LEC-OM038xx CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.
to 1000 L/min 20 to 2000 L/min Instantaneous flow 5 to 525 L/min 10 to 1050 L/min 20 to 2100 L/min Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 1 Every 2 minutes or every 5 minutes Rated pressure range 0 to
Please order 10 sets at a time. 2.9-14 Series VQ100 Manifold Option Manifold Option VV3Q11 For Manifold With Multi-connector Plug Assembly VVQ100-12A1 2 3 D Side End Plate Assembly Finishing O.D. 7.8 D side end plate assembly part number VVQ100-3A-l SY qw e Option Cover color: Ivory 1 2 Standard DIN rail mounting SYJ 1 4 17 10 5 11 16 17 20 VK U Side End Plate Assembly L 52 30 10 U side end
Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75 3 180 18 31 22 35 63 12 360 25 52.5 29 56.5 90 18.5 27 22.5 31 15 69 3 180 22.5 39.5 26.5 43.5 52 9 360 30.5 64.5 34.5 68.5 90 36 48.5 40 52.5 20 56 4 180 42 67.5 46 71.5 41 9 360 55.5 106 59.5 110 90 43 59 47 63 30 43 3 180 51 82 55
CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.
Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.
Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214
Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY
Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .
Connector specification ES M8 connector ( socket ) /10 pcs. TP M12 connector ( plug ) /1 pc. TS M12 connector ( socket ) /10 pcs. 40 41 Item No.
(such as static electricity. (2) Check if the power supply voltage System error is in the range 24 VDC 10%. (Er0, 4, 6, 7, 8 or 9) is displayed. (2) Supply power in the range 24 VDC 10%. "HHH" is 6 (1) Reset applied pressure displayed. (1) Check that the pressure is not to a level within the set pressure range.
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60
CN2: TB/PC connector.33 9. 1 How to use.33 10. LED display.34 10. 1 LED display.34 10. 2 Controller IF communication status and LED display.35 11. Mode.36 11. 1 Outline.36 11. 2. Step data input mode .36 11. 3. Numerical data input mode.36 11. 4. Data writing mode.38 12.
-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!
(such as static electricity. (2) Check if the power supply voltage System error is in the range 24 VDC 10%. (Er0, 4, 6, 7, 8 or 9) is displayed. (2) Supply power in the range 24 VDC 10%. HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.
(such as static electricity. (2) Check if the power supply voltage System error is in the range 24 VDC 10%. (Er0, 4, 6, 7, 8 or 9) is displayed. (2) Supply power in the range 24 VDC 10%. "HHH" is 6 (1) Reset applied pressure displayed. (1) Check that the pressure is not to a level within the set pressure range.
-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!
Zone 40 :/ 1 30 " /' i 20 ;/ Danger Zone 10 SOOO 1
L/min 10 L ON OFF ON OFF 0 -14No.PF-OMO0004CN-E , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.
LEC (LECP6LECA6) 9 - 3 3.1 DC24V10% 200mA () 300mA () LEC (LECP6, LECA6) 12 *UL UL1310 Class2 EtherNet/IP EtherNet (IEEE802.3) 100BASE-TX 10/100Mbps () 100m(328ft) EtherNet/IP (/) 2048 (256byte)/2048 (256byte) IP DHCP ID7 0(Generic device) 154 LEC-GEN1 10 - RS485(Modbus ) 115.2k 230.4kbps (115.2kbps) (3m)(3m12 ) 39m 3m 3m 3m 3m 3m 0 40() 90%RH () -10 60() 90%RH () 2(0.5G