Vacuum System Peripherals: /S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.
CD E F GA GB H M J LH LT LX LY P PJ S SS C K B D G MA A MM 40 25 to 800 52 90 M6 x 1 25.5 51.5 7.5 M16 x 1.5 11 16 12 58 107 34 33 70 3/8 58 40 12 19 47 8 22 22 19 50 65 103 M8 x 1 32 64.5 9 M20 x 1.5 25 to 800 11 16 12 58 108 50 42 15 34 59 11 83 3/8 65 24 28 28 25 63 77 115 M8 x 1 38 76.5 9 M27 x 2 25 to 800 11 50 19 31 18 74 12 95 1/2 66 115 68 58 13 36 30 32 36 80 M10 x 1.25 25 to 800
Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.
10-3-12 CV MVGQ Compact Cylinder Series CM2X Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) CC 20, 25, 32, 40 0.025 0.5 RB 10-3-14 J Clean Series DCompact Cylinder Series 10-/11-CQSX Air Cylinder Series 10-/11-CM2X Air Cylinder Series 10-/11-CQ2X -X 20Data 10-3-1 2 Low Speed Cylinder Low Speed Cylinder Improved low friction characteristics (CM2X, CQSX
Bore size (mm) Minimum operating pressure (MPa) Minimum operating piston speed (mm/s) Compact Cylinder Series CQ2X CE2 ML2B 32, 40 0.025 0.5 50, 63, 80, 100 0.01 0.5 C J G5-S 10-3-12 CV MVGQ Compact Cylinder Series CM2X Minimum operating piston speed (mm/s) Bore size (mm) Minimum operating pressure (MPa) CC 20, 25, 32, 40 0.025 0.5 RB 10-3-14 J Clean Series DCompact Cylinder Series 10-/11
VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.
11-CQ2X 20, 25, 32 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore size (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min. operating pressure (MPa) Bore size (mm) Min. piston speed (mm/s) Min. piston speed (mm/s) Min. piston speed (mm/s) Bore size (mm) Min. operating
How to Order Specifications and Allowable Load 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. 11 MSQ 10 A90 B A S Number of auto switches Clean series Vacuum type Auto switch type A B High precision type Basic type A R With adjustment bolt Shock absorber Size 10 20 30 50 Dimensions Clean series products do not have empty holes.
Applicable model HRR010/012/018/024/030/050-mm-m-DM Measurement range of electric conductivity 0.1 to 48.0 S/cm Set range of target electric conductivity 0.5 to 45.0 S/cm1 Set range of electric conductivity hysteresis 0.1 to 10.0 S/cm 1 Default setting is set to Electric conductivity set value: 25.0 S/cm and Hysteresis: 5.0 S/cm.
Z T Nil S Z R U Power saving circuit is not available for W type.
Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic
Cap MI W S Cap bracket CEP1 CE1 CE2 ML2B C J G5-S (mm) CV Model Basic type With cap With cap Basic type dimensions h Hexagon nut D M14 x 1.5 M14 x 1.5 M20 x 1.5 M27 x 1.5 E1 5 5 6 8 E2 K 11 12 15 25 L LL S E3 LL Z B C H 3.5 3.5 4 5 MM F MVGQ RBC1411 RBC1412 RBC2015 RBC2725 RB1411 RB1412 RB2015 RB2725 12.2 12.2 18.2 25.2 12 12 18 25 12 12 18 25 58.8 58.8 62.2 86 78.3 79.3 88.2 124 67.3 67.3
ZZ Bore size ZZ Rc1/8 NPT1/8 20 10.5 11 7.5 54 (59.5) 75 (80.5) 20 60.5 (66) 25 10.5 11 7.5 52.5 (58) 76.5 (82) 25 59 (64.5) 32 10.5 10.5 7.5 53 (59) 77 (83) 32 59.5 (65.5) 40 10.5 10.5 7.5 57.5 (63.5) 87.5 (93.5) 40 64 (70) Bore size GA GB S ZZ Bore size ZZ 20 9 5 41 (46.5) 62 (67.5) 20 47.5 (53) 25 11 5 43.5 (49) 67.5 (73) 25 50 (55.5) 32 10.5 5 43.5 (49.5) 67.5 (73.5) 32 50 (56) 40 11
NOTE 1) Female thread length ("1") is shorter tor the lollowing . 106 (r 1/15') r/s & t/a st. 1/s &l/a st. 150 (1Vr') J/s & 1/a st. 1/s & 1/a st. 106 (11/re',) 150 (11i,',) Series NCQT Dimensior* ll-Counler Eore ard Thru Diamoter S.H.C.S. 4x2 places H-Thrad l-Depth, NOTE 1. \ 'l type on page 11.
NOTE 1) Female thread length ("1") is shorter tor the lollowing . 106 (r 1/15') r/s & t/a st. 1/s &l/a st. 150 (1Vr') J/s & 1/a st. 1/s & 1/a st. 106 (11/re',) 150 (11i,',) Series NCQT Dimensior* ll-Counler Eore ard Thru Diamoter S.H.C.S. 4x2 places H-Thrad l-Depth, NOTE 1. \ 'l type on page 11.
Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control
Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2 23 M4 x 0.7 6 4.2
Note 3) The handle of the selector (2 position and 3 position) cannot be removed or replaced alone. 5-6-12 11 2/3 Port Mechanical Valve Series VM100 How to Order S 01 01 3 1 VM1 Suffix for indicator light Suffix for actuator With miniature indicator light (Bottom piping type only) Actuator type R S Z G B Red Hard steel roller Port size Basic 00 Color of push button selector M5 01 M5 x 0.8