CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators GC GA NN MM Piping port 3 x M5 x 0.8 9 CA F A T NB 0 80.3 0 BA0.3 Z + Stroke S + Stroke NA H 10, 16 NDh8 Mounting nut Y Section Y detail GB GC GA Relief port M5 x 0.8 Rod end nut NN Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 CA CB MM D BA 0 0.3 BB 0 0.3 BA 0 0.3 BB 0 0.3 Head cover port location Axial (R) Z + Stroke S + Stroke NB H NA F

REC

CEP1 CE1 Head side trunnion style: RECT CE2 Width across flats B2 H2 TDe9 0.025 0.061 ML2B 2-NN 2-RcP Width across flats B1 G G Standard port Plugged (M5 x 0.8) Standard port H1 C J G5-S I CV 2-Eh8 TY D MVGQ MM AL NA TT CC K A TX TZ N N F S + Stroke H RB 40 Z + Stroke ZZ + Stroke J D(mm) 32 -X H1 H2 I K MM A AL B1 D F G H B2 E Bore (mm) Stroke range 0 0.033 0 0.033 0 0.033 0 0.039 20 M8 x

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5 H9 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 5.5 38 23 15.5 10.5 40 4.5 33h9 34 h9 17H9 5 6 H9 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 5.5 45 30 18.4 12.2 50 5 39h9 40 h9 20H9 6 7 H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3

JA/JAH/JB/JS

How to Order J S 32 10-125 Stainless steel type Dust cover material Series JS Symbol Nil S Material Fluoro rubber Silicon rubber Applicable bore size (mm) Precautions Be sure to read before handling. Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions.

JA/JAH/JB/JS

How to Order J S 32 10-125 Stainless steel type Dust cover material Series JS Symbol Nil S Material Fluoro rubber Silicon rubber Applicable bore size (mm) Precautions Be sure to read before handling. Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions.

LEC-OM02904

(b) 1) Vb[V] 2) (Ib) Ib = Vb R [A] 3) (E) L lb2 E = 2 [J] 4) (Vi) (Ib)(Vi)(E) (Vi)[V](Vs)[V]Vi ViVs 5) () () = E Vi lb [S] 6) ()N (Ip) (Ip)(Ib) Ip/IbN[] (4) 13 3 13. 13.1.2 ( ) () LE--B S5 S6 S7 S8 50W 100W 200W 400W (1) () (4) DC 24 V 0 -10% [W] at 20 6.3 7.9 (6) [] 91.0 73.0 (6) [H] 0.15 0.18 [N m] 0.32 1.3 (2) [s] 0.03 0.03 (2) [s] 0.01 0.02 1 [J] 5.6 22 [J] 56 220 (5

Rotary Table/

34 18.5 12.6 9.2 35 4.5 29h9 29.5h9 14H9 3.8 5.3 2.5 4.2 10 3.3 6 3.5 M4 x 0.7 2.2 5.3 M4 x 0.7 4 34h9 6H9 5.5 38 23 15.5 10.5 40 4.5 33h9 17H9 5 5.3 2.5 4.2 10 4.2 7.5 4.5 M5 x 0.8 2.5 6 M4 x 0.7 4 40h9 7H9 5.5 45 30 18.4 12.2 50 5 39h9 20H9 6 6.5 2.5 4.5 11.5 4.2 7.5 4.5 M5 x 0.8 2.5 6 M5 x 0.8 5 (mm) JJ JK JU P Q S SD SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 1 2 3 7 M3 x 0.5

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

K M E CEP1 S J L B + Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

High Vacuum Angle Valve

seal material) Surface treatment External: Hard anodized Internal: Raw material Pilot pressure [MPa(G)] 0.4 to 0.7 Pilot port size XLA M5 Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

IDG

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 female thread (A) IDG30M/50M IDG30HM/50HM IDG30LM/50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female thread HA AT With float type auto-drain With drain guide Drain Discharge ID AMG (P) (N) AFF N.C.: Gray N.O.: Black Thread size: 1/4 (Without valve mechanism) Applicable tubing O.D

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

fitting for 4 Elbow bottom ported With One-touch fitting for 6 M5 threads Elbow with mixed port sizes Nil None Back pressure check valve on all stations Note 2) C3 C4 C6 M5 CM B D D G1 G2 G3 J K N R S With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) Regulator unit with 1 unit Note 4) U side n Regulator unit with 2 units Note 4) L3 8 7 6 5 4 3 2 1 Regulator

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

Shock Absorbers and Rate Controls

Propellinq Iorie (NI 0plindl Yelo.ity Rdnqe (n/s;.) Eore J|le (nrn) ts) Sirol (nn) ttlodel W.iqhl ll!-l klerded (Nl (rn?