13

10 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N ZF 14.2 Applicable tubing diameter E 14.2 17.2 ZP 17.2 19.95 ZCU 19.95 93.3 58.5 41 10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Air Cylinder Series MB

Bore size (mm) Part no. l Applicable cotter pin m Dd9 L d H B C 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03Note 1) 10 14 22 25 44 36 4 4.5 5 5 3 4 4 4 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 6 8 11 13 16 16 17 22 27 32 41 41 19.6 25.4 31.2

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 OTHER SIZE RATING, VALVE, SS5YJ3 MFLD SYJ3000, 1K, SS5YJ3 OTHER SIZE RATING, 0.66069 lb

base mounted or body ported styles.Bar stock type manifold for SYJ3000 valves, Supply and exhaust ports common (20, 31, 32, 41 types), Valves individually wired, Maximum 20 stations available as standard, 5 port sizes available, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, VALVE, SS5YJ3 MFLD SYJ3000, UJ, SS5YJ3 BUILT IN FITTING LESS THAN 1/4, 0.99208 lb

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018

Mini Free Mount Cylinder

Mounting condition 2 With Magnet (With Auto Switch) Mounting condition 1 6, 8, 10 12, 16 20 Bore size (mm) M3 x 0.5 M5 x 0.8 Port size 5 or more 4 or more 5 or more Stroke (mm) AS121F-M3-02 AS121F-M5-02 AS121F-M3-23 AS121F-M5-23 AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS131F-M3-23 Mounting condition 4 Mounting condition 3 AS131F-M3-04 AS131F-M5-23 AS131F-M5-04 AS131F-M5

Air Cylinder

(mm) Bore size Stroke range CDH10 CX (mm) A AL B B1 C CZ D E F G H1 J K KA L (mm) 40 50 63 80 +0.3 +0.1 10 12 16 20 25 +0.084 +0.058 0 15 18 25 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 29.5 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 8 M8 x 1.25 M8 x 1.25 6 7 7 14 18 18 22 26 30 35 40 48 58 +0.3

5 Port Solenoid Valve

SS0700-80A-2 SS0700-80A-4 SS0700-TR-l 10 S0700-GS-5 Applicable tube Applicable tube 2 Applicable tube 3 Applicable tube 4 Applicable tube 1/8" Applicable tube 5/32" Symbol C2 C3 C4 N1 N3 Gasket, Screw 10 Note 1) Gasket 10 Note 1) Clip Note) Above part number consists of 10 units. Each unit has one gasket and two screws. 2 Note 2) Tie-rod assembly Note 1) 1 set includes 10 pieces.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12

HRX-OM-W032

10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40 50 60 70 80

HRX-OM-R016

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

HRX-OM-O021

20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

IDG

0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

HRX-OM-R026

HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090-A-20. 9-10 9.4.2 HRSH090-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-

HRX-OM-X027

HRS-R Series Product Warranty 10-1 HRX-OM-X027 Chapter 10 Product Warranty 6. Request to customers Proper use and maintenance are essential to assure safe use of this product. Be sure to satisfy the following preconditions.