Fluoropolymer Piping Equipment

Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" LVN Size Size Symbol Symbol 1 2 3 4 5 6 03 04 06 08 10 12 19 25 03 07 11 13 19 25 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQHB LQHB 1 1/8" TL TIL 2 1/4" 3 3/8" TLM TILM 4 5 6 1/2" 3/4" 1" TD TID TH TIH Note) For details of the applicable tubing sizes, refer to page 945. Specifications Piping 1.

7ND9071en

Housing 15 1 O-ring 16 1 Washer 18 1 Wave spring 19 1 Bushing 36 1 Grounding screw 39 1 Inner cover 42 3 Screw 47 3 Screw 57 1 Conduit entry adapter 61 1 Spool valve cover 63 1 Gasket 100 1 Cover ND92_E1 = H087634, ND92_E2 = H087617, ND9300 = H087628 ND72_E1 = H087634, ND72_E2 = H087617 104 1 O-ring 107 1 Screw 109 1 Pointer 110 1 Stop screw 111 1 Spring 120 1 Prestage unit H039292, also

100

1 o !0 t y i !2 !3 !

IR1000/2000/3000

N01 Connection NPT 1/8 N02 Connection NPT 1/4 Port size N03 Connection NPT 3/8 Option specifications Application Size Symbol N04 Connection NPT 1/2 IRV3000 IRV2000 IRV1000 F01 Connection G 1/8 01 02 03 04 1/8 1/4 3/8 1/2 F02 Connection G 1/4 F03 Connection G 3/8 F04 Connection G 1/2 Accessory (Option) Part No. Part no.

ARM10/11

IN side Straight, Elbow OUT side Straight, Elbow Also available in inch sizes. 14-4-19 2 Compact Manifold Regulator Common Supply Type Series ARM11A How to Order ARM11A 1 A 1 A Z 1 07 1 2 3 4 5 6 7 1. Handle position 2.

ARM10/11

IN side Straight, Elbow OUT side Straight, Elbow Also available in inch sizes. 14-4-19 2 Compact Manifold Regulator Common Supply Type Series ARM11A How to Order ARM11A 1 A 1 A Z 1 07 1 2 3 4 5 6 7 1. Handle position 2.

Compact Manifold Regulator

0.20 0.4 0.15 0.3 0.10 0.2 0.05 0.1 0 0.00 0 20 40 60 80 100 0 50 100 150 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

Vacuum Pad: Ball Joint Type

Pad diameter 10 10 Vacuum entry port (Refer to Table (1) for applications.) 13 13 16 16 20 20 Table (1) Vacuum Entry/Mounting 25 25 32 32 Mounting 40 40 10 to 16 20 to 50 Pad dia. 50 50 M10 x 1 M14 x 1 Thread dia./ Port size Connection Symbol A10 A14 B5 M5 x 0.8 Pad type B01 Rc 1/8 Female thread Vacuum entry F Ball joint type N01 NPT 1/8 T01 NPTF 1/8 04 4 tube Material One-touch fitting

This is a legacy product, and replaced byZH05DSA-N01-N01-N01, VACUUM EJECTOR, 1/8 SUP, VACUUM SERIES, ZH VACUUM EJECTOR, AD, ZH NOZZLE SIZE 0.5, .10582 lb

lPSMt

Gauge Adaptor (w) P30501 056 NPT Run Tee fitting gauge installation (90") Gauge Adaptor (Y) P30501 057 Branch Tee fitting gauge installation (90") I For SlG, pressure range 0-30psi, 1/8 NPT G43-P2-N01 or KS1OB.SD2 (St. Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.

lPSMt

Gauge Adaptor (w) P30501 056 NPT Run Tee fitting gauge installation (90") Gauge Adaptor (Y) P30501 057 Branch Tee fitting gauge installation (90") I For SlG, pressure range 0-30psi, 1/8 NPT G43-P2-N01 or KS1OB.SD2 (St. Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.

NARM Series

8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

Pneumatic Positioner IP300/IP3100

'1l8 NPT G43-P10-N01 or KSl OB-AD1 1 (St.

1/8" Polyurethane Tubing 50 ft. - Black TIUB-01-B-100-MW 1/8" Polyurethane Tubing 100 ft. - Black TIUB-03-B-50-MW 5/32" Polyurethane Tubing 50 ft. - Black TIUB-03-B-100-MW 5/32" Polyurethane Tubing 100 ft. - Black TIUB-07-B-50-MW 1/4" Polyurethane Tubing 50 ft. - Black TIUB-07-B-100-MW 1/4" Polyurethane Tubing

1/8" Polyurethane Tubing 50 ft. - Black TIUB-01-B-100-MW 1/8" Polyurethane Tubing 100 ft. - Black TIUB-03-B-50-MW 5/32" Polyurethane Tubing 50 ft. - Black TIUB-03-B-100-MW 5/32" Polyurethane Tubing 100 ft. - Black TIUB-07-B-50-MW 1/4" Polyurethane Tubing 50 ft. - Black TIUB-07-B-100-MW 1/4" Polyurethane Tubing

1/8" Polyurethane Tubing 50 ft. - Black TIUB-01-B-100-MW 1/8" Polyurethane Tubing 100 ft. - Black TIUB-03-B-50-MW 5/32" Polyurethane Tubing 50 ft. - Black TIUB-03-B-100-MW 5/32" Polyurethane Tubing 100 ft. - Black TIUB-07-B-50-MW 1/4" Polyurethane Tubing 50 ft. - Black TIUB-07-B-100-MW 1/4" Polyurethane Tubing

1/8" Polyurethane Tubing 50 ft. - Black TIUB-01-B-100-MW 1/8" Polyurethane Tubing 100 ft. - Black TIUB-03-B-50-MW 5/32" Polyurethane Tubing 50 ft. - Black TIUB-03-B-100-MW 5/32" Polyurethane Tubing 100 ft. - Black TIUB-07-B-50-MW 1/4" Polyurethane Tubing 50 ft. - Black TIUB-07-B-100-MW 1/4" Polyurethane Tubing

1/8" Polyurethane Tubing 50 ft. - Black TIUB-01-B-100-MW 1/8" Polyurethane Tubing 100 ft. - Black TIUB-03-B-50-MW 5/32" Polyurethane Tubing 50 ft. - Black TIUB-03-B-100-MW 5/32" Polyurethane Tubing 100 ft. - Black TIUB-07-B-50-MW 1/4" Polyurethane Tubing 50 ft. - Black TIUB-07-B-100-MW 1/4" Polyurethane Tubing

1/8" Polyurethane Tubing 50 ft. - Black TIUB-01-B-100-MW 1/8" Polyurethane Tubing 100 ft. - Black TIUB-03-B-50-MW 5/32" Polyurethane Tubing 50 ft. - Black TIUB-03-B-100-MW 5/32" Polyurethane Tubing 100 ft. - Black TIUB-07-B-50-MW 1/4" Polyurethane Tubing 50 ft. - Black TIUB-07-B-100-MW 1/4" Polyurethane Tubing