11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting base side B D Q QL 11-/22-MXP16-30 Without magnet and switch rail 8 2-M2 x 0.4 depth 3 10.7 8.5 L 6-M5 x 0.8 depth 7 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 18 58 93 40 36 40 58 22 20 82 65 102 11-/22-MXP16-20 28 70 119 50 42 56 70 29 30 108 75 128 11-/22-MXP16-30 104 Precision air slide table MXP/MXPJ6
(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5
Dimensions [mm] Model L1 L2 A B C D E F G J LEPY10-25 138 150 20 22 30 29 20 29 39 LEPY10-50 163 175 24 43 34 50 24 50 60 LEPY10-75 198 210 30 72 40 79 30 79 89 LEPY10L-25 124 136 61.8 20 22 30 29 20 29 39 LEPY10L-50 149 161 24 43 34 50 24 50 60 LEPY10L-75 184 196 30 72 40 79 30 79 89 47.8 382 Step Motor (Servo/24 VDC) Electric Actuator/Miniature Slide Table Type LEPS Series Model Selection
TC Bore 10 16 TH TV TW TX TY 4.5 29 40 22 32 12 5.5 35 48 28 38 16 1.3-46 Built-in Speed Controller: Double Acting Double Rod Series CJ2ZW 10, 16 How to Order CJ1 Bore size 10mm 16mm 10 16 CJP CJ2 Mounting Standard stroke (mm) CM2 Basic Axial foot Front flange B L F 10 16 15, 30, 45, 60 15, 30, 45, 60 C85 CG1 Standard CJ2ZW L 16 45 MB C95 CDJ2ZW L 16 C73 With auto switch 45 CA1 Number of
1.4 0 Stroke length tolerance 378 121 159 197 235 30 46 83 IN 25 12 15 Cushion Rubber bumper 650 218 283 348 413 42 88 153 IN 32 14 24 Thread tolerance JIS Class 2 1056 366 472 578 683 56 155 261 IN 40 16 30 Equivalent tube I.D.
CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.
Applicable shaft type: X MSU CRJ Short shaft side X = Y = X = Y = Short shaft side Short shaft side CRA1 CRQ2 Long shaft side MSQ Long shaft side Long shaft side Y = Size 20, 30, 40 Size 10, 15 MSZ (mm) CRQ2X MSQX CRQ2X MSQX Y 1 to 17 1 to 19 1 to 28.5 1 to 30 1 to 34 X 3 to 10 3 to 11 3.5 to 16.5 4 to 20 4 to 22 (mm) Size 10 15 20 30 40 Y 1 to 19.5 1 to 22 1 to 25 Size 20 30 40 MRQ D327
Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating 5.0 100 Peak voltage value No-load voltage (V peak) 0 to 20 [V] Over 20 [V] to 30 [V] 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply
30 29.5 27 25.5 27 28.5 27 24 30.5 29.5 22.5 (30.5) 21.5 (29.5) 20.5 (28.5) 17.5 (25.5) 16 (24) 22 (30) 19 (27) 32 33.5 33.5 33 30.5 26.5 28 29.5 28 25 31.5 30.5 24.5 (33.5) 23.5 (32.5) 22.5 (31.5) 19.5 (28.5) 18 (27) 24.5 (33.5) 21 (30) 40 38 38 37.5 35 31.5 33 34.5 33 30 36.5 35.5 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 29 (41) 24.5 (36.5) 23 (35) 26 (38) 50 43.5 43.5 43 40.5 38.5 40 41.5
Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y A Connection thread 10 83 49 23 Width across flats 12 20 121 59 51 30 131 69 40 167 79 77 50 177 89 10 13 38 22 D C B 2.5 6 M10 x 1 14 3 10 83.5 49.5 23 20 121.5 59.5 51 30 131.5 69.5 40 167.5 79.5 77 50 177.5 89.5 Width across flats 7 16 38.5 22.5 N4 N6 U4 U6 A10 10 87 53 23 20 125 63 51 30 135 73 40 171 83 77 50 181 93 E2
the piping: Circulating fluid temperature: 30 This product Users equipment Serial communication Fluid discharge temperature: 30 Heat dissipation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 When only the "set circulating fluid temperature" needs to be the same as the circulating temperature supplied to the user's equipment: Use "MODE 1" of the
(L) W E L d 11 30 11 11.8 (1) ACPWM 30cm 10{IglIgnIgaK(Ig2Igm)}[mA](11.1) K NV M NV-SP NV-SW NV-CP NV-CW NV-HW 1 Ig1 Iga Ig2 Igm Ign BV-C1 NFB 3 NV-L Igl (11.3) Ig2 (11.3) Ign (FR-BIF-(H) ()4.4mA) Iga(11.6) Igm (11.5) 120 120 100 100 80 80 60 60 40 40 [mA] [mA] [mA] [mA] 20 20 0 2 0 2 100 5.5 14 38 14 100 5.5 38 8 3.5 22 60 150 8 3.5 22 60 150 30 80 30 80 2] [mm 2] [mm [mm2] [mm2]
M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ
Applicable manifold model DXT154-34-1A VV5F1-31 AN120-M5 VV5F1-31 AN110-01 VV5F1-30 DXT144-13-2A VV5F1-30/31 Description Throttle valve VV5F1-30 VFS Silencer VS4 Blanking plate assembly VQ7 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no. (Example) VV5F1-30-051 1 pc.
, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50,7 5, 100, 125, 150 *90and 91-series MXQ6 products do not have shock absorbers.
Limit switch 10 20 30 None B contact specification 2 pcs.
106.3 74 20 7 4 60 34 75 40.5 151 142 97.5 25 7 4 60 40 75 44.5 160 151 102.5 Single clevis style: MQMLC (20 and 25 only) 20, 25 (Non-integrated type) +0.058 0 9 hole H10 CI 0.1 0.2 14 10 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke Bore size (mm) S CI Z H ZZ 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-22 22 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other
0.2 14 10 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke Bore size (mm) S CI Z H ZZ 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-22 22 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other dimensions, refer to basic style on page 10-5-20.
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8
] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to the page 91 for dimentions with connector cable. 55 Series SYJ7000 2 Position Double [ ]: AC G H 01 02 Grommet (G), (H): SYJ724022 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 63 107.4 [111.8] B A With interface regulator 27 A B