Environment

22 2.6 2.6 2.6 9.3 9.3 4 4 6 Most sensitive position 6 Most sensitive position 507 A

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

VQC

The total number of solenoids (points) must not exceed 24. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 COM 13 VQC1000/2000 Base-Mounted Type Plug-in Unit (L3) (L4) VV5QC11 L2 51 L1 Indicator light 28 P = 10.5 65 (12) 13 1.5 1.5 Manual override (5.5) 93.5 Approx. 2 (35) 75 66 37.5 Mounting hole for 4-M4 Manual release for switching connector direction Applicable connector

MK

Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40

XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

ZX

VJ100M1.7 x 15 VJ300M1.7 x 22 Note) In the case of ZX1VJ114, M, MN and MO cannot be used. 13-2-7 7 Series ZX Ejector Unit Specifications 1 2 ZX1-W07 1 2 ZX1-W10 1 2 Unit no. ZX1-W05 0.5 5 13 Nozzle dia.

Compact Hydraulic Cylinder Series CH
KGB

(M) 50 (M) 100 x 125l CHKGB32 M6 x 65l 125 45 (M) 5 (M) 65 x 130l x 70l 130 50 (M) 10 (M) 70 x 155l x 75l 155 75 (M) 15 (M) 75 x 180l x 80l 180 100 (M) 20 (M) 80 M14 x 100l x 85l CHKGB80 100 5 (M) 25 (M) 85 x 105l x 90l 105 10 (M) 30 (M) 90 10.5 x 110l x 95l 110 15 (M) 35 (M) 95 x 115l x 100l 115 20 (M) 40 (M) 100 x 120l x 105l 120 25 (M) 45 (M) 105 x 125l x 110l 125 30 (M) 50 (M) 110 22

CQM

-30 -35 -40 -45 -50 -75 -100 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 30 35 40 45 50 55 60 65 70 75 30 35 40 45 50 55 60 65 70 75 110 135 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65

Round Type Hydraulic Cylinder

5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Compact Guide Cylinder

Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.

CE

, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

1.63

C 0.2 B 0.2 0.1 A 0.2 0.05 100 1000 D (mm) MGPWM MGPWL/A Hexagon socket head cap screw 126 146 176 192 240 266 Maximum speed (mm/s) Bore size (mm) A (mm) B (mm) C (mm) 20 25 32 40 50 63 24 30 34 40 46 58 108 128 156 172 220 248 12 14 18 18 22 22 12 15 18 18 22 22 M5 x 0.8 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Other Caution Do not use this cylinder as a stopper. 518

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

High Purity Fluoropolymer

Model L M N W H E W 4 6 19 LQ2U22 LQ2U21 19.9 55 18 16 1/4 (M) 10 LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 6 8 26.2 22 24 24 H 77 64 (E) (E) 12 19 10 12 L 33.1 21 28 30 30 Class 2, 3 88 75 40 26 32 36 36 86 (M) N Inch sizes Applicable tubing O.D.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(4 port) 22 (2 port) 22 (4 port) 22 (2 port) 2 12 14 4 14 4 2 12 50 80 95 SMC SMC A B SMC 50 80 SMC B A 95 Manual override 5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5 137 150.5 137 PE port PE port PE port PE port 65 39 EA EB P 27 65 39 EA EB 27 P 1/2, 3/4, 1 1 port 3/4-

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.017 15 0 0.043 0 0.052 75 14.9 28 27 25 30 30 20 M8 x 1.25 depth 12 1/4 R8 95 90 3 13 16 5 70 48 94 63 7.5 9 110 23.5 53.5 19 15 0 0.043 0 0.052 88 0.006 0.017 17 16.9 30 29 30 32 35.5 24 M10 x 1.5 depth 13 0.007 0.020 25 1/4 R11 0 0.052 0 0.062 125 103 4 19 22 5 80 60 120 78 7.5 11 140 30 65 28 11.5 108 24.9 45 38 38 For single vane: Above illustrations show actuators for 180 when

Table of Contents

0.017 15 0 0.043 0 0.052 75 14.9 28 27 25 30 30 20 M8 x 1.25 depth 12 1/4 R8 95 90 3 13 16 5 70 48 94 63 7.5 9 110 23.5 53.5 19 15 0 0.043 0 0.052 88 0.006 0.017 17 16.9 30 29 30 32 35.5 24 M10 x 1.5 depth 13 0.007 0.020 25 1/4 R11 0 0.052 0 0.062 125 103 4 19 22 5 80 60 120 78 7.5 11 140 30 65 28 11.5 108 24.9 45 38 38 For single vane: Above illustrations show actuators for 180 when

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.017 15 0 0.043 0 0.052 75 14.9 28 27 25 30 30 20 M8 x 1.25 depth 12 1/4 R8 95 90 3 13 16 5 70 48 94 63 7.5 9 110 23.5 53.5 19 15 0 0.043 0 0.052 88 0.006 0.017 17 16.9 30 29 30 32 35.5 24 M10 x 1.5 depth 13 0.007 0.020 25 1/4 R11 0 0.052 0 0.062 125 103 4 19 22 5 80 60 120 78 7.5 11 140 30 65 28 11.5 108 24.9 45 38 38 For single vane: Above illustrations show actuators for 180 when

CE

, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

CE

, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 For rod nut and accessory bracket, refer to page 10-12-20.