C, CH2 = 0 to 15°C; Temperature stability: CH1 = ±0.1°C, CH2 = ±0.5°C; Refrigerant: R410A; Communication: contact/analog

The max. operating temperature of TL/TIL, TLM/TILM, and TD/TID series tubing (fixed use) is 260°C for air/inactive gases and 100°C for water. And the max. operating temperature of TH/TIH series tubing (fixed use) is 200°C for air/inactive gases and 100°C for water.

Max. operating temperature of the TL/TIL, TLM/TILM, and TD/TID series (fixed use)
Air/inert gases: 260°C
Water: 100°C
Max. operating temperature of the TH/TIH series (fixed use)
Air/inert gases: 200°C
Water: 100°C

Precision Clean Regulator

size 41 IN OUT A B C D Model Port size SRP111-M5 M5 x 0.8 14 23.5 30 30 C D SRP111-01 Rc 1/8 15 22.5 40 40 873 SRP Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

VXH

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. 4 ' C ' C 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) ) D G C D, T S S L, Z 3 ) E E 3 0 ( 2 17-3-69 2 The VX series will be revised shortly. Series VXH Construction/Dimensions Material C3771 Note No.

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bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

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