Hydraulic

MA a A MA a Air release R (max.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

None S F 03 N 2 GS D B A E3 04 F 3 DN JSXD31 3 Cannot be used in combination with body material symbol A 4 WN 5 6 7 8 B J Series/ Valve type Body material Seal material Port size Thread type Rated voltage Electrical entry Oil-free option Bracket option JSXD41 C N 03 R 1 G None None S F 04 N 2 GS D B E F 3 DN 4 WN 5 6 7 8 B J JSXD41 Series/ Valve type Body material Seal material Port

E-P HYREG ® Series VY1 1

20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(A) 2 (A) 2 2(A) 2(A) 3(R) (P)1 3(R) (P)1 i i 3 (R) 1 (P) 3 (R) 1 (P) u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Description Note White White White Note Part no.

JXCx-OMT0061CN

A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 )

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Flow Rate and Sonic Conductance Model AS1002FS AS2002FSAS2052FS AS3002FS AS4002FS Metric size 3.2 4 6 4 6 6 8 6 8 10 12 10 12 Tubing O.D.

Booster Regulator/Air Tank

VBA22A-03 IR-A IR IRV 3/8" VEX SRH SRP VBA42A-04 VBA43A-04 (0.2 to 1.6 MPa) VBA40A-04 SRF ITV 1/2" IC ITVH ITVX Air Tank VBAT Series PVQ P.1022 VY1 Perfect fit with a booster regulator VBA VBAT VBA VBAT This is an air tank to which a booster regulator can be connected compactly.

Clean Gas Filter

Model A TSJ 1/4 TSJ 3/8 AMF SFC102-02 SFC102-03 ZFC SF SF SFC105-02: URJ 1/4 (Union Ring Joint) SFC105-03: URJ 3/8 (Union Ring Joint) SFD 2 x A LLB AD IN 76 B GD C Width across flats 127 Model A URJ 1/4 URJ 3/8 B 22 26.5 C 19 22 SFC105-02 SFC105-03 311 SF Series Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

IR1000/2000/3000

Pages increased from 6 to 16. August, 1998 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

3 Port Air Operated Valve Series SYJA300

suppressor) + + + + 67 [74] 51.6 V100 35 SY SYJ VK VZ 27 8 A A VT 24 (Pitch) P=19 1/8 (A port) VP 21 VG VP S070 VQ VKF VQZ VZ VS VFN 4-4-49 Series SYJ700 Type 21R Manifold: Top Ported (External Pilot Type)/SS3YJ7-21RStations (-00) [ ] for AC Grommet (G) M5 x 0.8 (X port) 63.5 L2 L1 30.5 21.5 6 1.5 14 22.5 9.5 6 21.5 49 (DIN 50.3) 26 X P A A A A 43 71.2 [73.4] 2-5.5 (For mounting) R 1/4

Compact Cylinder with Air Cushion and Lock Series RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No. 10 12 6.5 6.5 42 50 6 8 16 20 6.8 9 18 20 YA-03 YA-05 YA 03 Bore size (mm) 32, 40 50, 63 Applicable air cylinder bore W V U Weight (g) Part No. 03 05 32, 40 50, 63 56 67 55 100 18 22 6 8 YA-03 YA-05 Mounting bracket A type mounting bracket B type mounting bracket Joint YA YB YU B type mounting bracket Applicable mounting bracket Bore size

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

03 Lead wire marking No.1 (+), No.2 () 0.75 mm2 L 217.6 (Lead wire length) Max.10 12 ATEX Compliant Body Ported Type Series 52-SY9000 Dimensions 3-position closed centre/exhaust centre/pressure centre L plug connector (L) 123 52-SY9420-L02 03 3 6.5 Insulation Black () 5 B 2 A 4 18.4 Manual override Insulation Red (+) 33.6 3 x 3.2 (Mounting holes for manifold) 64.2 2 x 1/4", 3/8" {4 (A),

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60 14 19 R 3/8 46.5 51.5 51.7 56.7 23 19.8 AS32 1FE-03-10SK 21 43.3 31.8 10 18.5 62 AS-FG AS32 1FE-03-12SK 22 44.3 32.8 12 20.9 64 AS42 1FE-04-10SK 21 47.9 33.6 10 18.5 103

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Series PF2W Digital Flow Switch For Water

8 4 3 2 1 View A 1 2 3 4 Panel fitting dimensions 5 6 7 8 43 or more Static Electricity Elimination Equipment Reduced-wiring Fieldbus System 36 +0.5 0 8 7 6 5 36 +0.5 0 A Note) Alphabetical Index Length Measuring/ Counter R3.5 or less Note) Decide the length of A taking into account the size of terminal you use.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

SYJ300/500/700

/SS3YJ7-21RStations (-00) [ ] for AC Grommet (G) M5 x 0.8 (X port) 63.5 L2 L1 30.5 21.5 6 1.5 14 22.5 9.5 6 21.5 49 (DIN 50.3) 26 X P A A A A 43 71.2 [73.4] 2-5.5 (For mounting) R 1/4 (P, R port) 1/8 (A port) (Pitch) P=19 21 Manual override Approx. 300 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Valves: VQZ200/300 VQZ 2 1 5 5 M Series 2 3 VQZ200 Body width 15 mm VQZ300 Body width 18 mm Port size {2(A) port} VQZ200 VQZ300 Symbol Port size V100 Nil Without sub-plate Rc 1/8 Rc 1/4 Rc 3/8 01 02 03 SY Type of actuation SYJ (A) 2 N.C.