CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

s m 2.

SMC

Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031

Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

SYJ300/500/700

AC voltage valves there is no S option.

33

HRS HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRSE HRZ HRZD Lots of variations are available in response to the users requirements.

MK

MI W S Graph (2) CEP1 MK50/63 CE1 When arms moment of inertia is 3 x 104 kgm2, cylinder speed should be less than MK20/25: 65 mm/s MK32/40: 150 mm/s. For calculating moment of inertia, refer to page 10-7-21. Mounting bolt for MKB MK32/40 CE2 Mounting method: Mounting bolt for through-hole type is available as an option. Ordering: Add the word MKB in front of the bolts to be used.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

S ... ...

CLQ

to 50 80 116.5 53.5 11 11 99 116 134 43 20 53.5 77 53.5 116.5 75, 100 53 125 10 to 50 100 135 63 11 11 117 136 154 50 22 53.5 94 L1 Rod end nut 63 135 75, 100 Rear flange type: CLQG/CDLQG FV M Rear flange type (mm) 4-FD Without auto switch With auto switch Bore size (mm) FZ FX A + Stroke L FT B + Stroke G Stroke range FD FT FV FX FZ G L L1 M A A B B 36 91 10 to 50 63 101 46 9 9 80 92 108

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y5-60Stations B 2 3 4 5 6 7 8 Stations 4-One-touch fitting (ports P, R) Applicable tube O.D.: 10 L1 135.5 160.5 173 185.5 210.5 223 235.5 L2 125 150 162.5 175 200 212.5 225 (Station n) (Station 1) 51.9 (4.9) L3 112 128 144 160 176 192 208 (Light/surge voltage suppressor) 43.8 (5.5) L4 11.5 16 14.5 12.5 17.5 15.5 13.5 9 10 11 12 13 14 15 Stations L1 248 273 285.5 298 323 335.5 348 [47.9

Compact Guide Cylinder

Max. speed Up to 300 mm/s Up to 400 mm/s Up to 500 mm/s Coefficient 1.7 1 0.6 10 MGPK Series L L m m Plate Material Carbon Steel /MGPKM Vertical Mounting Operating pressure: 0.5 MPa or more Operating pressure: 0.4 MPa MGPKFM12 to 50 50 mm stroke or less, V = 200 mm/s or less Over 50 mm stroke, V = 200 mm/s or less 100 100 50 50 40 40 32 32 10 10 25 25 Load mass m [kg] Load mass m [kg] 20

LX

(B contact) Standard stroke 50 1.9 75 2.1 100 2.3 125 2.5 150 2.7 mm kg C kg mm/s mm N.C. (B contact) N.O. (A contact) Body weight N.C.

CXT

MXU MXS CXTl 12 16 CXTl20 CXTl25 CXTl 32 40 Model MXQ Shock absorber RB2015 RB1411 RB1007 RB0806 Max. absorbed energy (J) 58.8 14.7 5.88 2.94 MXF Absorbed stroke (mm) 15 11 7 6 Collision speed 0.05 to 5m/s MXW Max. operating frequency * (cyc/min) 25 45 70 80 Ambient temperature 10 to 80C MXP Expanded 8.34 6.86 4.22 1.96 Spring force (N) MG Compressed 20.50 15.30 6.86 4.22 Weight (g) 150 65

CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

CE

Mounting style B L F 12 mm equivalent S 1 pc.

CLQ

11 Series CLQ Construction: 20 to 32 i o !

MY2

Piston speed mm/s Piston speed mm/s Piston speed mm/s 10 Mechanically Joint Type Rodless Cylinder Series MY2C Cam Follower Guide Type/16, 25, 40 How to Order Cam Follower Guide Type MY2 G 16 C 300 L F9N Number of auto switches Guide suffix C Cam follower guide Nil S n 2 pcs. 1 pc.

ITV

Output deviation factor (% F .S.) 0.6 0.5 0.4 Return 0.2 0 0 0.2 0.4 0.5 Out 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.