3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ235 Rubber 12.6 (0.7) 15 or less 20 or less 53 VQZ200 VQZ225 Metal 10.0 (0.55) 14 or less 18 or less N.O. VQZ245 Rubber 12.6 (0.7) 15 or less 20 or less VQZ315 Metal 16.2 (0.9) 17 or less 22 or less N.C. VQZ335 Rubber 21.6 (1.2) 25 or less 33 or less VQZ300 77 VQZ325 Metal 15.3 (0.85) 17 or less 22 or less N.O.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 2 13 16 49 16 18 32 35 ZPT 40/50 F-B5-A14 (Without Buffer/Male Thread) M14 x 1 Width across flats 19 M5 x 0.8 5 5 20 D 5 F Width across flats 21 C Y 2.5 A B Dimensions A (mm) B C D F Y Model ZPT40F-B5-A14 40 43 12.5 18.5 51.5 5 ZPT50F-B5-A14 50 53

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model N L L E J M H W ( T ) 3 TI/ TIL 12 10 19 12 25 19 LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 60 53 34 28 33.1 12 30 21 PA 65.2 58 SMC (W) (M) N J SMC 58 41 40 14 32 36 26 PAX 63.2 3/4 19 69 51 81.5 49 14 39.5 36 H (E) (T) PB JIS 10K flange Class 4, 5 Inch sizes Applicable tubing O.D.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure. 3 8 (10A) 6 1.1 26 8 1.6 38 10 0.5 2.2 53 1 2 (15A) 10 2.2 53 Note) Weight of grommet type. Add 60 g for conduit terminal type.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Pg.7 53<56.5> 3.5 to 7 VFS 142.5 MAX.10 71.5 VS Indicator light Cover diameter 1.5 Cross section 0.23mm2 VS7 < >: AC 82.5 75 0 1 01 02 M plug connector (M): VQZ225 (R)lMl 57 Indicator light Cover diameter 1.5 Cross section 0.23mm2 (Lead wire) 300 122.5<124.5> 61.5<62.5> 73.5 147 58.5<63.5> < >: AC 1.12-41 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ2000 3 position closed center/exhaust

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rubber 12.6 (0.7) VQZ235 20 or less 15 or less 53 VQZ200 Metal 10.0 (0.55) VQZ225 18 or less 14 or less N.O. Rubber 12.6 (0.7) VQZ245 20 or less 15 or less Metal 16.2 (0.9) VQZ315 22 or less 17 or less N.C. Rubber 21.6 (1.2) VQZ335 33 or less 25 or less 77 VQZ300 Metal 15.3 (0.85) VQZ325 22 or less 17 or less N.O.

Ejector Valve Unit Series ZYY/ZYX 1

Note 1) Note 2) Nil 1 None With silencer Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 0.7 mm 1.0 mm 07 10 13-8-4 5 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 Lead wire/ Voltage suppressor specifications Plug-in type Serial transmission type LOZ

ISO Cylinder

Made to order For details, refer to page 53. Head cover type F Boss-cut/Basic Y Head cover axial port Auto switch Nil Without auto switch * For applicable auto switches, refer to the table below. * Auto switches are shipped together with the product. Bore size 8 8 mm 10 10 mm 12 12 mm 16 16 mm 20 20 mm 25 25 mm Cylinder stroke [mm] Refer to the next page for standard strokes.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53

Rotary Actuator/Vane Type

bumper With auto switch (WJ shaft) Variations With angle adjuster (WJ shaft) With auto switch and angle adjuster (WJ shaft) Option Mounting With flange F Pattern Shaft pattern Made to Order Rotating angle pattern The CRB series only 50 C O N T E N T S Rotary Actuator/Vane Type CRB2 Series CRB2 CRB2 CRB1 V Rotary Actuator/Vane Type CRB2 Series MSU How to Order Page 52 CRJ Specifications Page 53

High Power Cylinder:

GA H2 NN NN GB H1 MM I ND D NB NE C Effective Thread E E NF N JC 10 10 N JD A K F NA S+Stroke F H B WH ZZ+Stroke (mm) Stroke range (mm) 200 to 700 200 to 700 200 to 1000 200 to 1000 Bore (mm) 20 25 32 40 Eff. thread length 15.5 19.5 19.5 21 H1 5 6 6 8 H 44 48 51 54.5 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5 61.5 B 32 36 44 53

LJ1H

Refer to page 100 for part numbers. 53 54 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 G NA 1 F W X10 Cable entry direction Top entry Cable entry direction Power supply voltage Motor specification Matsushita Electric Industrial Co., Ltd.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8, 5/16" (Station 1) (Station n) (External pilot type) (56.5) 59.5 P 1 P 1 B 45.5 2 2 B 2 B 2 B 2 B (43) 24.6 E E 23 A 4 A 4 A 4 A 4 A 4 10 8.6 11.8 (For DIN rail mounting) 7.5 18.3 (Pitch) P = 10.5 One-touch fitting [4(A), 2(B) port] 13.5 18.3 Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" L2 = L1 10.5 L3 = 10.5 x n1 + 53

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50 33.8 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 3/4 3 33.8 1/8 30.4 75 8 93.2 44 35.8 70.8 M42 x 1.5 50 33.8 54 55.5 8.5 10.5 70 2.3 37 42.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 5 (External pilot port) M5 x 0.8 (Rail mounting hole pitch: 12.5) L4 L3 L5 Manual override 15 13.5 13.5 Tightening torque: 0.55 to 0.65 Nm DIN rail holding screw DIN rail 13.8 (DIN: 53) (DIN: 69.5) (DIN: 53) 68.2 51.7 X PE PE X 56.3 73.9 [76.1] 164.3 [168.7] (Lead wire length

With Factory Installed

D.8 AR3001 1/4 3/8 53 127.5 35 53 29.5 41 2.3 40 46 6.5 8 53 52.5 36

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

HRX-OM-R016

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure

HRX-OM-O021

5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [