Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

1 e #5 @2 #7 #7 !2 #7 #3 @5 @5 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 Single acting spring extended (TL, TM) Double acting spring type (BL, BM) y r $0 !1 !

Programless controller Step motor (servo 24 VDC)

LEHS10 LEHS20 LEHS32 LEHS40 speed acceleration speed acceleration speed acceleration speed acceleration [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] 0 5 100 5 100 5 100 5 100 1 7 150 10 150 10 150 10 150 2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Note 2) Wiring to the load is 5 m or longer. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 12-13-5 for contact protection box.)

VQ7-6/7-8

3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Prevents Micro-Bubbles

Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5 5 19, 3/4" 19, 3/4" TI/ TIL How to Order Valve PA LVC 2 0 S07 A PAX Option PB Body class Nil 1 4 None With flow rate adjustment

Compact

6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Note 2) Wiring to the load is 5 m or longer. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 12-13-5 for contact protection box.)

VQ7-6/7-8

3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5 !6 Component Parts Component Parts No.

Dual Speed Controller with One-touch Fitting Series ASD

(Refer to pages 15-6-3 to 15-6-5 for details.)

A_HEC-OM-K001

. 5-1 5.1 Start of Operation . 5-1 5.2 Setting of Values . 5-1 5.3 Cautions for Operation Control. 5-2 5.3.1 Indication and Setting when Output Cutoff Alarm Operates . 5-2 5.4 Operation of Controller . 5-3 5.4.1 Details of Operation and Display Panel . 5-3 5.5 How to operate . 5-4 5.5.1 Setting Mode, Level 1 . 5-5 5.5.2 Detail of setting mode level 1. 5-6 5.5.3 Setting Mode, Level 2 . 5-

7ND9071en

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

JXCx-OMY0008

Power supply 0V (2) ON IN0 to 5 OFF (2) Input the step data No. to be specified by Word0, bit0-5:IN0-5 SVON E.g.) Specify step data No.1 7010h, bit0: IN0=ON, DRIVE (DRIVE signal is not used) OFF 7010h, bit1-5: IN1-5=OFF (5) Control signals (1) This is the Base step No that will be used.

CXS

stick-slip even at 5 to 50mm/s.

Electric Actuators

5 !4 !3 e u !

Step Motor Driver （ Pulse input type ）

pulse sign 3 NP+ R type 24 VDC 10% 3.3 k 5% NP4 R (0.5W or more) Pulse PP+ 5 5 VDC 5% 390 5% (0.1W or more) 6 PP1) The pulse input circuit of NPN type and PNP PNP open collector input for 1 pulse mode *1) type is the same.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

Slider Type Ball Screw Drive/11-LEFS Series

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.