RSH/RS1H

(Resin, Carbon steel) J 20 14 32 20 50 32 63 40 63 40 80 Bore size (mm) Easy maintenance is possible with a shock absorber that can be removed simply by loosening the bolts and shock absorber fixing screw from the stopper.

RSH/RS1H

(Resin, Carbon steel) J 20 14 32 20 50 32 63 40 63 40 80 Bore size (mm) Easy maintenance is possible with a shock absorber that can be removed simply by loosening the bolts and shock absorber fixing screw from the stopper.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

BA 0 0.3 CA BA 0 0.3 Drawing of view E MM (mm) Bore size Z A NN S Y LB LC LH LT LX LY LZ X 85.5 6 15 15 17 3 8 12 11 28 16.5 4.5 9 1.6 24 16.5 32 24.5 7 M3 x 0.5 M8 x 1.0 57.5 5 T NA NB BA BB CA CB D F GA GB GC H 3 7 83 82 16 10 54 55 M12 x 1.0 M10 x 1.0 21.5 23 5.5 5.5 14 14 2.3 2.3 33 33 25 25 42 42 20.5 20.5 9.5 9.5 M5 x 0.8 M4 x 0.7 18.3 12 17 20 20 14 5 4 8 8 5 5 5 5 11 11 28 28 15

VM

R-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Applicable tubing O.

53

Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Electric Actuator Triple Axis P&P Unit

Motor mounting process M5 x 14 Tightening torque 4.4Nm0.2Nm M4 x 14 Tightening torque 2.1Nm0.1Nm Plate A M4 x 14 M4 x 12 B 22 22 B section detail A section detail 18 Electric Actuator/Maintenance Guide 3 Be sure to read before handling. Belt mounting procedure Belt mounting process Belt mounting process 1. Confirm that the belt to be used has the following part number.

Title not found

How to Order NCJ2 NCDJ2 '"nn"J ' Nol available on dolble od or Mounting style Auto switch @ * see.atalog N30l for avaibbb a!

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

25 14 17.5 M8 x 1.25 18 10 20 M14 x 1.5 30 17 66 50 11 52 176 10 53 88.5 M16 x 1.5 25 9 73 73 53 20 50 28 17 17 M10 x 1.5 20 12 22 30 19 73 63 11 55 194 10 60 95 M18 x 1.5 28 8 80 80 60 22.4 55 30 17 17 M10 x 1.5 22 12 25 30 21 80 80 13 65 212 12 75 115 M22 x 1.5 32 8 100 100 75 28 65 32 22 20 M12 x 1.75 26 14 29 35 26 90 100 13 80 234 14 90 139 M27 x 2 38 6.5 118 118 90 35.5 80 35 27 19

LEY-OM007

40[%] INPON 2[mm] j 1[mm] j AREA ON OFF ON INP OFF 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 -26- 3 INC a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 ABS()/ / INC()/ / 1 30[mm] No.0 No.0INC 10 (INC) c 50[mm] 0 10 20 30 40 50 [mm] 2 30[mm] No.1 No.1INC

PSxx-OMR0001CN

) ON (NPN/PNP) (100 kPa200 kPa) (27 ) ISA3 2 -61No.PS-OMR0001CN-J 5 (100 kPa 200 kPa) 80 kPa 220 kPa () OUT1 (OUT1) 80 mA OFF, (14 kPa ) OFF 220 kPa () -20 kPa220 kPa (-20 kPa) [ON/OFF] [] [kPa] () -62No.PS-OMR0001CN-J Revision history A B C D E F [2018 3 ] G [2018 6 ] H [2019 9 ] I [2021 10 ] J [2022 6 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

15.5 (12-, 14 port) 9 (2-, 4 port) 74.5 66.5 8.5 PE port 23 13.5 SMC 16 16 M5-2 port 12, 14 port 1/8-2 port 2, 4 port 1/8 1 port 1/8-2 port 3, 5 port EVS1-02-FG-D-M0 EVS1-02-F G-D-M0 H J I 136 149 68 21.5 (14 port) 68 21.5 (12 port) 21.5 (14 port) 21.5 (12 port) 8.5 (4 port) 8.5 (2 port) 8.5 (4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator

33

14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow

MXH Series Compact Slide

20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35 + Stroke 46.5 + Stroke 11.5 20 4-M4 x 0.7 Depth 6 5 + Stroke 12 Stroke (mm) LT NS LA LB J 5 14 49 4 10 10 49 14 10 4 15 24 59 4 20 20 59 24 20 4 25 30 69 4 30 30 69 30 30 4 40 45 20 79 6 20 50 89 55 25 25 6 60 60 30 99 6 30 34 Compact Slide MXH Series Dimensions 16 LT (mm) 8 24 16 LA LB 14 J-M4 x 0.7 Depth 9 3-M5 x 0.8 through Bottom hole

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

Title not found

Connector C Actuator side (Terminal no.) 1 2 5 6 (14) (18) 8 A1 B1 (13.5) (17.7) (17.7) Cable length (L) 1 3 5 8 A B C 1 2 A6 B6 1.5 m 3 m 5 m 8 m (30.7) Connector A 5 6 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 m (14.2) Connector C (Terminal no.) 1 2 5 6 15 m 5.5 6.3 Actuator side (14) (18) (Terminal

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

0 w u r t e Gasket M5 type only 14 Stainless steel !2 Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) The material of the lock nut option-J (round type) is brass. However, note that only the AS221FM uses steel. Note 3) The surface treatment of the lock nut option-J (round type) is electroless nickel plated. !1 q i !3 !

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

CQS

DOperating pressure (MPa) Action Bore size (mm) Operating direction Piston area (mm 2) Retracted side Extended side Rod size (mm) 0.3 0.5 0.7 -X IN 14 12 6 20 43 65 4 20OUT 113 IN Spring return Spring extend 15 16 8 45 86 126 6 Data OUT 201 IN 15 20 10 78 141 204 6 OUT 314 IN 21 25 12 126 224 323 11 OUT 491 IN 84.8 10 Allowable Kinetic Energy (J) 12 6 14 31 48 3 OUT 25 20 16 12 Bore

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Hexagon width across flats 14 Hexagon width across flats 27 Hexagon width across flats 27 9 9 35 35 M18 x 1.5 M18 x 1.5 1/8 (Rc, NPT, NPTF) 1/8 (Rc, NPT, NPTF) 9 9 10 10 Width across flats 16 Width across flats 16 Hexagon width across flats 21 J Hexagon width across flats 21 J 4 x M4 x 0.7 Width across flats 37 Width across flats 24 28 45 I I 3 x M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18