(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D
1 10.71 12.20 13.70 15.19 16.69 1a.la 19,69 21.18 22.68 24,17 25.67 5 6 I 9 1 0 ExMol.: NVS 4llan509o (Siinglo $lnoid/$rlng rbm vals mounr< oi a meilord block) 1 2 't4 I . r I : l 1 6 TERMINAICLIP. A Bst: Axt 3!
plating 14 O-ring FKM Fluoro coating 15 O-ring FKM Fluoro coating 18 PF2M7(-L) Series Dimensions PF2M7m-C4/C6/C8/N7(-L) A 48 A 48 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 28 [mm] 28 Model A
Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70
A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 )
When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.
Special tools are necessary for disassembly. 6. Apply additional tightening when remounting the head cover after disassembly. When disassembling, hold the wrench flat section of one head cover with a vice, and remove the other cover using a spanner or adjustable angle wrench on its wrench flat section.
to 30 psig (0.007 to 0.2 MPa) Delivery pressure Bonnet Standard Panel installation 6) Short type 7) Code FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8 02 No code P SC Sub-atmospheric(A):100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 06 10 15 6) Panel mounting hole: 1.56 inch (39.6 mm). 7) Bonnet port
Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations
0.3 High flow rate nozzle High flow rate nozzle 0.2 O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.1 0 0 120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal)
A B B A B A B A B A B A A B B 20 25 32 40 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 11 9.5 7 5.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 10 10 6 6 2 1 7 5 4 1.5 0.5 7 6 3.5 2.5 8 11.5 10.5 7.5 6.5 7 6 12 10 9 6.5 5.5 12 11 8.5 7.5 13 17.5 15.5 13.5 11.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.
B A B A B A B A B HS HS HS CP95 20 9 3 6 8 4.5 24.5 27 27.5 20.5 15.5 17.5 19.5 16 25 9 3 6 8 4.5 27 29.5 30 20.5 15.5 17.5 19.5 16 NCM 32 10 4 7 9 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 17 40 14.5 8.5 11.5 13.5 10 35 37.5 38 23.5 19 20.5 22.5 19 NCA 50 17 11 14 16 12.5 40.5 43 43.5 28.5 22.5 25.5 27.5 24 63 17 11 14 16 12.5 47.5 50 50.5 28.5 22.5 25.5 27.5 24 DOperating Range -X Auto switch
Model JIS Symbol 2 position Port size Rc Number of positions Piping direction Model Effective area (mm2) Weight (kg) Series Body mounted Panel mounted (A) 2 (B) 4 VH210-02 VH200-02 3 (Closed center) 4 0.42 VH2 1 (P) 3 (R) VH211-02 VH201-02 3 (Exhaust center) 7.5 1/4 2 VH212-02 VH202-02 2 (Position) 3 1 Closed center VH300-02/03 VH310-02/03 3 (Closed center) (A) 2 (B) 4 4 3 VH301-02/03 VH311
BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50
) 2 position/Double : VQ7-6-FG-D-SC Double (reverse pressure): VQ7-6-YZ-D-SC 3 position/Closed center : VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired
A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.
-10AS G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.
Applicable model Accessory AR10 AR20 AR25 AR30 AR40 AR40-06 AR50 AR60 AR10P-270AS AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS Bracket assembly Note 1) AR50P-270AS Note 5) AR50P-270AS Note 5) Note 6) Note 6) AR10P-260S AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Set nut G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 Round 1MPa Note
-02-32B Push button (Extended) VM-32AG Green VM220-02-32G VM-32AY Yellow VM220-02-32Y With a set of red, black, green, yellow Push button (Flush) VM-33A VM220-02-33 VM230-02-33 VM-34AR Red VM220-02-34R VM230-02-34R VM230-02-34B VM230-02-34G VM230-02-34Y Twist Selector (2 position) VM-34AB Black VM220-02-34B VM-34AG Green VM220-02-34G VM-34AY Yellow VM220-02-34Y VM-36A VM220-02-36 VM230-02
Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.