Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, N, "REGULATOR

Special Applications: 10- (Clean Room Compliant), Size: 40, Backflow Function: None, Thread: F (G), Port Size: 04 (1/2), Accessory: E3 (PNP Output, Electrical Entry: Wiring Bottom Entry), Specifications: 3 (0.008 to 0.6 MPa Setting)

Special Applications: 10- (Clean Room Compliant), Size: 40, Backflow Function: None, Thread: F (G), Port Size: 04 (1/2), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 3 (0.008 to 0.6 MPa Setting)

Special Applications: 10- (Clean Room Compliant), Size: 40, Backflow Function: None, Thread: Rc, Port Size: 04 (1/2), Accessory: G [Round Pressure Gauge ("20-" Type Includes Limit Indicator)], Specifications: 3 (0.008 to 0.6 MPa Setting)

Special Applications: 10- (Clean Room Compliant), Size: 40, Backflow Function: None, Thread: Rc, Port Size: 04 (1/2), Accessory: E3 (PNP Output, Electrical Entry: Wiring Bottom Entry), Specifications: 3 (0.008 to 0.6 MPa Setting)

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, PRECISION REGULATOR, REGULATOR

Type: Connector, Type: Small cross-head / straight-slot combination pan head machine screw (SV3000), Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: M4 × 53, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Table of Contents

21 22 22 5 32 15.5 2.5 1 8 1 4 3 16 5 32 16 3 1 4 3 16 1 4 16.5 3.5 5 16 1 4 17 4.6 3 8 3 8 5 16 18.5 6 1 2 1 2 3 8 21 7 Applicable tubing Note) D: Max. diameter Plug-in Y: KQ2U Applicable tubing O.D.

2

20.6 50.2 50.2 9 24 3/8 KQ2L16-03P 21 23.8 21 27.1 32.7 37.0 20.6 71 58.9 11 33.8 1/2 KQ2L16-04P 27 23.8 21 27.1 34.7 36.2 20.6 100 58.9 13 59.9 New New Note) D1 is maximum diameter.

Fluoropolymer Piping Equipment

LQ1T3A-TT2-R5 Tube 3/8 3/8 1/4 5 20 15 9 18 17 14 37.6 36.6 36.6 24 23 16.5 3.6 LQ1T4A-TT1-R1 1/2 Tube 3/8 1/2 24 24 21 21 34 38 34 24 28 28 6.3 LQ1T4A-TT1-R7 3/8 Tube 3/8 1/2 20 24 17 21 34 38 34 24 23 28 5.8 LQ1T4A-TT1-R37 1/2 Tube 3/4 1/2 24 24 21 21 39.5 49 39.5 35 28 28 9 LQ1T5A-TT1-R1 3/4 Tube 1/2 3/4 29 29 26 26 41.9 47.5 41.9 28 39 39 9.5 LQ1T5A-TT1

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

F

28 23 21 41.5 1/4 3/8 KQH07-U03 17.46 18.5 12.5 17 4.6 10 14 KQH10-U02 17 28 22 21 41.5 5/16 1/8 KQH09-U01 14.29 25.5 21.5 18.5 6 10 38 KQH10-U03 17 24 18 21 41.5 5/16 1/4 KQH09-U02 14.29 21.5 15.5 18.5 6 10 12 KQH10-U04 22 22 14 21 41.5 5/16 3/8 KQH09-U03 17.46 21 15 18.5 6 12 14 KQH12-U02 19 30.5 24.5 22 58.3 3/8 1/4 KQH11-U02 17.46 28 22 21 7 12 38 KQH12-U03 19 25.5 19.5 22 58.3 3/8 3

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

Compact 5-Port Solenoid Valve

Please contact SMC for details. 1.5 m AXT100-FC26-1 AXT100-FC20-1 AXT100-FC10-1 3 m AXT100-FC26-2 AXT100-FC20-2 AXT100-FC10-2 5 m AXT100-FC26-3 AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 17 18 17 18 15 16 15 16 COM.

Air Slide Table

3 (NN 1) x H 5H9 ( ) depth 3 +0.030 0 6 8.7 14.4 A 9.5 5.1 10 24 24 A NN x M6 x 1 tapped through hole 6 +0.030 0 2 x 5H9 ( ) depth 3 GA HA Cross-sectional view A-A 45 35 16 Bottom view of MXQ16-50Z Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ16-10Z 38 16 16 8 39 39 58 22 28 98.5 4 2 72.5 87 MXQ16-20Z 38 20 20 12 39 39 58 15 39 108.5 4 2 76.5 91 MXQ16-30Z 48 21 21 30 48 48

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Valve) 10-SYJ5243-5LOU 3 sets (Valve) SYJ5000-21-3A 1 set (Blanking plate assembly) SY3000-37-28A 3 sets (Connector assembly) SY3000-37-29A 3 sets (Connector assembly) Example The asterisk denotes the symbol for assembly.

KJ

21 22 22 5 32 15.5 2.5 1 8 1 4 3 16 5 32 16 3 1 4 3 16 1 4 16.5 3.5 5 16 1 4 17 4.6 3 8 3 8 5 16 18.5 6 1 2 1 2 3 8 21 7 Applicable tubing Note) D: Max. diameter Plug-in Y: KQ2U Applicable tubing O.D.

V100

(A R) Body ported Max. operating frequency (c/s) (AC/DC) (1) 15 21/21 or less 0.125 15 21/21 or less 0.250 Response time (ms) (AC/DC) (2) Weight (kg) (3) Note 1) Minimum operating frequency: As per JIS B 8373 (Once in 30 days) Note 2) Based on JIS B 8375-1981 (Supply pressure; 0.5 MPa; without surge voltage suppressor) Note 3) Value for grommet (Sub-plate weight: 0.055 kg) Note 4) Note 1

SYJ3000/5000/7000

] 2-3.2 2-3.2 (For mounting) (For mounting) 107.6 [112] (For mounting) 125.4 145.4 147.2 110.6 97.6 65.6 35 35 35 35 21 21 25 21 25 21 Pg7 28 25 28 25 28 Applicable cable O.D. 3.5 to 7 28 Refer to page 1-5-79 for dimentions with connector cable. 1-5-56 57 5 Port Solenoid Valve Rubber Seal Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 G H 3 4 5 G H C6

Hydraulic

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.