Table of Contents Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.
L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.
Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.
22 22 27 27 33 39 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 50 80 M8 X 1.25 M10 X 1.5 M10 X 1.5 M12 X 1.75 M14 X 2.0 3.17-3 Compact Guide Cylinder Series MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order Compact guide cylinder M 25 30 Z73 MGP Number of auto switches Compact guide cylinder 2 1 S Bearing M L Slide Ball bushing Auto switch Without auto switch (Built-in
VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.
18 36 18.5 10 105 to 200 63 50 to 200 22 30 22 44 37.4 14 205 to 500 505 to 800 Material: Cast iron (Coating) * The A and CL measurements are when the unit is in the Z-phase first detecting position.
X 10 Y 12 1/4 KQ2H12-02GS 19 17.2 18.2 28.7 24 17 58.3 46.1 9 24.3 3/8 KQ2H12-03GS 19 17.2 18.2 25.9 20.8 17 58.3 46.1 9 25.2 1/2 KQ2H12-04GS 22 22 18.2 22.3 15.9 17 58.3 58.3 9 37.7 Applicable tubing O.D.: 4, 6 16 3/8 KQ2H16-03GS 24 22 23.6 33.1 28 20.6 81 67 11 42.4 1/2 KQ2H16-04GS 24 22 23.6 32.1 25.7 20.6 113 67 13 44.6 *1: D is the body diameter. *2: Reference dimensions after installation
10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.
1 0.2 35 25 22 Home position switch Cable length 200 Connector 1.5 [5.5] 25 (4) Refer to page 100 for connection cables.
Dimensions page 22 (Single unit) 16 17 Series VX21/22/23 For Air /Manifold (Inert gas, Non-leak, Medium vacuum) Solenoid Valve for Manifold/Valve Specifications N.C. N.O.
22 22 22 2-Rc(PT)1/4 31.5 18 18 31.5 (R1, R2 port) 63 63 [ ] for AC Other dimensions are the same as the grommet style
20.5 20 8 17 38 23.5 M14 x 1.5 32, 40 22 20.5 25 8 22 42.0 23.5 M14 x 1.5 Refer to the Web Catalog for details on the rod end nut and mounting bracket.
19.5 17 32 10 26 13 10 45 6 8 37.5 5.5 20 34.5 146 204 M26 X 1.5 32 M10 X 1.25 150 to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 159 217 M32 X 2 40 M14 X 1.5 200 to 1000 24 21 22 41 14 32 16 12.5 50 8 10 56 7 26.5 51 181 247 REC L/Axial foot G H F G Width across flats B2 2-Rc(PT)P K A lNA F AL 2-NN Relieving port M5 X 0.8 Standard port H1 H2 I Width across flats B1 Relieving
23 23 24 22 23 23 24 Note 2) 2 magnets for auto switches are equipped to the magnet mounting block.
CS2 Series CS2 125, 140 JISB4636 Dodecagon 22 Class2, M14 x 1.5 160 JISB4636 Dodecagon 24 Class2, M16 x 1.5 a.
19.5 17 32 10 26 13 10 45 6 8 37.5 5.5 20 34.5 1/8 146 204 32 M10 x 1.25 M26 x 1.5 Up to 1000 22 19.5 17 32 12 26 13 11 45 6 8 46.5 5.5 22 42.5 1/8 159 217 40 M14 x 1.5 M32 x 2 Up to 1000 24 21 22 41 14 32 16 12.5 50 8 10 56.2 7 26.5 51 1/4 181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C
L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.
82 30 64 18 15 M6 x 1.0 1/8 1/4 3/8 7 to 9 0.5 mm or less 32 98 34 78 22 18 M8 x 1.25 12 to 14 1 mm or less 40 M8 x 1.25 106 40 86 22 18 22 to 24 1 mm or less 50 M10 x 1.5 130 46 110 27 22 a Plug M10 x 1.5 63 142 58 124 27 22 M12 x 1.75 80 180 54 156 33 28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling
L Dimension n: Stations L n 2 135.5 125 93.5 24.5 3 135.5 125 104 19 4 148 137.5 114.5 20 5 160.5 150 125 21 6 173 162.5 135.5 22 7 185.5 175 146 23 8 198 187.5 156.5 24 9 198 187.5 167 19 10 210.5 200 177.5 20 11 223 212.5 188 21 12 235.5 225 198.5 22 13 248 237.5 209 23 14 260.5 250 219.5 24 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 L1 L2
18 22 14 16 20 22 25 30 35 43 29 33 40 49 60 74 56 64 28 32 38 45.5 54 63.5 79 96 99.5 120 8 10 12 14 16 18 18 22 Up to 200 Up to 300 Up to 300 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 With rod boot ZZ Bore (mm) Applicable pin part no.