CJ5-S

MM L RR1 RR1 E1 E1 A L1 U1 A1 NX A1 L1 U1 NZ NX A Part no. Applicable bore size (mm) E1 Part no. Applicable bore size (mm) E1 Applicable pin no.

CJ5-S

MM L RR1 RR1 E1 E1 A L1 U1 A1 NX A1 L1 U1 NZ NX A Part no. Applicable bore size (mm) E1 Part no. Applicable bore size (mm) E1 Applicable pin no.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

92 89 56 70 FF 38 24.5 F 6H9( ) depth 6 +0.030 0 31 6 x M6 x 1 thread depth 10 N 1 x F 2 +0.030 0 6H9 ( ) depth 6 55.5 2 x M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN 1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm) Model ZZ 133.5 133.5 133.5 143.5 156.5 197.5 238.5

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

CRB2/CRBU2/CRB1

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n i t a r t Body (B) End of rotation a o n R g e (mm) Size Rotation range (mm) 50 Size Q M N Body (A) 63 50 Rc 1/8 21 18 (90) 45 , 90 , 135 +8 0 +8 0 +6 0 Q N 80 63 Rc 1/8 27 25 A port B port 100 80 Rc 1/4 29 30 Key position (Start of rotation) 100 Rc 1/4 38 38 M Start

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start

Table of Contents

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Applicable to single vane type only) Rotation starts from the horizontal line (90 down from the top to the right side). o n ti a r t a o n R g e End of rotation Body (B) (mm) Rotation range Size (mm) 50 Size N M Q Body (A) (90) 63 50 18 21 Rc 1/8 45 , 90 , 135 +8 0 +8 0 +6 0 A port B port Q N 80 63 25 27 Rc 1/8 Key position 100 80 30 29 Rc 1/4 (Start of rotation) 100 38 38 Rc 1/4 M Start

CV/MVGQ

' view RE A B Breathing hole REC A-A' view CX CY MQQ M RHC Manual button MK(2) RS Q G RS H A RZQ MI W S Non-lube type Long stroke type CEP1 CE1 Component Parts CE2 Note Material Material No.

CV/MVGQ

If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Note 3) When a load is applied directly to the body, the loaded weight should be no greater than the allowable load weights on page 8-15-38.

VQZ1000/2000/3000

Note 2) Weight without sub-plate 2-7-37 Base Mounted 38 38 Series VQZ1000/2000/3000 Construction: VQZ1000/2000/3000 Metal seal type Rubber seal type r e w q r e w q 2 position single 2 position single (A) 4 (B) 2 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 5 (R1) 1 (P) 3 (R2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

LEC-OM02904

(1) 1 2 16 4 6 4 (2) SW1 Ab AC Ad Ab A b A b . A C A d A E A F A H A A (1) b # # Ready-off Ready-off (1) d # # ON ON (1) C # # OFF OFF (2) * * No.No.81 8 8 8 CPU CPU (3) 0 0. b JOGDO (1) # #. b (3) # #. d # #. C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

KR

(mm) Model N L A N-applicable tubing O.D.

CG5-S

Cushion ring Brass Replacement parts: Water resistant scraper (Part No.8) Note) Note) The scraper is held into the Rod cover with a light press fit. The scraper can be carefully pried out, and replaced with a press fit using a manual arbor press.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

port) (External pilot style) 2.5 1 57.1(GZ, GS: 57.8) [58.8] 55.5 [62] 43.1 36.5 25.5 10.5 P R 17 6.5 21.5 36.2 A A A A X X 20.5 38 2-5.5 (Mounting holes) (Lead wire length) 4-Rc (PT)1/8 (P/R port) G: 300 H: 600 (Pitch) 15.5 Manual override L3 P=16 7.5 4.5 Depress and turn to operate and lock override.

MG

3 Hexagon socket head taper plug Slide Bearing Felt Holder Ball bushing 16 20 25 32 40 50 63 80 100 MGP50-A-PS MGP63-A-PS MGP80-A-PS MGP100-A-PS MGP16-A-PS MGP20-A-PS MGP25-A-PS MGP32-A-PS MGP40-A-PS Set of nos. above @3, @4, @5 @6, @7, @8 Set of nos. above @3, @4, @5 @6, @7, @8 !4 !5 !6 !7 Except 16 Except 16 Seal kit includes @3 to @8.

CQS

For installation and removal, use an appropriate pair of pliers (tool for installing a type C snap ring). 2. Even if a proper plier (tool for installing type C snap ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier (tool for installing a type C snap ring).

High Power Cylinder Series RHC

Note 2) Contact P/A if a stroke greater than the maximum stroke is desired.