MQQ

0.2 14 10 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke Bore size (mm) S CI Z H ZZ 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-22 22 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other dimensions, refer to basic style on page 10-5-20.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

Rubber seal 5 Port Solenoid Valve Series SYJ7000

] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to the page 91 for dimentions with connector cable. 55 Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 63 107.4 [111.8] B A With interface regulator 27 A B

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 12 17 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3

Vacuum Pad

( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3

Compact Cylinder

36 22 4 16 22 6.6 2.8 8 38 55 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

AN200 to 900 1 Model 0.5 A B D Dimensions (mm) Model Port size R Weight (g) Recommended flow (m3/min (ANR)) 3 or less 5 or less 8 or less 12 or less 20 or less 30 or less 50 or less 80 or less Effective area (mm2) 35 60 90 160 270 440 590 960 2 0.2 Inlet pressure (MPa) Noise level (dB) (A) 0.1 1 4 AN200-02 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Compact Hydraulic Cylinder

11 100 20 25 98 28 57.5 89 26 17.5 depth 13.5 77 11 Rc3/8 112.5 100 M20 x 2.5 156 6.5 26 12 107 24 30 117 29 67.5 95 26 17.5 depth 13.5 94 11 Rc3/8 132.5 Rod end male threads (mm) H C D L K X Bore size (mm) 20 M8 x 1.25 15.5 10 23 8 18 32 M14 x 1.5 27 16 38.5 14 30 40 M14 x 1.5 27 16 38.5 14 30 M18 x 1.5 50 32 20 46 18 35 M18 x 1.5 63 32 20 46 18 35 M22 x 1.5 37 25 51 22 80 40 M26 x 1.5

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

MQQ

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 12 3.3 3.3 17.5 27.5 22 8 106 117 6 70.5 5 12 3.3 3.3 19 28 24 8 101 112 10 65 5 18 5 6.6 24 30 30 10 114 128 16 74 8 T-bracket related dimensions Note) Applicable bore size (mm) Part no.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56 30 10 to 50,75,100 70.5 48.5 5.5 8 54 62 25, 30, 40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60 20 FZ 20 64 20 A + Stroke 4-FD 25 65 22 34 30 72 22 40 40 89 22 50 Rear

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Shock Absorbers and Rate Controls

,890 1.6 lRott l Ysxl 30 25.0 0.08-0.8 680 226,000 34,500 l l 5 r55 17J90 t 0 Otil | 7rx2 30 50.0 0.3.3_5 r.360 271,000 34,500 t6 6.660 4.5 LROtilllr/sx? 30 50.0 0.08.0.8 1.360 ?71,000 34.500 t6 r55 11,760 4.' | | 7rx4 30 100,0 0.3-3.5 2.710 362,000 34,500 10 r60 6.660 3 Otlll Vax6 30 150.0 0.3-3.5 4,070 42t.000 34,500 90 285 6.660 6.6 Al d mensions in m llimeters.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Parallel I/O Connector I/O 1 Wiring example NPN JXC73 PNP JXC83 24 VDC Load 24 VDC Load OUT0 10 OUT0 10 1 1 +COM1 +COM1 OUT1 30 OUT1 30 Load Load 21 21 +COM2 +COM2 OUT2 11 OUT2 11 Load Load 2 2 IN0 IN0 OUT3 31 OUT3 31 Load Load 22 22 IN1 IN1 OUT4 12 OUT4 12 Load Load 3 3 IN2 IN2 OUT5 32 OUT5 32 Load Load OUT6 13 OUT6 13 Load Load 23 23 IN3 IN3 OUT7 33 OUT7 33 Load Load 4 4 IN4 IN4 OUT8 14

High Power Cylinder:

22 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14 X 1.5 NE 33.5 37 43.5 52.5 K 5 5.5 5.5 7.5 NC 5.5 5.5 4.5 4.5 JD 30.5 25.5 28.5 23 NB 30 36.9 43.9 47.3 JC 43 39 36 32 NA 26 32 38 41 I 26 31 38 47 H 44 48 51 54.5 N 22 27 27 30 WH ZZ 252 257 265 277 5.8 to 8.8 6.8 to 11.3 4.10-9 Series RHC Construction u q !