Type: 10S (Side Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 21 (for 21 Stations; Longer Rail than Total

Thomas Oil-less Rotary Vane Compressor / Vacuum Pump Flow Rate: 21 LPM , 21 LPM, Max Pressure: 2.9 PSIG / 200 mbar , 2.9 PSIG / 200 mbar, Max Vacuum: 22.7 in HgV / -770 mbar , 22.7 in HgV / -770 mbar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 5.91 in / 150 mm Width: 1.89 in / 48 mm Height: 1.89 in / 48 mm , Length: 5.91

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

+0.030 4H9 0 depth 4.5 K cross view (Closed) +0.052 32H9 0 depth 1.5 Auto switch mounting groove (4 locations) 76 Width across flats 13 (4 locations) M5 x 0.8 (Finger closing port) 2 x M5 x 0.8 Vacuum port M5 x 0.8 (Finger opening port) H 4 x M8 x 1.25 (Piston rod thread and rack thread) 33.2 11.5 6.5 12 16 16 16 1 27 18 O S 12 23.5 52 29 K (81) 18.5 38 12 29 29 14 4 4 14 40 When open F 21

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

P.C.D.36 (Mounting thread) 57 54 60 120 120 A 45 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 13 25 25 Finger closing port Finger opening port 4 x M4 x 0.7 thread depth 8 Finger closing port Finger opening port (A, B common view) M5 x 0.8 thread depth 5 Vacuum suction port +0.02 0 2 x 4 depth 8 44 Auto switch mounting groove (A, B common view) 14h9-0.043 0 18 1.5 55.5 9 24.6 2-3 3.4 4.7 37 (60) 21

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

+0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21

Information

27 30 19 21 27 30 34.5 37 42 47.5 34.5 35.5 42 47.5 CQ-C012 CQ-C016 CQ-C020 CQ-C025 25 28 35 40 25 28 35 40 100 100 4 4 5 5 4 4 5 5 12 16 20 25 12 16 20 25 45.5 49 54 57.5 39.5 40.5 52 57.5 CQ2 80 90 10 5 5 8 CQ-C012 CQ-C016 CQ-C020 CQ-C025 100 100 CQS 80 90 10 The double clevis pin and retaining ring are not included.

1

Special electrical entry direction 2 XSA Series Specifications Model XSA1-11 2 XSA1-21 2 XSA2-22 XSA2-32 XSA2-43*3 XSA3-32 3 XSA3-43 Action Normally closed Fluid Air, Inert gas Orifice diameter mm 2 3 4.5 6 4.5 6 Withstand pressure MPa(G) 1.5 Minimum operating pressure Pa(abs)/OUT side 1 x 106 Maximum operating pressure MPa(G)/IN side 1.0 Maximum operating pressure differential MPa *1 0.8

Vacuum Pad: Ball Joint Type

Mounting female thread Vacuum entry port 6 tube 4 tube 8 tube Mounting Connection 10 to 16 One-touch fitting M5 x 0.8 19 18 Female thread 4 tube M5 x 0.8 22 23 20 to 32 M5 x 0.8 10 to 16 6 tube M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 40, 50 Pad dia.

Air Tank Series AT 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for Precautions on every series. 3BJIS10KFF 4BJIS10KFF Note) The accessories should be mounted by user. How to Order Caution on Design HA AT 22C 14 Caution AT 1. Use outside Japan is not allowed.

Series HAW Water Cooled Aftercooler 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for precautions on every series.

Heatless Air Dryer Series ID 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-148 for Precautions on every series. Please use the adsorbent set (refer to page 14-19-1 for Accessory/Replacement Parts) when replacing the adsorbent. HA 2.

Special Specifications:

Refer to pages 14-21-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and pages 14-14-6 to 8 for Precautions on each series. 2. Select according to the maximum flow consumption. When compressed air is used for air blow, etc., find the maximum air consumption and then select the size of Series AM.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-21 21 Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized.

RSH/RS1H

) (mm) Width across corners I 85 103 132 GA 16 24 24 H 128 144.5 171.5 FT 20 25 25 FX 73 90 110 FZ 93 114 138 A 221 243.5 299.5 CD 20 20 25 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 L 45 54 56 N 9 11 13 O QB 7 8.5 10 B 93 99 128 QA 10 12.5 12.5 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21

RB/RBL/RBQ

With cap SR 6.8 8.7 12 18 25 B 6.5 9 12.5 16 21 A MM h M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 4 6 6 6 C 12 14 19 27 36 MM B M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f RBC08C RBC10C RBC14C RBC20C RBC27C RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S 6 7.5 10 20 25 12 14 19 27 36 13.9 16.2 21.9 31.2 41.6 6.5 8 11 16 22 23 23 31 40 51 9 11 15 23 32

RZQ

9, @0, @1, @2 and @4 from the table above DSeal kits are sets consisting of items 19, 20, 21, 22 and 24 and can be ordered using the seal kit number for each cylinder bore size.

Compact Cylinder

20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory) CL CD hole H9 CZ M CX M CU CZ CW RR (mm) Hexagon socket head cap screw Bore size (mm) -0.2 -0.6 CDH9 CL CU CW CX CZ M RR 20 25 32 40 50 63 8 3 12 20 16 35 22 9 M5 8 3 12 20 16 40 26 9 M5 10 5.5 12 22

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Order the seal kit, based on each bore size. 8-29-20 21 Dual Rod Cylinder: With End Lock For Retracting Side Series CXS Dimensions: 6, 10, 15 CXS6-R ZZ SS MX MTS 3 3 MY Manual lever insertion CY (mm) 1.7 ZZ SS Model CXS6-10R CXS6-20R CXS6-30R CXS6-40R CXS6-50R MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

MLGC

D-G59F D-B59W Applicable bore size (mm) A A B A B B A B A B 16 (24) A B Hs Hs Hs 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 20 4.5 8 6 10 9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Support brackets are not for mounting; use them solely for providing support. 8-14-21 21 Series MY3A/3B Floating Bracket Facilitates connection to other guide systems.