ARM10/11

L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

Integrated Controller

Please contact SMC for further details. 6 CONTENTS Easy to Operate Integrated Controller Slider Type EQFSH Series p. 8 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 9 How to Order p. 17 Specifications p. 18 Construction p. 20 Dimensions p. 21 Rod Type EQYH Series p. 36 Battery-less Absolute (Step Motor 24 VDC) Model Selection p. 37 How to Order p. 43 Specifications

Series CQ2

) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 10.5 14 SMC SMC 1/8, 1/4-2 port 3, 5 port 21 21 21 21 1/8, 1/4-2 port 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 3-11-15 16 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6

Compact 5-Port Solenoid Valve

) p. 21 JJ5SY1-10PH JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Flat Ribbon Cable, Connector Entry Direction Adjustable (10 pins) p. 21 JJ5SY1-10PHC JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: Flat Ribbon Cable, Compact Type (10 pins) p. 21 JJ5SY1-10S JSY1000 Type 10/Side Ported Plug-in Connector Connecting Base: EX250 Series p. 77

NCA1

0.62 1 5 3/4 1.71 3 5/8 2.36 4.75 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.4 4.75 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 .75 0.62 1 5 7/8 1.75 3 3/4 2.48 4.88 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 1.05

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) Bore size (mm) DL DM HR LL MO DB Over 25 to 75st 98 Over 75 to 175st 118 Over 25 to 75st 13.5 Over 75 to 175st 33.5 Over 175st 25st or less 25st or less Over 175st 22 22 9.5 21 15 15 84.5 140 16 0 55.5 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 0 7 27 49 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59 63

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5 137.5 150 175 60.5 73 85.5 98 110.5 123 135.5 135.5 173 148 160.5 185.5 n L L1 L2 L3 14 16 17 18 21 22 24 13 15 19 20 23 163 174 196 207 218 251 262 284 185 229 240 273 187.5 187.5 212.5 225 237.5 262.5 275 300 200 250 250 287.5 198 198 223 235.5 248 273 285.5 310.5 210.5 260.5 260.5 298 How to Order Double

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications and auto switch information not provided below are the same as those

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications and auto switch information not provided below are the same as those

CNS

[Vertical] [Load in the direction of rod extension] [Load in the direction of rod retraction] Cylinder sliding resistance (N) Cam unlocking torque (standard) (Nm) Width across flats (mm) Socket Bore size (mm) W 125 140 160 JIS B 4636 + 2 point angle socket 16 16 18 21 961 1216 1579 68.6 78.4 156.8 SOL.C JIS B 4636 + 2 point angle socket 18 SOL.C JIS B 4636 + 2 point angle socket 21 4.

VQ7-6/7-8

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121 PA 14 PB 12 5 1 R 3 65 54 4-1/8 P 39 (Pilot pressure EXH port) 21

VQ7-6/7-8

P.7 Manifold Dimensions (DIN Connector Type) P.8 Manifold Dimensions (Prewired Connector Type) Manifold Options P.9 to 12 Manifold with Control Unit P.13, 14 Option Dimensions P.15, 16 Series VQ7-8: Single Unit How to Order Valves P.17 Models, Standard Specifications P.18 P.19 Single Unit Valve Dimensions (DIN Connector Type) P.20 Single Unit Valve Dimensions (Prewired Connector Type) P.21

air-filter-e

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

Air Preparation Equipment

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

C76

ring Bumper A Bumper B Piston gasket Rod seal Piston seal Rod end nut Mounting nut Stainless steel Magnet Resin Urethane Urethane NBR NBR NBR Carbon steel Carbon steel 1 1 1 1 1 1 1 1 1 1 CA2 (Switch type only) 2A 2B CS1 2C e r t y u i C76 Hard chrome plated Chromate C85 Nickel plating Nickel plating C95 Nickel plating C7632 to 40 Air cushion CP95 13 8 6 7 1 11 3 4 14 5 20 9 12 2 10 15 21

C76

ring Bumper A Bumper B Piston gasket Rod seal Piston seal Rod end nut Mounting nut Stainless steel Magnet Resin Urethane Urethane NBR NBR NBR Carbon steel Carbon steel 1 1 1 1 1 1 1 1 1 1 CA2 (Switch type only) 2A 2B CS1 2C e r t y u i C76 Hard chrome plated Chromate C85 Nickel plating Nickel plating C95 Nickel plating C7632 to 40 Air cushion CP95 13 8 6 7 1 11 3 4 14 5 20 9 12 2 10 15 21

Series AP500

500 -35 400 -48 300 -61 200 -75 100 -88 0 -101 0 1 2 3 4 5 6 7 8 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Changeable range output 5 V (10 V) 20 mA At the time of shipment 1 V (0 V) 4 mA Grease-free 10% 100% 105% Display 0% Application example Analog Functions Adjustment point: 75 L/min , 100 L/min output pp. 27, 28 When 5 V output is required from the flow switch at 75 L/min, use a sensor that outputs 1 to 5 V at 1 to 100 L/min. 5 V Change Output operation Key-lock function Forced output function