temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG50ACompressed air0.3 to 1.0 5 to 50 5 to 50 20586500860.72525251 L/min [ANR] {In case

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG100Compressed air0.3 to 1.0 5 to 50 5 to 50 20119010001900.72525251 L/min [ANR] {In

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251 L/min [ANR] {In case of Inlet air

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: None

How to Order

Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors. For connector cable of M8 connector, refer to page 646. M8 connector conforming to IEC60947-5-2 is also available. Refer to page 640 for details. Note 1) Enter the cable length symbols in .

10-SYJ3000

Refer to page 371 for the lead wire length of L and M plug connectors. Refer to page 374 for the connector assembly with cover for L and M plug connectors. For connector cable of M8 connector, refer to page 374. M8 connector conforming to IEC60947-5-2 standard is also available. Refer to page 369 for details. Note 1) Enter the cable length symbols in .

฀AS

L-bracket AS-20L 2pcs. Threadedstudkitformanifold AS-32B 1pc. 1

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: N (NPT), Port Size: 03 (3/8), Output Specification: L (Out 1: IO-Link: Switch Output, N/P, Out 2: None; Temperature Sensor ), Temperature Sensor: T (Temperature Sensor), Lead Wire: Q (w/M12-M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

min10 l/minl/min, CFMl, m3, m3 x 103, ft3, ft3 x 103, ft3 x 1060.1 to 1.5 MPa2.25 MPa20 kPa (at maximum flow rate)0 to 9,999,999,999 l?

L/min [ANR] {In case of Inlet air pressure 0.7 MPa}1/4, 3/80.78(0.91)