Body Size: 20, Thread: Rc, Port Size: 01 (1/8), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 20, Thread: F (G), Port Size: 01 (1/8), Option: B (Bracket), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 01 (1/8), Option: B (Bracket), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: F (G), Port Size: 02 (1/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Option: B (Bracket), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

m with a 99.9% filtered particle size. Body size 30 and 40 now have a transparent bowl guard that offers 360 visibility, while completely protecting the bowl from the environment.? The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements. AFM MASS PRO. AFM 1/8INCH MODULAR (PT).

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Table of Contents

(VX31, 32, 33) 20 Model Minimum AC/DC Ambient temperature (C ) 40 10 Operating fluid temperature (C ) Temperature conditions Power source Sketch Air Vacuum 60 10 40 AC/DC Maximum AC/DC 20 Minimum Position ON X X P A P A X OFF X X A R (VP) A R X ON X X A R (VP) X A R OFF X X P A X P A ON Pq A A Pq Pq A Pq A A Pq OFF Pw A A Pw Pw A A Pw Pw A Note 1) An exclusive type set with

Smooth Cylinder/Low Speed Cylinder

A B A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

5

Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,

Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 ZCDUKC Male Cap porting zPf (v&uum pad !

Vacuum

-Pad ;;rol2 25 40 Flat type I a o o o a o a o o a o o Flat with rblo o a o o a a o eep tvpe lo a o a Bellows | a a a a a a o a a a 132 I ZCDUKC Male Cap porting zPf (v&uum pad !

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

Air Fittings & Tubing

(mm) A Part No.

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

Table of Contents

L4 L4 L5 A L5 D3 D3 T T D2 L1 D2 L1 L2 L2 AS ASP Metric Size ASN A M1 L5 Max.

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

CJ2

B B A B A A B B A 1 (0) 1 (7.5) 2 (0.5) 2 (8.5) 6 CJ1 10 16 1.5 2 1.5 2 2.5 3 2.5 3 3 3.5 3 3.5 3.5 4 3.5 4 0.5 1 0.5 1 CJP Figures in parentheses for bore 6 are in the case of double rod type, (Series CJ2W).