TABLE OF CONTENTS

Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

Compact Manifold Regulator

0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.

Sine Cylinder Series REC

11 17 19 21 0.3 G 7 11 13 13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.

Sine Cylinder Series REC

11 17 19 21 0.3 G 7 11 13 13 0.5 1 10 50 100 200 300 400 v (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 Clevis style: C, D Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 C 22 30 35 37 0.5 Graph (2) Applicable Max.

MK

Data 10-7-13 14 Rotary Clamp Cylinder: Heavy Duty Type Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S F9BW 20 10 R F Number of auto switches Nil S 2 pcs. 1 pc.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

+ Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x

Vacuum System Peripherals:

For AC, there is no S specifications, since it is integral with converter. Solenoid valve rated voltage 5 12 VDC 24 VDC 6 V S R 1 Slotted locking type Non-locking push type Manual override 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 110 VAC 50/60 Hz 3 Nil Number of stations w-2 Individual specifications (Symbol , , , , ) Indicate X for required station.

VQ7-6/7-8

(Values at the initial period) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 3-10-7 8 Series VQ7-6 DIN Terminal Type 2 position single : VQ7-6-FG-S single (Reverse pressure): VQ7-6-YZ-S 120.5 120.5 68.5 52 68.5 Mounting hole 2-6.5 50 50 42.5 42.5 25 25 13 (A port) 13 (B port) Manual override (R1, R2) 2-3/8 P R2 R1 A B 14 11 50 62 12 9 62

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

) rubber hose 12 10 Cylinder bore size 40 9 Flow rate (l/min) 5 8 Cylinder bore size 32 7 6 Cylinder bore size 25 4 (steel pipe I.D.) 5(approx. 4.5) 4 Cylinder bore size 20 3 2 7 6 5 4 3 2 20 30 40 50 60 80 100 200 300 2.8 General range of rubber hose (max. 5m/s) General range of steel pipe (max. 4.5m/s) Flow velocity inside pipe (m/s) Piston speed (mm/s) How to read the chart: Example) The

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

MY1

unit (Shock absorber stroke) T MY1W16/20 S F MY1W50/63 Shock absorber EY EC (mm) h E EB EC EY T EA S TT F Shock absorber model RB0806 W 58 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 3.6 14.6 30 5.8 39.5 6 7 40.8 5.4 (Max.11) 4 20 32 5.8 45.5 3.6 6 10 RB0806 RB1007 40.8 5 (Max.11) 4 58 70 D24 38 6.5 53.5 7 12 3.5 46.7 5 (Max.16.5) 6 RB1412 RB1412 29 50 8.5 67 12 14 67.3 8 (Max

ARM10/11

AXT100-DR-9 AXT100-DR-11 AXT100-DR-13 AXT100-DR-16 AXT100-DR-18 AXT100-DR-20 AXT100-DR-22 AXT100-DR-25 AXT100-DR-27 AXT100-DR-29 123 148 173 210.5 235.5 SMC SMC 260.5 K K P P C C U U O O S S L H L H 57 285.5 53 33.5 323 18 348 IN OUT IN OUT IN 373 14-4-28 11 Series ARM11A Compact Manifold Regulator Common Supply Type ARM11AC2-12-B Handle position: Bottom/3-way valve common supply block For

ARM10/11

AXT100-DR-9 AXT100-DR-11 AXT100-DR-13 AXT100-DR-16 AXT100-DR-18 AXT100-DR-20 AXT100-DR-22 AXT100-DR-25 AXT100-DR-27 AXT100-DR-29 123 148 173 210.5 235.5 SMC SMC 260.5 K K P P C C U U O O S S L H L H 57 285.5 53 33.5 323 18 348 IN OUT IN OUT IN 373 14-4-28 11 Series ARM11A Compact Manifold Regulator Common Supply Type ARM11AC2-12-B Handle position: Bottom/3-way valve common supply block For

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

HRX-OM-Y098

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

Profile Design ISO/VDMA Air Cylinder Series CP95

64 32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 63 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12