Modular F.R.L. Unit

4.6 88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277 43 105 191 11 20 50 98 70 44.5 16 84 11 6.4 117.5 316 3.3 280 46 105 196 20 11 50 70 98 44.5 84 13 11 6.4 117.5 319 3.3 Note 1) For AC20B only, the position of the pressure gauge is above the piping center.

OMU0023

for start of Step Data No. 20 operation) Instruction to execute the operation of Step Data No. 10 01 10 9100 0001 02 0100 01 10 9100 0001 20 sent. 11 01 02 004B 0001 01 02 01 Acquires the INP signal information.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

CXS

up to 1000mm/s; up to 50mm 10 Graph V = up to 1000mm/s; up to 75mm 11 2 2 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Graph V = up to 1000mm/s; up to 100mm 12 CXSM CXSL Weight m (kg) Made to Order Auto Switches 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang L (mm) 63 Series CXS Safety

Profile Design ISO/VDMA Air Cylinder Series CP95

6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47

C95

EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9 9 11

Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

HRX-OM-X071

-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for

KR

(mm) Note) L P D Nylon Urethane 2-applicable tubing KGU04-01 KGU04-M5 4 11 20 12 11 21 34 M5 x 0.8 10.4 36 38 40 39.5 42 46 42.5 45.5 49 51 52.5 55.5 56.5 2.2 2.2 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 58.5 59 60.5 M5 x 0.8 13 1 8 1 4 3 8 1 8 17 12.8 12.8 6 13.4 10.6 14 17 25.6 17.7 15 23 35

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

P Bore size (mm) W V U T S Z X Y Q Y R R Q HR HN 20 20 107 (115) 12 (14) 104 11 21 47.5 40 48 82 12 26 157 30 M6 x 1 depth 9 Rc 1/8 25 20 25 107 (115) 12 (14) 25.3 37 104 11 21 48 46 57 100 13 31 175 37 Rc 1/8 M6 x 1 depth 13 32 25 32 110 (118) 12 (14) 28.3 40 106 11 21 49 52 65 114 16 38 201 37 Rc 1/8 M6 x 1 depth 13 40 32 40 121 (130) 12 (15) 31.3 43 123 11 25 53 62 84 138 20 47 238 44

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Cylinder with Lock

40 14 64 15.5 47 23 5 58 11 M8 x 1.25 63 35 32 78 75 39 52.5 59.5 90 1/4 56.5 20 45 14 73 16.5 53 20.5 9 58 11 M8 x 1.25 80 40 37 98 95 49 64.5 71.5 113 1/4 72 25 45 20 92 19 65 26 11.5 72 13 M10 x 1.5 100 40 37 116 114 58 73.5 80.5 131 1/4 89 30 55 20 109 19 74 26 17 72 16 M10 x 1.5 With Rubber Bumper [mm] [mm] Bore size K KA KB KC MA MB MC MM N N1 P S TT TX TY V W ZZ 32 6 10 17 3 16

HRX-OM-W060

140 160 180 Circulating fluid flow [L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20 CH2 0.6 0.5 Pressure [MPa] 0.4 Circulating fluid outlet 0.3 Usable flow rate range 0.2 Circulating fluid return 0.1 0.0 0 2 4 6 8 10 12 14 16 18 Circulating fluid flow[L/min] Fig. 8-12 Pump capacity(HRL100/200/300-A-20 CH2) 8.5 Pump Capacity HRL Series 8-10 HRX-OM-W060 Chapter 8 Documents 8.6

Compact Cylinder with Air Cushion

40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

RHC

LT CC JC Y X JC Y X S + Stroke NF LX LZ RB LS + Stroke ZZ + Stroke J DH1 50 0.042 I 11 JC 58 K 75 LD 7 H 11 GA 80 FA 16 EA 23 D 62 C 20 B 53 A 70 E Bore size (mm) Stroke range (mm) 50 Eff. thread length 32 -X Up to 1200 35 0 63 11 72 75 7 11 80 16 23 58 20 60 Up to 1200 80 35 32 55 0.074 0 2080 13 89 78 10 13 90 20 23 61 25 75 Up to 1400 95 40 37 65 0.074 0 100 16 110 80 10 13 95 20 25 63

SMC

5.5 5.5 11 H (NN1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41 13-/22-MXS6L-10 13-/22-MXS6L-20 13-/22-MXS6L-30 13-/22-MXS6L-40 13-/22-MXS6L-50 136 MXS Air slide

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Insulation resistance M/km, 20C 5 or more L Note) The minimum bending radius of the circular connector cable is 20 mm. 60 30 Plug terminal no. 15 14 2 1 17 16 25 24 13 3 18 23 12 4 26 19 22 11 5 21 20 10 9 8 7 6 Socket side Note) Lengths other than the above are also available. Please contact SMC for details. Note) For CE compliant models, DC-type only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Insulation resistance M/km, 20C 5 or more L Note) The minimum bending radius of the circular connector cable is 20 mm. 60 30 Plug terminal no. 15 14 2 1 17 16 25 24 13 3 18 23 12 4 26 19 22 11 5 21 20 10 9 8 7 6 Socket side Note) Lengths other than the above are also available. Please contact SMC for details. Note) For CE compliant models, DC-type only.

Electric Actuator with Integrated Guide

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Electric Actuator with Integrated Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8