Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31 (42) 31 (42) 2-8 mounting hole 56 56 1 3 5 16 (20) (2 port) 16 (20) (4 port) 16 (23) (22) 16 (11) 10 12 (16) 62(72) 75(86) A B PB 50 62 (72) 75 (86) 14 2 4 1/8-2 port 12, 14 port Manual override 18 (20) (20) 18 PA R1 P R2 44 (58) 44 (58) 3/8, 1/2, 3/4-5 port 1,4, 2, 5, 3 port 49 (64) 49 (64) 2-8 mounting

Rubber seal 5 Port Solenoid Valve Series SYJ5000

terminal (D): SYJ5220-D-M5 M8 connector (W0): SYJ5220-W0-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23 23 23 27

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

LEC-OM07605CN

(FR-BSF01FR-BLF) 7) 8) 11 20 11.

CLK1

2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Clamp Cylinder with Lock Series CLK1

2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

LEC-OM02904

11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1 132 13.1.1 132 13.1.2 134 13.2 . 135 13.3 . 135 13.4 . 135 13.5

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 18 Series VQ7-8 DIN Connector Type 2 position/Single : VQ7-8-FG-S Single (reverse pressure) : VQ7-8-YZ-S 154 56 (71) 82.5 71.5 154 49 (64) 49 (64) 82.5 56 (71) 31 (42) 31 (42) 2-7.5 Mounting hole 16 (20) (port A) 16 (20) (port B) R1 R2 P Manual override A B PB (22) 16 16 (23) 12 (16) (11) 10 75

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

fitting ass'y for 4 C6: One-touch fitting ass'y for 6 C6: One-touch fitting ass'y for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) 21.5 Dimensions Equation L1 = 11n + 20 n: Station (Max. 24 stations) 7.5 L n 1 2 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5 137.5 150 175 60.5 73 85.5 98 110.5 123 135.5 135.5 173

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

MLGC

13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N

Air Slide Table Series MXQ

Maximum allowable moment: Mmax (Nm) Table 4 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) Model 10 20 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,

CL

Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke

3

85 95 75 85 95 85 95 105 125 80 90 100 120 90 100 110 130 95 105 115 135 CKQ 8 8 Arm Proper Tightening Torque 9 Bore size (mm) Proper tightening torque (Nm) 12 16 20, 25 32, 40 50, 63 0.5 to 0.7 2.8 to 3.5 11.5 to 14.0 24 to 30 75 to 90 8 9.5 Fig. 1 Flange Mounting 11 Caution The mounting bolt for the rod flange or head flange should be tightened to the torque shown in the table below. 10.5

Stability of suction position,

11 84.5 53.61) 22 75 44.11) 18 4 4 30 (Rotating angle) 30 (Rotating angle) 106 100 71.5 57 80 85 Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-YF80BMl-B12 213 208 248 ZP3E-YF100BMl-B12 354 343 426 ZP3E-YF125BMl-B12 M12 x 1.75 18 11.5 94 63.11) 25 Rc1/8 62 71 117 40 6 A-A 22 A A 26 32 93.8 11 ZP3 ZP3E ZP3E ZP2 4 ZP2V 30 (Rotating angle) ZP 133 125

JA/JAH/JB/JS

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series JAH Specifications Specifications RE A B Applicable cylinder nominal thread size Maximum operating tension and compression force

JA/JAH/JB/JS

11 11 13.5 13.5 16 20 20 20 24 6.6 9 9 11 11 11 11 11 14 16 16 14 22 24.5 28.5 28.5 35.5 35.5 35.5 44.5 44.5 53 65 65 56 78 For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-6 7 Floating Joint: Heavy Load Type Series JAH Specifications Specifications RE A B Applicable cylinder nominal thread size Maximum operating tension and compression force