Rotary Actuator/Vane Type

CRA1 P P h L1 b CRQ2 b (h9) h (h9) L1 A port B port A port B port 4 0 0.030 4 0 0.030 20 MSQ A A MSZ F F A parallel key is used instead of single flat for size 40. E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

Cylinder with Lock

Mounting Symbol Description Single rod Double rod B Basic v v L Axial foot v v F Rod flange v v G Head flange v v C Single clevis v D Double clevis v T Center trunnion v v Pivot bracket Number of auto switches Nil No bracket N Pivot bracket Cylinder stroke [mm] Refer to page 26 for standard strokes.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" 1/4, 3/8 [4(A), 2(B) port] One-touch fitting One-touch fitting (PE: Pilot EXH port) One-touch fitting (X: External pilot port) Applicable tubing O.D.: 6, 1/4" [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" : 10, 3/8" : 12 Applicable tubing

CJ2

Applicable bore (mm) B C d H NTJ-010A NTJ-015A 10 16 7 8 8.1 9.2 M4 x 0.7 M5 x 0.8 3.2 4 Bore size (mm) 10 16 LD KA H GB GA C L NB NA MM B A LB Z S Y X LX LH 4.2 20 5 16 14 3.5, 6.5 counterbore depth 4 23 9.5 20.5 M4 x 0.7 12 15 16 74 54 8 28 12 8 5.2 20 5 16 20 4.5, 8 counterbore depth 5 26 9.5 20.5 M5 x 0.8 18.3 15 20 75 55 8 28 16 10 6-3-71 72 72 Air Cylinder: Direct Mount, Non-rotating

LEC-OM07605CN

PC09] CCW CCW 00 01 8 [V] 8 [V] 0 0 -8 [V] -8 [V] CW CW CW CCW 8 [V] 8 [V] 02 03 CW CCW 0 0 CCW CCW 04 05 8 [V] 8 [V] () 0 0 () -8 [V] -8 [V] CW CW CCW CCW 06 (1356) (10V/100pulses) 07 (1356) (10V/1000pulses) 10 [V] 10 [V] 100 [pulse] 1000 [pulse] 0 0 100 [pulse] 1000 [pulse] -10 [V] -10 [V] CW CW CCW CCW 08 (1356) (10V/10pulses) 09 (1356) (10V/10pulses

Table of Contents

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

, 135 +8 0 +8 0 +6 0 +4 0 +4 0 80 80 180 , 225 B port A port B port A port CRBU2 100 100 Start of rotation is the position of the key when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

B port D B C G1 U G2 U If B port of Body (B) is machined, the port is plugged with Rc 1/8.

ZP

A6) M3 x 0.5 v (uConnection thread: A5/A6) Female thread Nil v (uConnection thread: A8) B5 M5 x 0.8 v v B6 M6 x 1 v v v B8 M8 x 1.25 v v B01 Rc1/8 v v v N01 NPT1/8 v v v T01 NPTF1/8 v v v M5 x 0.8 v (uConnection thread: A8) 04 4 vV vV 06 6 vV vV vV 08 8 V vV Female thread One-touch fitting N4 For 4 nylon tubing1 N6 For 6 nylon tubing1 v v v U4 For 4 soft tubing2 U6 For 6 soft tubing2

MY1

CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35 43 53 61 70 87 113 136 170 206 21 26 38 3.6 4.9 6.4 3.4 3.4 4.5 6.5 6.5 8 1.8 3 4 20Data A B MY-S25 50 8 5.5 35 M6 x 1 9.5 5 A B MY-S32 64

Rotary Actuator

V V V V V V Single shaft with four chamfers X V V V V V V V V V Double shaft with key Y V V V V V V V V V Shaft type Standard Double shaft with four chamfers Z V V V V V V V V V Single round shaft T V V V V V V V V V Double shaft (round shaft, with four chamfers) J V V V V V V V V V Double round shaft K V V V V V V V V V Cushion None V V V V V V V V V Air cushion V V V V V With auto switch

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

NCQ8

") 2 NCDQ8A(B)-100T(M) NCDQ8A(B)-200T(M) 1 0.37 (3/8") 0.25 (1/4") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 0.37 (3/8") 0.37 (3/8") 0.37 (3/8") 0.25 (1/4") 0.87 (7/8") 2 47 Series NCQ8 Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch D-A9 (V) Solid state switch D-M9 (V) D-F9 W(V) B A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5 8.5 11.5 10.5 19 18

Vacuum Unit

C E J K P Nil Without option V V V V B With DIN rail mounting bracket3 V V V V Example ZK2Q00R5NC1A-06 ZK2Q00R5NC1A-08 D With common release pressure supply (PD) port V V V V 4 ZZK204A-P2P-B 2 When more than one option is selected, list the option symbols in alphabetical order. (Example -BD) 3 The DIN rail should be ordered separately.

Free Mount Cylinder

Weight Unit: g Caution Auto switch model D-M9N(V) D-M9B(V) D-M9P(V) Operating Precautions 8 7 8 0.5 Lead wire length (m) Fix the switch with the existing screw installed on the switch body.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.