Process Valve Series VNA

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 75 125.5 52 63 72.5 80.5 80 84.5 124 144.5 26 24.3 2.3 55 42 4.5 25 28 34 14 60.5 73 1 84 100 92 108 135.5 137 153 156 172 84 90 62 72 80 90 89 95 93.5 99.5 31 36 28.3 33.3 2.3 2.3 50 60 5.5 6.5 30 35 35 40 43 49 17.5 20 151.5 Port

Platform Cylinder Series CXT

Replacement Parts/Seal Kit Cylinder Model CXT12 CXT16 CXT20 CXT25 CXT32 CXT40 DCDQSB12 CDQSB16 CDQSB20 CDQSB25 CDQ2A32 CDQ2A40 Stroke Standard stroke CQSB12-PS CQSB16-PS CQSB20-PS CQSB25-PS CQ2B32-PS CQ2B40-PS -X Long stroke CQSB12-L-PS CQSB16-L-PS CQSB20-L-PS CQSB25-L-PS CQ2A32-L-PS CQ2A40-L-PS Seal kit includes @7, @8 and @9. Order the seal kit with the kit number.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 m Nil 3 m L 5 m Z Solid state switches marked "" are produced upon receipt of order.

PF3A7xxH.eng

[P] Set value of OUT 1500 L/min 3000 L/min 6000 L/min S button (SET) Press this button to change the mode and to set a value. [H] Hysteresis of OUT 150 L/min 300 L/min 600 L/min Connector pin numbers (lead wire) Specifications / Dimensions button (DOWN) Selects the mode and the display shown on the Sub display, or decreases the switch point.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

3 Ejector assembly ZK2 EJ A W 10 Nozzle nominal size 07 0.7 10 1.0 12 1.2 15 1.5 Bellows type with groove Flat type with groove 257 ZHP Series Dimensions 30 N 70 Silencer In the case of Flat type P 16.6 EXH. 24.7 P F E D C A PD port 3 6.2 K M Female thread mounting M Male thread mounting Unlocked: 32.2 PD port 2 Locked Unlocked J PD port 1 G H P port L E F 6.2 10 7.8 6.2 Lock screw 14.4 1.4

S Couplers Series KK/KK13

H L M L (mm) H Width across flats Body size Weight g Effective area mm L H Width across flats Min. bore M Applicable hose I.D.

IDX-OM-W017

EVD PTC OLR PTC OLR PE CM PE CM PE FM1 PRS PE FM1 PRS P P PE FM2 PE FM2 FM2DFA6E/8E IDFA6E/8EFM2 IDFA15E1 N L C R GFCI For Option R CM FM1 FM2 N L PE OLR TB PTC PTC ILS ILS PRS TB PE EDV C02 For Option V C11 OLR PTC GFCI EDV PE CM C01 C11 PE FM PRS P 6-4 IDFA Series 6 4 IDX-OM-W017 6 6-5 IDFA3E IDFA4E15E1 2 6-5 IDFA Series 6 5 IDX-OM-W017 7 A A 7 1 7 2 A 7 3 7 4 IDFA3E

Rotary Actuator NCRA1 Series Single Rack and Pinion

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

Ionizer

Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Installation height of sensor: 10 mm 3 Electrostatic potential [kV] 20 With sensor Ionizer 2 Without sensor Without sensor Discharge time [s] 15 1 With sensor L 0 10 1 Workpiece Without sensor 5 2 With sensor 3 0 500 1000 1500 2000 Installation distance L [mm] 1 2 3 4 Time [s] Run mode after static neutralization (electrostatic potential

SL5200

Refer to gauge guide (P.94).

Round Type Low Pressure Hydraulic Cylinder Series CH
M

L (Example) C73CL 5m . Z (Example) C73CZ None .

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model H G L M N E B F LQ (E) 2-B 12 19 10 12 6 8 10 4 6 LQ2T22 LQ2T21 4 6 LVN L 18 34.5 19 12 19.9 SMC 1/4 LQ2T52 LQ2T51 LQ2T42 LQ2T41 LQ2T33 LQ2T32 LQ2T31 F (M) (M) TI/ TIL 43 5 24 22 9 18 26.2 52 42.5 (E) (E) G H PA L L 6 30 21 28 11 22 33.1 59.5 51 Class 2, 3 PAX 7 36 26 32 14 28 40 58.5 PB (M) N Inch sizes Applicable tubing O.D.

VK3000

Dimension EVS n: Stations n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L

Compact Cylinder with Air Cushion

P-80 (YG) 2nd printing June, 2002 D-DAD P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Rotary One-touch Fittings Series KS/KX

t e l a m e F ) T P ( c R 8 / 3 T P N 8 / 3 ) T P ( c R 3 1 M K h c u o t e n O g n i t t i f g n i t t i f h c u o t e n O 3 6 8 0 1 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 8 / 1 ) T P ( R , 6 4 / 1 3 ) T P ( R , 6 8 / ) T P ( R , 6 4 / 1 ) T P ( R , 6 8 / 3 ) T P ( R , 6 4 / 1 KM11 4 1 M K h c u o t e n O g n i t t i f g n i t

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

NCRAI seies

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

IDX-OM-W037

Generally, control becomes unstable if P is too small. Response becomes slow if P is too large. [Example] For setting P=10.0%, I=100sec., D=20sec. Display Operation procedure . 1. Make sure that the screen shows PV/SV display. PV SV 2. Press and hold the SEL key to switch to CH1 (PID control parameters). PV 3. Press and hold the SEL key. SV P (Proportion band) is displayed. 4.

Vacuum Unit Series ZK2

Switch for Vacuum Specifications) B C D J K P L W (without supply/release valve, without switch, pressure sensor) KJR KJRN L to L3 C to L3 06 P 560 56 P to J N 00 i Optional Specifications/Functions/Applications Note 19) Q 08 Type Function/Application L to N Symbol Nil A 07 ZK2 07 Without option B 10 09 Bracket P to N C to N Use when a single unit is mounted to the floor in an upright